GB852070A - Glow discharge process and apparatus therefor - Google Patents

Glow discharge process and apparatus therefor

Info

Publication number
GB852070A
GB852070A GB35776/56A GB3577656A GB852070A GB 852070 A GB852070 A GB 852070A GB 35776/56 A GB35776/56 A GB 35776/56A GB 3577656 A GB3577656 A GB 3577656A GB 852070 A GB852070 A GB 852070A
Authority
GB
United Kingdom
Prior art keywords
tube
electrode
gas
cooling
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB35776/56A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elektrophysikalische Anstalt Bernhard Berghaus
Original Assignee
Elektrophysikalische Anstalt Bernhard Berghaus
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elektrophysikalische Anstalt Bernhard Berghaus filed Critical Elektrophysikalische Anstalt Bernhard Berghaus
Publication of GB852070A publication Critical patent/GB852070A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018Glow discharge
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01GCOMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G5/00Compounds of silver
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/34Methods of heating
    • C21D1/38Heating by cathodic discharges
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Discharge Heating (AREA)

Abstract

852,070. Nitriding. ELEKTROPHYSIKALISCHE ANSTALT B. BERGHAUS. Nov. 22, 1956 [Nov. 22, 1955], No. 35776/56. Class 72 [Also in Groups XI and XL(b)] In heating the surfaces of solid or liquid bodies by glow discharge in a vessel under partial gas pressure especially in the nitriding or carburization of metal bodies, the surfaces are maintained at a predetermined temperature, e.g. 500‹-550 ‹C. by the gas discharge and heat is led away from the surfaces under treatment by cooling other surfaces of the bodies, whereby the treated surfaces may be subjected to a more intense heating action without increase in the surface temperature. Thus in Fig. 1 a steel tube 1 to be treated is supported in a cooled doublewalled vacuum vessel 2 by pipes 6, 7 through which cooling oil is passed under control of a valve 8 to cool the inside of the tube 1. The current supply 5, e.g. at 500 volts is connected to the tube 1 forming the cathode and to a cylindrical counter electrode 3 surrounding the tube. D.C. or A.C. at 50 cycles may be used. Gas is supplied through a pipe 14 to the vessel in which a partial vacuum is maintained by a pump 11. After a starting operation as described in Specification 805,164, the oil valve 8 is opened. The surface temperature of the tube is monitored by a radiation pyrometer 17 through an aperture 15 in the electrode 3 and a window 16 in the vessel wall 2. The pyrometer may be used to maintain the temperature of the tube surface by increasing the gas pressure or the voltage when the coolant oil passes through the tube and the coolant flow may be increased to allow a greater rate of heating. This regulation and the opening of the oil valve may be controlled automatically by the pyrometer. In Fig. 3 the inner surface of a steel tube 20 is heated, the tube being supported by elastic washers 24 in a surrounding jacket 21 through which cooling oil is circulated. The tube 20 is connected electrically at 35 to the metal jacket 21, which is connected to a current supply 34. A tubular counterelectrode 32 is mounted concentrically within the tube 20 by domed end caps 29 carrying pipes 36 by which the partial vacuum within the tube 20 is adjusted. The hollow electrode 31 is also cooled by a cooling gas or liquid, especially if A.C. is used. For small objects, e.g. a metal tube 40 (Fig. 4) cooling is effected by placing the tube in an aperture in a massive metal block 41 of good heat conductivity, e.g. of copper. The discharge vessel is formed by a metal cowling 45 supported on the metal block 41 by an insulating gas tight ring 44. An electrode bar 47 passes through the cowling into the tube 40 and is connected electrically to the metal block 41, the cowling 45 forming the counter-electrode, and being also connected to the current supply 48, e.g. at 400- 1000 volts. The gas pressure may be regulated at a few m.m., and a glow edge appears on the inside surface of the tube 40 and on the outside of the electrode 47. These glow edges and the associated cathode drop spaces can be made to touch. The block 41 cools the tube 40 by conducting heat therefrom and may be cooled by air or an additional gas or liquid cooling system. It is stated that the degree of hardness or depth of treatment of a body may be increased owing to the increase of energy supply and that the time of the treatment may thus be decreased. Specification 805,163 also is referred to.
GB35776/56A 1955-11-22 1956-11-22 Glow discharge process and apparatus therefor Expired GB852070A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH852070X 1955-11-22

Publications (1)

Publication Number Publication Date
GB852070A true GB852070A (en) 1960-10-26

Family

ID=4542378

Family Applications (1)

Application Number Title Priority Date Filing Date
GB35776/56A Expired GB852070A (en) 1955-11-22 1956-11-22 Glow discharge process and apparatus therefor

Country Status (5)

Country Link
US (1) US2927231A (en)
CH (1) CH349284A (en)
DE (1) DE1060217B (en)
FR (1) FR1210232A (en)
GB (1) GB852070A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3389070A (en) * 1962-11-06 1968-06-18 Berghaus Bernhard Method and means for treating articles on all sides

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3096221A (en) * 1959-09-15 1963-07-02 To A Kako Kabushiki Kaisha Method of quick nitrification in which fluidized particles are employed
US3099589A (en) * 1959-09-15 1963-07-30 To A Kako Kabushiki Kaisha Method of cementation in which fluidized carbon powder particles are employed
US3423562A (en) * 1965-06-24 1969-01-21 Gen Electric Glow discharge apparatus
FR2332336A1 (en) * 1975-11-21 1977-06-17 Vide & Traitement Sa Furnace for ion implantation in metals - suitable for nitriding, carburizing and other treatments
FR2446327A1 (en) * 1979-01-09 1980-08-08 Fours Indls Cie Internal nitriding and/or carburising of gun or extruder barrels - by thermochemical ion bombardment after creating uniform electric field
FR2525636A1 (en) * 1982-04-23 1983-10-28 Creusot Loire Ionic nitriding of holes in steel - of length up to one metre and dia. below ten milli:metres
CH659346A5 (en) * 1983-05-10 1987-01-15 Balzers Hochvakuum DEVICE FOR TREATING THE INTERNAL WALL OF A TUBE.
US4878570A (en) * 1988-01-25 1989-11-07 Dana Corporation Surface hardened sprags and rollers
US5766362A (en) * 1996-09-30 1998-06-16 Becton Dickinson And Company Apparatus for depositing barrier film on three-dimensional articles
DE102009000238B3 (en) 2009-01-15 2010-08-26 Robert Bosch Gmbh Method and device for heat treatment of components
US20190256973A1 (en) * 2018-02-21 2019-08-22 Southwest Research Institute Method and Apparatus for Depositing Diamond-Like Carbon Coatings

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB427623A (en) * 1932-07-19 1935-04-23 Deutsche Edelstahlwerke Ag A method of treating metallic articles or the metallic surface layers or coatings of articles
US2371278A (en) * 1938-01-25 1945-03-13 Electric reaction furnace
GB529544A (en) * 1938-06-08 1940-11-22 Bernhard Berghaus Improvements in and relating to the thermal obtention of metals from metal compounds
US2677071A (en) * 1948-06-30 1954-04-27 Rca Corp Voltage reference tube
US2755159A (en) * 1953-05-19 1956-07-17 Sylvania Electric Prod Vapor filling process for discharge lamps

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3389070A (en) * 1962-11-06 1968-06-18 Berghaus Bernhard Method and means for treating articles on all sides

Also Published As

Publication number Publication date
DE1060217B (en) 1959-06-25
US2927231A (en) 1960-03-01
CH349284A (en) 1960-10-15
FR1210232A (en) 1960-03-07

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