GB9206442D0 - Treatment chamber - Google Patents

Treatment chamber

Info

Publication number
GB9206442D0
GB9206442D0 GB929206442A GB9206442A GB9206442D0 GB 9206442 D0 GB9206442 D0 GB 9206442D0 GB 929206442 A GB929206442 A GB 929206442A GB 9206442 A GB9206442 A GB 9206442A GB 9206442 D0 GB9206442 D0 GB 9206442D0
Authority
GB
United Kingdom
Prior art keywords
treatment chamber
chamber
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB929206442A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
METAL RESEARCH SEMICONDUCTORS
Original Assignee
METAL RESEARCH SEMICONDUCTORS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by METAL RESEARCH SEMICONDUCTORS filed Critical METAL RESEARCH SEMICONDUCTORS
Priority to GB929206442A priority Critical patent/GB9206442D0/en
Publication of GB9206442D0 publication Critical patent/GB9206442D0/en
Priority to JP5516341A priority patent/JPH06508661A/ja
Priority to PCT/GB1993/000461 priority patent/WO1993019222A1/fr
Priority to EP19930905518 priority patent/EP0586651A1/fr
Priority to AU36419/93A priority patent/AU3641993A/en
Pending legal-status Critical Current

Links

GB929206442A 1992-03-25 1992-03-25 Treatment chamber Pending GB9206442D0 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB929206442A GB9206442D0 (en) 1992-03-25 1992-03-25 Treatment chamber
JP5516341A JPH06508661A (ja) 1992-03-25 1993-03-05 処理室
PCT/GB1993/000461 WO1993019222A1 (fr) 1992-03-25 1993-03-05 Chambre de traitement
EP19930905518 EP0586651A1 (fr) 1992-03-25 1993-03-05 Chambre de traitement
AU36419/93A AU3641993A (en) 1992-03-25 1993-03-05 Treatment chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB929206442A GB9206442D0 (en) 1992-03-25 1992-03-25 Treatment chamber

Publications (1)

Publication Number Publication Date
GB9206442D0 true GB9206442D0 (en) 1992-05-06

Family

ID=10712771

Family Applications (1)

Application Number Title Priority Date Filing Date
GB929206442A Pending GB9206442D0 (en) 1992-03-25 1992-03-25 Treatment chamber

Country Status (5)

Country Link
EP (1) EP0586651A1 (fr)
JP (1) JPH06508661A (fr)
AU (1) AU3641993A (fr)
GB (1) GB9206442D0 (fr)
WO (1) WO1993019222A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9127340B2 (en) 2009-02-13 2015-09-08 Asm International N.V. Selective oxidation process
US8889565B2 (en) 2009-02-13 2014-11-18 Asm International N.V. Selective removal of oxygen from metal-containing materials
US7829457B2 (en) 2009-02-20 2010-11-09 Asm International N.V. Protection of conductors from oxidation in deposition chambers
US8507388B2 (en) 2010-04-26 2013-08-13 Asm International N.V. Prevention of oxidation of substrate surfaces in process chambers
US11390950B2 (en) * 2017-01-10 2022-07-19 Asm Ip Holding B.V. Reactor system and method to reduce residue buildup during a film deposition process

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61275192A (ja) * 1985-05-31 1986-12-05 Furukawa Electric Co Ltd:The 半導体薄膜気相成長法
JPS63227011A (ja) * 1987-03-17 1988-09-21 Fujitsu Ltd 化学気相成長装置
US5002011A (en) * 1987-04-14 1991-03-26 Kabushiki Kaisha Toshiba Vapor deposition apparatus
US5108792A (en) * 1990-03-09 1992-04-28 Applied Materials, Inc. Double-dome reactor for semiconductor processing

Also Published As

Publication number Publication date
AU3641993A (en) 1993-10-21
EP0586651A1 (fr) 1994-03-16
WO1993019222A1 (fr) 1993-09-30
JPH06508661A (ja) 1994-09-29

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