GB910059A - Improvements in and relating to the pumping-off of gases and vapours by sorption - Google Patents

Improvements in and relating to the pumping-off of gases and vapours by sorption

Info

Publication number
GB910059A
GB910059A GB4041460A GB4041460A GB910059A GB 910059 A GB910059 A GB 910059A GB 4041460 A GB4041460 A GB 4041460A GB 4041460 A GB4041460 A GB 4041460A GB 910059 A GB910059 A GB 910059A
Authority
GB
United Kingdom
Prior art keywords
getter
vessel
zone
conveyer
regeneration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4041460A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
Original Assignee
Balzers Patent und Beteiligungs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent und Beteiligungs AG filed Critical Balzers Patent und Beteiligungs AG
Publication of GB910059A publication Critical patent/GB910059A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38Exhausting, degassing, filling, or cleaning vessels
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/06Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with moving adsorbents, e.g. rotating beds
    • B01D53/10Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with moving adsorbents, e.g. rotating beds with dispersed adsorbents
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04FPUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00Diffusion pumps
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J19/00Details of vacuum tubes of the types covered by group H01J21/00
    • H01J19/28Non-electron-emitting electrodes; Screens
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00Discharge tubes and lamps
    • H01J2893/0001Electrodes and electrode systems suitable for discharge tubes or lamps
    • H01J2893/0011Non-emitting electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Dispersion Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Gas Separation By Absorption (AREA)

Abstract

910,059. Obtaining high vacua. BALZERS PATENT-UND-LIZENZ-ANSTALT. Nov. 24, 1960 [Dec. 9, 1959], No. 40414/60. Class 8(1). In a getter pump for pumping off gases and/or vapours by means of a loose granular getter which is led into the vessel to be pumped out and after having been loaded with gases and/or vapours is led out of the vessel. The getter is continuously sluiced into the vessel to be evacuated and continuously sluiced out of it after it has absorbed gas and/or vapour, after which.it is regenerated by heating and returned to the vessel to be evacuated. It is cooled before and/or after regeneration. The regeneration may take place in a pre vacuum. The getter absorbs the gas and/or vapour by adsorption or by chemical action. The getter is moved, by a vibratory conveyer or in some circumstances by a conventional conveyer. The container for the getter extends from the inlet point to the outlet point. At least one sluice means is provided with cooling means. The sluice means may have inclined tubes completely filled with the getter material passing through them by gravity. Preferably a regenerator is placed between the outlet sluice and the inlet sluice, conveyer means returning the getter from the outlet sluice through the regenerator to the inlet sluice. The regenerator and conveyer means are outside the vessel. At least two getter pump stages may be arranged in series each having a sorption zone and a regeneration zone. The regeneration zone of each stage communicates with the sorption zone of the next stage except the regeneration zone of the last stage which is in communication with an external pre vacuum source. Preferably an inverted hollow cone is arranged inside the vessel, Fig. 2, and connected to it by resilient sealing membrane 23 and divided into compartments by disc partitions 26, 27 having small annular gaps around their circumferences, annular heating and annular cooling means 24, 25 being arranged alternately around the cone forming regenerating and sorption zones respectively. The heating means is formed by electric coils and the cooling means by pipes. The cone forms a helical vibratory conveyer conveying the getter upwards from the apex to the base of the cone, the annular gaps forming sluice means and inclined return tubes being provided scooping up at one end of a pumping zone and returning to the regenerating zone by gravity. The vacuum pump is connected to the apex of the cone. In Fig. 1 the getter is supplied through tube 2 from storage tank 12 and flows over an inclined wall which is cooled by cooling pipes 4 then through a tube 5 to the lower end of a regenerator 6 which contains a vibratory upward conveyer track 8 heated by an electrical heating coil 7 and vibrated by an electro mechanical vibrator, overflows at the top 11 and is returned via tank 12 to the vessel to be evacuated. Valves 13, 14 shut off this vessel but may be omitted for continuous operation. Tubes 2, 5 may have cooling means. The getter may be silica gel, zeolites, aluminium oxides, activated carbon, metal powders. Ti or Zr may be used for hydrogen gas, water vapour, oxygen nitrogen. The device can be used for the purifying of gases, even under normal pressure. In this case the device acts as a pump only for those gas components which are gettered. For the achievement of especially high vacua put the regeneration side under a preliminary vacuum by a separate pump which may be connected at 15 or to arrange several pumps in series. In a second embodiment, Fig. 2, a casing 21, 22 the preliminary vacuum pump is connected to pipe 31 in addition to the main vacuum pump. The getter material is gradually moved from the apex to the base of the cone. Pipes 35, 40 return the getter from each cooling zone to each heating zone. There may be more than two gettering stages arranged in series. The vibratory conveyer track may be a helical groove at the inside of a cylinder. Other known conveyer means may be used in the regeneration zone even those which are conveyer belts. If the regeneration zone is dispensed with, the getter is passed from a container into the vessel to -be evacuated and after acting as a getter it is removed and collected in another container which is sealed, e.g. by the getter itself, from the vessel to be evacuated. If some gases e.g. noble gases cannot be gettered, a preliminary pump is provided. The gettered gases when released in the regeneration stage cannot return to the vacuum vessel since the getter seals the annular gaps.
GB4041460A 1959-12-09 1960-11-24 Improvements in and relating to the pumping-off of gases and vapours by sorption Expired GB910059A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEB55833A DE1105553B (en) 1959-12-09 1959-12-09 Method for pumping off gases and vapors by means of an absorbent and device for carrying out this method

Publications (1)

Publication Number Publication Date
GB910059A true GB910059A (en) 1962-11-07

Family

ID=6971119

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4041460A Expired GB910059A (en) 1959-12-09 1960-11-24 Improvements in and relating to the pumping-off of gases and vapours by sorption

Country Status (3)

Country Link
CH (1) CH380284A (en)
DE (1) DE1105553B (en)
GB (1) GB910059A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112067370A (en) * 2020-09-11 2020-12-11 上海朋环测控技术股份有限公司 Adsorption tube aging instrument and method
CN115301037A (en) * 2022-04-25 2022-11-08 济南嘉禾瑞丰科技开发有限公司 High-efficient purifying column of industry VOCs waste gas

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1046249B (en) * 1956-04-05 1958-12-11 Dr Gerhard Fricke Method and device for generating a high vacuum

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112067370A (en) * 2020-09-11 2020-12-11 上海朋环测控技术股份有限公司 Adsorption tube aging instrument and method
CN112067370B (en) * 2020-09-11 2024-05-10 上海朋环测控技术股份有限公司 Adsorption tube aging instrument and method
CN115301037A (en) * 2022-04-25 2022-11-08 济南嘉禾瑞丰科技开发有限公司 High-efficient purifying column of industry VOCs waste gas
CN115301037B (en) * 2022-04-25 2023-08-29 济南嘉禾瑞丰科技开发有限公司 High-efficient purifying column of industry VOCs waste gas

Also Published As

Publication number Publication date
CH380284A (en) 1964-07-31
DE1105553B (en) 1961-04-27

Similar Documents

Publication Publication Date Title
JP5506396B2 (en) Ozone concentrator
US3335550A (en) Cryosorption apparatus
GB1068165A (en) Improvements in sorption vacuum pumps
US3668881A (en) Adsorptive cryopumping method and apparatus
TW200300699A (en) Gas supply method and device
CN105347305B (en) A kind of tritium gas purification system
CN104565803A (en) Perlite filling device
JP2008296089A (en) Method for isolating and enriching hydrogen isotope
US4479360A (en) Cryopump
CN103569979A (en) Purifying method and purifying device for argon
GB910059A (en) Improvements in and relating to the pumping-off of gases and vapours by sorption
US3609062A (en) Getter pump
US3210915A (en) Sorption pump for pumping off gases and vapors
CN117225141A (en) Carbon dioxide capturing device and working method thereof
US4089185A (en) High vacuum pump system
GB1502877A (en) Method of producing vacuum in a receptacle and a vacuum pump for effecting same
JP3017552B2 (en) Production method of oxygen-rich gas by pressure fluctuation adsorption method
CN207980782U (en) A kind of shuttle efficient absorption device of multizone
GB1239192A (en)
JPS57119890A (en) Ozone injecting device
JP3753115B2 (en) Gas adsorption / release method and apparatus
GB1532933A (en) Sorption vacuum pump
Bannock Molecular sieve pumping
WO2013109200A1 (en) Mini nitrogen/oxygen generator
US1189664A (en) Neon-tube.