GB2592906B - Structure for a photonic integrated circuit - Google Patents

Structure for a photonic integrated circuit Download PDF

Info

Publication number
GB2592906B
GB2592906B GB2001404.9A GB202001404A GB2592906B GB 2592906 B GB2592906 B GB 2592906B GB 202001404 A GB202001404 A GB 202001404A GB 2592906 B GB2592906 B GB 2592906B
Authority
GB
United Kingdom
Prior art keywords
integrated circuit
photonic integrated
photonic
circuit
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB2001404.9A
Other languages
English (en)
Other versions
GB202001404D0 (en
GB2592906A (en
Inventor
Santos Lemos Alvares Dos Santos Rui
Everard Filippus Kleijn Steven
Johannes Adrianus Thijs Petrus
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Smart Photonics Holding BV
Original Assignee
Smart Photonics Holding BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Smart Photonics Holding BV filed Critical Smart Photonics Holding BV
Priority to GB2001404.9A priority Critical patent/GB2592906B/en
Publication of GB202001404D0 publication Critical patent/GB202001404D0/en
Priority to CN202180011378.XA priority patent/CN115053159A/zh
Priority to PCT/EP2021/052198 priority patent/WO2021152143A1/en
Priority to JP2022543627A priority patent/JP2023512931A/ja
Priority to EP21706845.1A priority patent/EP4097517B1/en
Publication of GB2592906A publication Critical patent/GB2592906A/en
Priority to US17/876,609 priority patent/US12546936B2/en
Application granted granted Critical
Publication of GB2592906B publication Critical patent/GB2592906B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1225—Basic optical elements, e.g. light-guiding paths comprising photonic band-gap structures or photonic lattices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/85—Packages
    • H10H20/855—Optical field-shaping means, e.g. lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12078—Gallium arsenide or alloys (GaAs, GaAlAs, GaAsP, GaInAs)
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12123—Diode
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/1213—Constructional arrangements comprising photonic band-gap structures or photonic lattices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12159—Interferometer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4274—Electrical aspects
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
    • H10F30/22—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
    • H10F30/223—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a PIN barrier
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01—Manufacture or treatment
    • H10H20/036—Manufacture or treatment of packages
    • H10H20/0363—Manufacture or treatment of packages of optical field-shaping means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/819—Bodies characterised by their shape, e.g. curved or truncated substrates
    • H10H20/821—Bodies characterised by their shape, e.g. curved or truncated substrates of the light-emitting regions, e.g. non-planar junctions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
    • H10H29/10—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Light Receiving Elements (AREA)
GB2001404.9A 2020-01-31 2020-01-31 Structure for a photonic integrated circuit Active GB2592906B (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GB2001404.9A GB2592906B (en) 2020-01-31 2020-01-31 Structure for a photonic integrated circuit
EP21706845.1A EP4097517B1 (en) 2020-01-31 2021-01-29 Structure for a photonic integrated circuit
PCT/EP2021/052198 WO2021152143A1 (en) 2020-01-31 2021-01-29 Structure for a photonic integrated circuit
JP2022543627A JP2023512931A (ja) 2020-01-31 2021-01-29 フォトニック集積回路のための構造
CN202180011378.XA CN115053159A (zh) 2020-01-31 2021-01-29 用于光子集成电路的结构
US17/876,609 US12546936B2 (en) 2020-01-31 2022-07-29 Structure for a photonic integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2001404.9A GB2592906B (en) 2020-01-31 2020-01-31 Structure for a photonic integrated circuit

Publications (3)

Publication Number Publication Date
GB202001404D0 GB202001404D0 (en) 2020-03-18
GB2592906A GB2592906A (en) 2021-09-15
GB2592906B true GB2592906B (en) 2024-01-10

Family

ID=69800066

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2001404.9A Active GB2592906B (en) 2020-01-31 2020-01-31 Structure for a photonic integrated circuit

Country Status (6)

Country Link
US (1) US12546936B2 (cg-RX-API-DMAC10.html)
EP (1) EP4097517B1 (cg-RX-API-DMAC10.html)
JP (1) JP2023512931A (cg-RX-API-DMAC10.html)
CN (1) CN115053159A (cg-RX-API-DMAC10.html)
GB (1) GB2592906B (cg-RX-API-DMAC10.html)
WO (1) WO2021152143A1 (cg-RX-API-DMAC10.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB202212686D0 (en) * 2022-08-31 2022-10-12 Smart Photonics Holding B V Method of providing a wafer
GB2638384A (en) * 2024-01-12 2025-08-27 Smart Photonics Holding B V Part of photonic integrated circuit and method of manufacturing same

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003264334A (ja) * 2002-03-08 2003-09-19 Hitachi Ltd 半導体レーザ素子及び半導体レーザモジュール
US6771682B2 (en) * 2002-08-12 2004-08-03 Infinera Corporation Electrical isolation of optical components in photonic integrated circuits (PICs)
US20100310256A1 (en) * 2007-02-27 2010-12-09 Celight, Inc. Parallel optical receiver for optical systems
JP5260909B2 (ja) * 2007-07-23 2013-08-14 住友電気工業株式会社 受光デバイス
US8269297B2 (en) * 2009-12-23 2012-09-18 Infinera Corporation Photodiode isolation in a photonic integrated circuit
US8948227B2 (en) * 2013-01-11 2015-02-03 Source Photonics, Inc. Isolated modulator electrodes for low power consumption
JP6213222B2 (ja) * 2013-12-24 2017-10-18 富士通株式会社 光半導体装置及びその製造方法
WO2017015578A1 (en) * 2015-07-22 2017-01-26 Miroslaw Florjanczyk Compound semiconductor photonic integrated circuit with dielectric waveguide
KR20180085221A (ko) * 2017-01-18 2018-07-26 엘지이노텍 주식회사 반도체 소자 및 이를 포함하는 광 모듈
CN113176676B (zh) * 2021-04-16 2022-11-15 上海曦智科技有限公司 光学调制器和光学集成系统

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Chin. Phys. B, vol. 25, no, 12, 2016, C. He et al., "Room temperature direct-bandgap electroluminescence from a horizontal Ge ridge waveguide on Si", pages 126104-1 to 126104-14. *
J Bowers, 2013, "Trends, Possibilities and Limitations of Silicon Photonic Integrated Circuits and Devices", A Tutorial at the IEEE Custom Integrated Circuits Conference 2013, IEEE, [online], Available from https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6658508 [Accessed 18/06/2021]. *

Also Published As

Publication number Publication date
GB202001404D0 (en) 2020-03-18
EP4097517B1 (en) 2024-03-06
EP4097517A1 (en) 2022-12-07
WO2021152143A1 (en) 2021-08-05
GB2592906A (en) 2021-09-15
CN115053159A (zh) 2022-09-13
US20220365276A1 (en) 2022-11-17
US12546936B2 (en) 2026-02-10
JP2023512931A (ja) 2023-03-30

Similar Documents

Publication Publication Date Title
EP4327147A4 (en) PHOTONIC INTEGRATED CIRCUIT PACKAGE ARCHITECTURE
EP4165451A4 (en) PHOTONIC INTEGRATED CIRCUIT
SG10202007807WA (en) Organic interposers for integrated circuit packages
GB202009984D0 (en) Manipulation module
IL281711B (en) Optical beamforming photonic integrated circuit (pic)
GB201212625D0 (en) The layout for designing the layout of a plurality of optical waveguides
EP3955035C0 (en) PHOTONIC INTEGRATED CIRCUIT
GB202215454D0 (en) A photonic integrated circuit
GB202107055D0 (en) A mechanism
GB202001404D0 (en) Structure for a photonic integrated circuit
GB202117494D0 (en) Dense photonic integrated circuit optical coupling
GB202019693D0 (en) Photonic integrated circuit
EP4022371A4 (en) PHOTONIC IC PACKAGE (PIC)
GB202306210D0 (en) A semiconductor structure
GB202202826D0 (en) A heatsink
GB201917186D0 (en) Waveguide structure for a photonic integrated circuit
IL283827A (en) A hollow fiber module
GB2593157B (en) A circuit for an inverter
GB2631916B (en) A semiconductor structure
GB2636078B (en) Photonic Integrated Circuit
GB202318730D0 (en) Structure for a photonic ubtegrated circuit
GB202201755D0 (en) Interferometer for a photonic integrated circuit
GB202503937D0 (en) Structure for a photonic integrated circuit
GB2609636B (en) Stress-relief structure for photonic integrated circuits
GB2600139B (en) A line-cutter