GB8332649D0 - Evaporation arc stabilization for non-permeable targets - Google Patents

Evaporation arc stabilization for non-permeable targets

Info

Publication number
GB8332649D0
GB8332649D0 GB838332649A GB8332649A GB8332649D0 GB 8332649 D0 GB8332649 D0 GB 8332649D0 GB 838332649 A GB838332649 A GB 838332649A GB 8332649 A GB8332649 A GB 8332649A GB 8332649 D0 GB8332649 D0 GB 8332649D0
Authority
GB
United Kingdom
Prior art keywords
arc stabilization
permeable targets
evaporation arc
evaporation
targets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB838332649A
Other versions
GB2150947A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vac Tec Systems Inc
Original Assignee
Vac Tec Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vac Tec Systems Inc filed Critical Vac Tec Systems Inc
Priority to FR838319586A priority Critical patent/FR2556373B1/en
Priority to GB08332649A priority patent/GB2150947A/en
Priority to DE3345442A priority patent/DE3345442C2/en
Publication of GB8332649D0 publication Critical patent/GB8332649D0/en
Publication of GB2150947A publication Critical patent/GB2150947A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/48—Generating plasma using an arc
    • H05H1/50—Generating plasma using an arc and using applied magnetic fields, e.g. for focusing or rotating the arc
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/48—Generating plasma using an arc
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
GB08332649A 1983-12-07 1983-12-07 Evaporation arc stabilization for non-permeable targets utilizing permeable stop ring Withdrawn GB2150947A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR838319586A FR2556373B1 (en) 1983-12-07 1983-12-07 IMPROVED PROCESS AND APPARATUS FOR STABILIZING A SPRAY ARC OF NON-PERMEABLE TARGETS USING A PERMEABLE STOP RING
GB08332649A GB2150947A (en) 1983-12-07 1983-12-07 Evaporation arc stabilization for non-permeable targets utilizing permeable stop ring
DE3345442A DE3345442C2 (en) 1983-12-07 1983-12-15 Device for stabilizing an evaporative arc

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB08332649A GB2150947A (en) 1983-12-07 1983-12-07 Evaporation arc stabilization for non-permeable targets utilizing permeable stop ring

Publications (2)

Publication Number Publication Date
GB8332649D0 true GB8332649D0 (en) 1984-01-11
GB2150947A GB2150947A (en) 1985-07-10

Family

ID=10552945

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08332649A Withdrawn GB2150947A (en) 1983-12-07 1983-12-07 Evaporation arc stabilization for non-permeable targets utilizing permeable stop ring

Country Status (3)

Country Link
DE (1) DE3345442C2 (en)
FR (1) FR2556373B1 (en)
GB (1) GB2150947A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4620913A (en) * 1985-11-15 1986-11-04 Multi-Arc Vacuum Systems, Inc. Electric arc vapor deposition method and apparatus
US5215640A (en) * 1987-02-03 1993-06-01 Balzers Ag Method and arrangement for stabilizing an arc between an anode and a cathode particularly for vacuum coating devices
DE8703520U1 (en) * 1987-02-03 1987-10-01 Balzers Hochvakuum Gmbh, 6200 Wiesbaden, De
CS275226B2 (en) * 1989-09-13 1992-02-19 Fyzikalni Ustav Csav Method of arc discharge's cathode vaporization with cathode spots and macroparticles' reduced emission and device for realization of this method
DE4006456C1 (en) * 1990-03-01 1991-05-29 Balzers Ag, Balzers, Li Appts. for vaporising material in vacuum - has electron beam gun or laser guided by electromagnet to form cloud or pre-melted spot on the target surface

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2972695A (en) * 1957-05-24 1961-02-21 Vickers Electrical Co Ltd Stabilisation of low pressure d.c. arc discharges
US3836451A (en) * 1968-12-26 1974-09-17 A Snaper Arc deposition apparatus
US3793179A (en) * 1971-07-19 1974-02-19 L Sablev Apparatus for metal evaporation coating
US3783231A (en) * 1972-03-22 1974-01-01 V Gorbunov Apparatus for vacuum-evaporation of metals under the action of an electric arc
SU636266A1 (en) * 1976-04-05 1978-02-10 Предприятие П/Я В-8851 Electric arc metal evaporator
SU745189A2 (en) * 1978-06-01 1981-10-15 Предприятие П/Я В-8851 Electric arc metal evaporator
DE3152736C2 (en) * 1981-02-23 1984-04-05 Leonid Pavlovič Sablev Self-consuming cathode for an arc metal evaporator

Also Published As

Publication number Publication date
GB2150947A (en) 1985-07-10
FR2556373A1 (en) 1985-06-14
DE3345442A1 (en) 1985-07-04
FR2556373B1 (en) 1989-09-08
DE3345442C2 (en) 1986-01-02

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)