GB8307619D0 - Scanning electron beam apparatus - Google Patents

Scanning electron beam apparatus

Info

Publication number
GB8307619D0
GB8307619D0 GB838307619A GB8307619A GB8307619D0 GB 8307619 D0 GB8307619 D0 GB 8307619D0 GB 838307619 A GB838307619 A GB 838307619A GB 8307619 A GB8307619 A GB 8307619A GB 8307619 D0 GB8307619 D0 GB 8307619D0
Authority
GB
United Kingdom
Prior art keywords
electron beam
scanning electron
beam apparatus
scanning
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB838307619A
Other versions
GB2118361A (en
GB2118361B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INTERNATIONAL PRECISION Inc
Original Assignee
INTERNATIONAL PRECISION Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INTERNATIONAL PRECISION Inc filed Critical INTERNATIONAL PRECISION Inc
Publication of GB8307619D0 publication Critical patent/GB8307619D0/en
Publication of GB2118361A publication Critical patent/GB2118361A/en
Application granted granted Critical
Publication of GB2118361B publication Critical patent/GB2118361B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB08307619A 1982-03-19 1983-03-18 Scanning electron beam apparatus Expired GB2118361B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57042935A JPS58161235A (en) 1982-03-19 1982-03-19 Scanning type electron beam device

Publications (3)

Publication Number Publication Date
GB8307619D0 true GB8307619D0 (en) 1983-04-27
GB2118361A GB2118361A (en) 1983-10-26
GB2118361B GB2118361B (en) 1987-02-11

Family

ID=12649865

Family Applications (2)

Application Number Title Priority Date Filing Date
GB08307619A Expired GB2118361B (en) 1982-03-19 1983-03-18 Scanning electron beam apparatus
GB08530697A Expired GB2173945B (en) 1982-03-19 1985-12-13 Scanning electron beam apparatus

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB08530697A Expired GB2173945B (en) 1982-03-19 1985-12-13 Scanning electron beam apparatus

Country Status (2)

Country Link
JP (1) JPS58161235A (en)
GB (2) GB2118361B (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2569011B2 (en) * 1986-06-11 1997-01-08 株式会社日立製作所 Scanning electron microscope
JPH077654B2 (en) * 1988-04-01 1995-01-30 株式会社日立製作所 Scanning electron microscope
JP2772821B2 (en) * 1989-05-30 1998-07-09 セイコーインスツルメンツ株式会社 Electron beam equipment
US5079428A (en) * 1989-08-31 1992-01-07 Bell Communications Research, Inc. Electron microscope with an asymmetrical immersion lens
JP3133307B2 (en) * 1989-10-13 2001-02-05 株式会社日立製作所 electronic microscope
JP2777840B2 (en) * 1990-11-30 1998-07-23 セイコーインスツルメンツ株式会社 Electron beam equipment
JP3715992B2 (en) * 1996-09-24 2005-11-16 株式会社日立製作所 Charged particle beam irradiation equipment
JPH1154076A (en) 1997-07-31 1999-02-26 Seiko Instr Inc Objective lens for scanning type electron microscope

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL282644A (en) * 1962-08-29 1964-12-28
DE1614126B1 (en) * 1967-02-27 1970-11-19 Max Planck Gesellschaft Corpuscular beam microscope, in particular electron microscope, with a condenser lens formed by the front of an objective lens and a range diaphragm
GB1238889A (en) * 1968-11-26 1971-07-14
GB1420803A (en) * 1973-06-28 1976-01-14 Ass Elect Ind Electron microscopes
AU521225B2 (en) * 1977-04-19 1982-03-25 Delalande S.A. Alkylenedioxy phenyl derivatives
JPS5748274Y2 (en) * 1977-07-11 1982-10-22
JPS5548426A (en) * 1978-09-30 1980-04-07 Kubota Ltd Preparation of bent pipe of equal thickness
JPS5938701B2 (en) * 1979-04-10 1984-09-18 株式会社国際精工 Scanning electron microscope with two-stage sample stage
JPS5913140B2 (en) * 1979-04-28 1984-03-28 日本電子株式会社 Objective lenses for scanning electron microscopes, etc.
JPS6012739B2 (en) * 1980-06-06 1985-04-03 日本電子株式会社 Objective lenses for scanning electron microscopes, etc.

Also Published As

Publication number Publication date
JPS58161235A (en) 1983-09-24
GB2173945A (en) 1986-10-22
GB2118361A (en) 1983-10-26
GB2118361B (en) 1987-02-11
GB8530697D0 (en) 1986-01-22
GB2173945B (en) 1987-04-15

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Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19960318