SU636266A1 - Electric arc metal evaporator - Google Patents
Electric arc metal evaporatorInfo
- Publication number
- SU636266A1 SU636266A1 SU762344232A SU2344232A SU636266A1 SU 636266 A1 SU636266 A1 SU 636266A1 SU 762344232 A SU762344232 A SU 762344232A SU 2344232 A SU2344232 A SU 2344232A SU 636266 A1 SU636266 A1 SU 636266A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- cathode
- working surface
- electric arc
- current
- magnetic field
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
Description
(54) ЭЛЕКТРОДУГОВОЙ ИСПАРИТЕЛЬ МЕТАЛЛОВ(54) ELECTRIC ARC METAL EVAPORATOR
чески ссгедннен с отрицательным полюсом источника питани 5. Положительный полюс источника электрически соединен с камеройанодом . Экран 6, изготовленный из магнитного материала, охватывает нерабочую поверхность катода. На поверхности экрана, обращенной к катоду и противолежащей рабочей поверхности катода, в местах удаленных от токоподвода. выполнены радиальные относительно точки закреплени токопровода к катоду канавки 7. Поджигающее устройство 8 электрически соединено с камеройанодом .It is connected to the negative pole of the power source 5. The positive pole of the source is electrically connected to the camera channel. The screen 6, made of magnetic material, covers the non-working surface of the cathode. On the screen surface facing the cathode and opposite the working surface of the cathode, in places remote from the current lead. the grooves 7 are radial with respect to the conductor fixing point to the cathode. The ignition device 8 is electrically connected to the camera channel.
Предлагаемый испаритель работает следующим образом. Зажигание дуги производитс (после достижени в камере I необходимого предварительного разр жени ) кратковременным закорачиванием промежутка анод-катод при помощи поджигающего устройства 8. Катодное п тно электрической дуги хаотически перемещаетс по рабочей поверхности катода 2. Электрический ток, проход по токоподводу 3 к катоду, создает вокруг токоподводов магнитное поле. При этом магнитное поле, создаваемое вокруг участка токоподвода симметричного отночительно оси катода, замыкаетс по экрану.The proposed evaporator works as follows. The arc is ignited (after reaching the required pre-discharge in the chamber I) by briefly shortening the anode-cathode gap using the ignition device 8. The cathode arc arc randomly moves across the working surface of the cathode 2. The electrical current passing through the electrical lead 3 to the cathode creates around the current leads magnetic field. In this case, the magnetic field created around the current supply section symmetrical with respect to the cathode axis closes the screen.
Магнитное поле вокруг участка токоподвода , расположенного под углом к оси катода , создает на рабочей поверхности катода вблизи токоподвода локальный участок с большей по сравнению с остальной рабочей поверхностью катода напр женностью магнитно1-о пол . В то же врем часть магнитного потока, замыкающегос по экрану б, в сечении канавок 7 вытесн етс за пределы тела экрана в сторону рабочей поверхности катода, повыща напр женность магнитного пол на той части рабочей поверхности катода , котора расположена вдали от токоподвода . Таким образом увеличиваетс равномерность магнитного пол на всей рабочей поверхности катода, что обеспечивает равномерное испарение катода и увеличение его срока службы.The magnetic field around the current lead section, which is located at an angle to the cathode axis, creates on the working surface of the cathode near the current lead a local part with a magnetic field of greater magnitude than the rest of the working surface of the cathode. At the same time, the part of the magnetic flux closing on the screen b, in the section of the grooves 7, is displaced beyond the screen body towards the working surface of the cathode, increasing the magnetic field on that part of the working surface of the cathode that is located far from the electrical power supply. This increases the uniformity of the magnetic field over the entire working surface of the cathode, which ensures uniform evaporation of the cathode and an increase in its service life.
При испытании преллагаемогт) электродугового испарител ток лу: и равен 150 а, рассто ние между рабочей поверхностью катода и осью части токо1:од:юла. расиоложенного под углом к оси катода, равно 5см. Глубина канавок на экране 6мм, ширина 3мм, толщина экрана 10мм. Число канавок 3, они были расположены между собой под углом 60° (см. фиг. 2). На рабочей поверхности катода было получено практически равномерное магнитное поле. Разница в напр женности магнитного пол на отдельных участках не превысила 3 эрстед, в то врем , как в аналогичном испарителе без канавок при прочих равных услови х, разница в на5 пр женности магнитного пол на отдельных участках достигала 15-20 эрстед.During the test of the current arc evaporator, the current lu: u is equal to 150 a, the distance between the working surface of the cathode and the axis of the current: 1: od: ju. located at an angle to the cathode axis, is 5 cm. The depth of the grooves on the screen is 6mm, width 3mm, screen thickness 10mm. The number of grooves 3, they were located at an angle of 60 ° between them (see Fig. 2). An almost uniform magnetic field was obtained on the working surface of the cathode. The difference in the intensity of the magnetic field in some areas did not exceed 3 Oersted, while in a similar evaporator without grooves, ceteris paribus, the difference in the strength of the magnetic field in some areas reached 15–20 Oersted.
На фиг. 3 приведен эскиз рабочей поверхности катода, который использован в испарителе без канавок на экране. Коэффициент использовани материала катодаFIG. 3 is a sketch of the cathode working surface, which is used in the evaporator without grooves on the screen. Cathode material utilization factor
составл ет около 20%, дальнейшее использование катода стало невозможным из-за нестабильности горени дуги. Срок службы такого катода при токе 150 а составл ет 50 часов.is about 20%, the further use of the cathode has become impossible because of the instability of the arc. The service life of such a cathode at a current of 150 a is 50 hours.
5 На фиг. 5 приведен эскиз катода, использованного в испарителе с канавками на экране . Коэффициент использовани материала катода составил около 90%. Срок службы при токе 150 а - 250 час.5 In FIG. 5 is a sketch of the cathode used in the evaporator with grooves on the screen. The utilization rate of the cathode material was about 90%. The service life at a current of 150 a - 250 hours.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU762344232A SU636266A1 (en) | 1976-04-05 | 1976-04-05 | Electric arc metal evaporator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU762344232A SU636266A1 (en) | 1976-04-05 | 1976-04-05 | Electric arc metal evaporator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SU636266A1 true SU636266A1 (en) | 1978-02-10 |
Family
ID=20655716
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SU762344232A SU636266A1 (en) | 1976-04-05 | 1976-04-05 | Electric arc metal evaporator |
Country Status (1)
| Country | Link |
|---|---|
| SU (1) | SU636266A1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2545840A1 (en) * | 1983-05-09 | 1984-11-16 | Vac Tec Syst | IMPROVED APPARATUS FOR THE STABILIZATION OF AN ARC USED TO VAPORIZE A SOLID MATERIAL |
| FR2556373A1 (en) * | 1983-12-07 | 1985-06-14 | Vac Tec Syst | IMPROVED METHOD AND APPARATUS FOR STABILIZING A SPRAYING ARC OF NON-PERMEABLE TARGETS USING A PERMEABLE STOP RING |
| FR2557151A1 (en) * | 1983-09-12 | 1985-06-28 | Vac Tec Syst | IMPROVED METHOD AND APPARATUS FOR STABILIZING AN EVAPORATIVE ARC INCLUDING INITIAL TARGET CLEANING |
| RU2556161C1 (en) * | 2014-01-30 | 2015-07-10 | Валерий Никитич Гринавцев | Unit for metal coating application on glass or ceramic microspheres |
-
1976
- 1976-04-05 SU SU762344232A patent/SU636266A1/en active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2545840A1 (en) * | 1983-05-09 | 1984-11-16 | Vac Tec Syst | IMPROVED APPARATUS FOR THE STABILIZATION OF AN ARC USED TO VAPORIZE A SOLID MATERIAL |
| NL8400053A (en) * | 1983-05-09 | 1984-12-03 | Vac Tec Syst | METHOD FOR EVAPORATING ARC STABILIZATION AND APPARATUS FOR APPLYING THIS METHOD |
| FR2557151A1 (en) * | 1983-09-12 | 1985-06-28 | Vac Tec Syst | IMPROVED METHOD AND APPARATUS FOR STABILIZING AN EVAPORATIVE ARC INCLUDING INITIAL TARGET CLEANING |
| FR2556373A1 (en) * | 1983-12-07 | 1985-06-14 | Vac Tec Syst | IMPROVED METHOD AND APPARATUS FOR STABILIZING A SPRAYING ARC OF NON-PERMEABLE TARGETS USING A PERMEABLE STOP RING |
| RU2556161C1 (en) * | 2014-01-30 | 2015-07-10 | Валерий Никитич Гринавцев | Unit for metal coating application on glass or ceramic microspheres |
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