GB8601077D0 - Measuring dimensions - Google Patents

Measuring dimensions

Info

Publication number
GB8601077D0
GB8601077D0 GB868601077A GB8601077A GB8601077D0 GB 8601077 D0 GB8601077 D0 GB 8601077D0 GB 868601077 A GB868601077 A GB 868601077A GB 8601077 A GB8601077 A GB 8601077A GB 8601077 D0 GB8601077 D0 GB 8601077D0
Authority
GB
United Kingdom
Prior art keywords
measuring dimensions
dimensions
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB868601077A
Other versions
GB2170596A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of GB8601077D0 publication Critical patent/GB8601077D0/en
Publication of GB2170596A publication Critical patent/GB2170596A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
GB08601077A 1985-02-01 1986-01-17 Measuring dimensions with electron microscope Withdrawn GB2170596A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1838785A JPS61176810A (en) 1985-02-01 1985-02-01 Size measuring instrument

Publications (2)

Publication Number Publication Date
GB8601077D0 true GB8601077D0 (en) 1986-02-19
GB2170596A GB2170596A (en) 1986-08-06

Family

ID=11970301

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08601077A Withdrawn GB2170596A (en) 1985-02-01 1986-01-17 Measuring dimensions with electron microscope

Country Status (2)

Country Link
JP (1) JPS61176810A (en)
GB (1) GB2170596A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2579197A (en) * 1997-03-12 1998-09-29 Ilyin, Mikhail Julievich Method for measuring linear dimensions

Also Published As

Publication number Publication date
JPS61176810A (en) 1986-08-08
GB2170596A (en) 1986-08-06

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)