GB9206442D0 - Treatment chamber - Google Patents
Treatment chamberInfo
- Publication number
- GB9206442D0 GB9206442D0 GB929206442A GB9206442A GB9206442D0 GB 9206442 D0 GB9206442 D0 GB 9206442D0 GB 929206442 A GB929206442 A GB 929206442A GB 9206442 A GB9206442 A GB 9206442A GB 9206442 D0 GB9206442 D0 GB 9206442D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- treatment chamber
- chamber
- treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB929206442A GB9206442D0 (en) | 1992-03-25 | 1992-03-25 | Treatment chamber |
JP5516341A JPH06508661A (ja) | 1992-03-25 | 1993-03-05 | 処理室 |
PCT/GB1993/000461 WO1993019222A1 (fr) | 1992-03-25 | 1993-03-05 | Chambre de traitement |
EP19930905518 EP0586651A1 (fr) | 1992-03-25 | 1993-03-05 | Chambre de traitement |
AU36419/93A AU3641993A (en) | 1992-03-25 | 1993-03-05 | Treatment chamber |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB929206442A GB9206442D0 (en) | 1992-03-25 | 1992-03-25 | Treatment chamber |
Publications (1)
Publication Number | Publication Date |
---|---|
GB9206442D0 true GB9206442D0 (en) | 1992-05-06 |
Family
ID=10712771
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB929206442A Pending GB9206442D0 (en) | 1992-03-25 | 1992-03-25 | Treatment chamber |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP0586651A1 (fr) |
JP (1) | JPH06508661A (fr) |
AU (1) | AU3641993A (fr) |
GB (1) | GB9206442D0 (fr) |
WO (1) | WO1993019222A1 (fr) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9127340B2 (en) | 2009-02-13 | 2015-09-08 | Asm International N.V. | Selective oxidation process |
US8889565B2 (en) | 2009-02-13 | 2014-11-18 | Asm International N.V. | Selective removal of oxygen from metal-containing materials |
US7829457B2 (en) | 2009-02-20 | 2010-11-09 | Asm International N.V. | Protection of conductors from oxidation in deposition chambers |
US8507388B2 (en) | 2010-04-26 | 2013-08-13 | Asm International N.V. | Prevention of oxidation of substrate surfaces in process chambers |
US11390950B2 (en) * | 2017-01-10 | 2022-07-19 | Asm Ip Holding B.V. | Reactor system and method to reduce residue buildup during a film deposition process |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61275192A (ja) * | 1985-05-31 | 1986-12-05 | Furukawa Electric Co Ltd:The | 半導体薄膜気相成長法 |
JPS63227011A (ja) * | 1987-03-17 | 1988-09-21 | Fujitsu Ltd | 化学気相成長装置 |
US5002011A (en) * | 1987-04-14 | 1991-03-26 | Kabushiki Kaisha Toshiba | Vapor deposition apparatus |
US5108792A (en) * | 1990-03-09 | 1992-04-28 | Applied Materials, Inc. | Double-dome reactor for semiconductor processing |
-
1992
- 1992-03-25 GB GB929206442A patent/GB9206442D0/en active Pending
-
1993
- 1993-03-05 AU AU36419/93A patent/AU3641993A/en not_active Abandoned
- 1993-03-05 JP JP5516341A patent/JPH06508661A/ja active Pending
- 1993-03-05 EP EP19930905518 patent/EP0586651A1/fr not_active Withdrawn
- 1993-03-05 WO PCT/GB1993/000461 patent/WO1993019222A1/fr not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
AU3641993A (en) | 1993-10-21 |
EP0586651A1 (fr) | 1994-03-16 |
WO1993019222A1 (fr) | 1993-09-30 |
JPH06508661A (ja) | 1994-09-29 |
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