GB2589415B - An in-plane displacement sensing unit based on a simplified optical nanometer scale resonant cavity - Google Patents

An in-plane displacement sensing unit based on a simplified optical nanometer scale resonant cavity Download PDF

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Publication number
GB2589415B
GB2589415B GB2011991.3A GB202011991A GB2589415B GB 2589415 B GB2589415 B GB 2589415B GB 202011991 A GB202011991 A GB 202011991A GB 2589415 B GB2589415 B GB 2589415B
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GB
United Kingdom
Prior art keywords
sensing unit
unit based
resonant cavity
nanometer scale
displacement sensing
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Application number
GB2011991.3A
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English (en)
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GB2589415A (en
GB202011991D0 (en
Inventor
Lu Qianbo
Wang Xiaoke
Wang Yinan
Wang Xuewen
Huang Wei
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Northwestern Polytechnical University
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Northwestern Polytechnical University
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Publication of GB2589415A publication Critical patent/GB2589415A/en
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0083—Optical properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4233—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1809—Diffraction gratings with pitch less than or comparable to the wavelength
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
    • H04R23/008—Transducers other than those covered by groups H04R9/00 - H04R21/00 using optical signals for detecting or generating sound
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/093—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by photoelectric pick-up

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Computer Hardware Design (AREA)
  • Length Measuring Devices By Optical Means (AREA)
GB2011991.3A 2019-07-31 2020-07-31 An in-plane displacement sensing unit based on a simplified optical nanometer scale resonant cavity Active GB2589415B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910702334.6A CN110360935B (zh) 2019-07-31 2019-07-31 一种基于简化光学纳米谐振腔的面内位移传感单元及方法

Publications (3)

Publication Number Publication Date
GB202011991D0 GB202011991D0 (en) 2020-09-16
GB2589415A GB2589415A (en) 2021-06-02
GB2589415B true GB2589415B (en) 2022-05-04

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GB2011991.3A Active GB2589415B (en) 2019-07-31 2020-07-31 An in-plane displacement sensing unit based on a simplified optical nanometer scale resonant cavity

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CN (1) CN110360935B (zh)
GB (1) GB2589415B (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110836640B (zh) * 2019-11-19 2021-05-07 西北工业大学 一种基于近场光学谐振腔的面外位移传感单元及方法
CN110865204B (zh) * 2019-11-19 2020-09-25 西北工业大学 一种基于表面等离激元的开环式面外加速度传感器及方法
CN112240748A (zh) * 2020-11-17 2021-01-19 中国科学院上海微系统与信息技术研究所 一种带有非厄米耦合角度检测纠正装置的微位移机构
CN113295112B (zh) * 2021-04-26 2022-11-18 杭州电子科技大学 一种实现高动态范围的微波位移传感器
CN113433094B (zh) * 2021-05-11 2023-01-17 中山大学 实现fp-wa耦合模式的生物传感器及其制备方法和应用
CN115128800B (zh) * 2022-06-27 2024-02-02 西北工业大学 基于f-p腔的光学位移敏感单元及逆设计方法
CN115574722B (zh) * 2022-11-04 2024-03-29 中国计量科学研究院 一种自溯源干涉式位移传感器

Citations (6)

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CN101359715A (zh) * 2008-09-26 2009-02-04 清华大学 一种自旋转移器件及其制备方法
CN101521177A (zh) * 2009-01-23 2009-09-02 中国科学院上海微系统与信息技术研究所 以单壁碳纳米管为电极的横向相变存储器的制备方法
CN101587936A (zh) * 2009-06-10 2009-11-25 中国科学院宁波材料技术与工程研究所 基于铁酸铋薄膜体系的电阻式随机存储器及其制备方法
CN103293660A (zh) * 2013-05-31 2013-09-11 华中科技大学 一种微型f-p腔可调谐滤波器及其制备方法
US20160018436A1 (en) * 2014-07-16 2016-01-21 Chinese Academy of Sciences Institute of Geology and Geophysics Symmetrical mems accelerometer and its fabrication process
CN109698241A (zh) * 2018-12-28 2019-04-30 天津大学 高介电常数栅介质层的柔性薄膜晶体管及其制造方法

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CN100402975C (zh) * 2004-12-07 2008-07-16 中山大学 一种用于应变测量的干涉型光纤传感器
JP2008114198A (ja) * 2006-11-08 2008-05-22 Yoshinobu Hayashi 廃石膏の処理方法
CN100575998C (zh) * 2008-04-09 2009-12-30 厦门大学 一种阵列式微谐振腔可调集成光学滤波器
CN104064607A (zh) * 2014-07-08 2014-09-24 天津工业大学 一种带有aao纳米光栅的新型太阳能电池双重陷光结构
CN105182000B (zh) * 2015-05-30 2018-05-22 浙江大学 光学mems加速度计中三光路信号补偿系统及其方法
CN107219378B (zh) * 2017-05-26 2019-08-30 浙江大学 基于双波长干涉的大量程高精度加速度测量系统与测量方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101359715A (zh) * 2008-09-26 2009-02-04 清华大学 一种自旋转移器件及其制备方法
CN101521177A (zh) * 2009-01-23 2009-09-02 中国科学院上海微系统与信息技术研究所 以单壁碳纳米管为电极的横向相变存储器的制备方法
CN101587936A (zh) * 2009-06-10 2009-11-25 中国科学院宁波材料技术与工程研究所 基于铁酸铋薄膜体系的电阻式随机存储器及其制备方法
CN103293660A (zh) * 2013-05-31 2013-09-11 华中科技大学 一种微型f-p腔可调谐滤波器及其制备方法
US20160018436A1 (en) * 2014-07-16 2016-01-21 Chinese Academy of Sciences Institute of Geology and Geophysics Symmetrical mems accelerometer and its fabrication process
CN109698241A (zh) * 2018-12-28 2019-04-30 天津大学 高介电常数栅介质层的柔性薄膜晶体管及其制造方法

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Publication number Publication date
CN110360935B (zh) 2020-05-12
CN110360935A (zh) 2019-10-22
GB2589415A (en) 2021-06-02
GB202011991D0 (en) 2020-09-16

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