GB8721232D0 - Thin film deposition apparatus - Google Patents

Thin film deposition apparatus

Info

Publication number
GB8721232D0
GB8721232D0 GB878721232A GB8721232A GB8721232D0 GB 8721232 D0 GB8721232 D0 GB 8721232D0 GB 878721232 A GB878721232 A GB 878721232A GB 8721232 A GB8721232 A GB 8721232A GB 8721232 D0 GB8721232 D0 GB 8721232D0
Authority
GB
United Kingdom
Prior art keywords
thin film
deposition apparatus
film deposition
thin
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB878721232A
Other versions
GB2220679A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to GB8721232A priority Critical patent/GB2220679A/en
Publication of GB8721232D0 publication Critical patent/GB8721232D0/en
Publication of GB2220679A publication Critical patent/GB2220679A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
GB8721232A 1987-09-09 1987-09-09 Apparatus for thin film deposition of aerosol particles by thermolytic decomposition Withdrawn GB2220679A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB8721232A GB2220679A (en) 1987-09-09 1987-09-09 Apparatus for thin film deposition of aerosol particles by thermolytic decomposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8721232A GB2220679A (en) 1987-09-09 1987-09-09 Apparatus for thin film deposition of aerosol particles by thermolytic decomposition

Publications (2)

Publication Number Publication Date
GB8721232D0 true GB8721232D0 (en) 1987-10-14
GB2220679A GB2220679A (en) 1990-01-17

Family

ID=10623532

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8721232A Withdrawn GB2220679A (en) 1987-09-09 1987-09-09 Apparatus for thin film deposition of aerosol particles by thermolytic decomposition

Country Status (1)

Country Link
GB (1) GB2220679A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE602004007089T2 (en) * 2003-11-14 2008-02-21 Sharp K.K. Apparatus for producing thin films

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1275339A (en) * 1970-06-04 1972-05-24 Gen Technologies Corp Process of plating by pyrolytic deposition
JPS515322A (en) * 1974-07-02 1976-01-17 Nippon Sheet Glass Co Ltd Itagarasuhyomenheno kinzokusankabutsuhimakukeiseihoho
JPS52117309A (en) * 1976-03-29 1977-10-01 Nippon Sheet Glass Co Ltd Method and apparatus for forming film of metallic oxide on plate glass surface
GB1523991A (en) * 1976-04-13 1978-09-06 Bfg Glassgroup Coating of glass
GB2068937B (en) * 1980-01-31 1984-02-29 Bfg Glassgroup Coating hot glass with metals or metal compounds especially oxides
US4401695A (en) * 1982-06-01 1983-08-30 Ppg Industries, Inc. Method of and apparatus for applying powder coating reactants
FR2566808B1 (en) * 1984-06-27 1986-09-19 Mircea Andrei METHOD AND REACTOR FOR EPITAXIAL VAPOR GROWTH
NL8602357A (en) * 1985-10-07 1987-05-04 Epsilon Ltd Partnership APPARATUS AND METHOD FOR THE CHEMICAL VAPOR DISPOSAL USING AN AXIAL SYMMETRICAL GAS FLOW.

Also Published As

Publication number Publication date
GB2220679A (en) 1990-01-17

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)