GB202011991D0 - An in-plane displacement sensing unit based on a simplified optical nanometer scale resonant cavity - Google Patents
An in-plane displacement sensing unit based on a simplified optical nanometer scale resonant cavityInfo
- Publication number
- GB202011991D0 GB202011991D0 GBGB2011991.3A GB202011991A GB202011991D0 GB 202011991 D0 GB202011991 D0 GB 202011991D0 GB 202011991 A GB202011991 A GB 202011991A GB 202011991 D0 GB202011991 D0 GB 202011991D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- sensing unit
- unit based
- resonant cavity
- nanometer scale
- displacement sensing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910702334.6A CN110360935B (en) | 2019-07-31 | 2019-07-31 | In-plane displacement sensing unit and method based on simplified optical nano resonant cavity |
Publications (3)
Publication Number | Publication Date |
---|---|
GB202011991D0 true GB202011991D0 (en) | 2020-09-16 |
GB2589415A GB2589415A (en) | 2021-06-02 |
GB2589415B GB2589415B (en) | 2022-05-04 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB2011991.3A Active GB2589415B (en) | 2019-07-31 | 2020-07-31 | An in-plane displacement sensing unit based on a simplified optical nanometer scale resonant cavity |
Country Status (2)
Country | Link |
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CN (1) | CN110360935B (en) |
GB (1) | GB2589415B (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110836640B (en) * | 2019-11-19 | 2021-05-07 | 西北工业大学 | Out-of-plane displacement sensing unit and method based on near-field optical resonant cavity |
CN110865204B (en) * | 2019-11-19 | 2020-09-25 | 西北工业大学 | Open-loop type out-of-plane acceleration sensor and method based on surface plasmons |
CN112240748A (en) * | 2020-11-17 | 2021-01-19 | 中国科学院上海微系统与信息技术研究所 | Micro-displacement mechanism with non-hermite coupling angle detection and correction device |
CN113295112B (en) * | 2021-04-26 | 2022-11-18 | 杭州电子科技大学 | Microwave displacement sensor for realizing high dynamic range |
CN113433094B (en) * | 2021-05-11 | 2023-01-17 | 中山大学 | Biosensor for realizing FP-WA coupling mode and preparation method and application thereof |
CN115128800B (en) * | 2022-06-27 | 2024-02-02 | 西北工业大学 | Optical displacement sensitive unit based on F-P cavity and reverse design method |
CN115574722B (en) * | 2022-11-04 | 2024-03-29 | 中国计量科学研究院 | Self-tracing interference type displacement sensor |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100402975C (en) * | 2004-12-07 | 2008-07-16 | 中山大学 | White light interference optical fibre sensor for straining measure |
JP2008114198A (en) * | 2006-11-08 | 2008-05-22 | Yoshinobu Hayashi | Treatment method of waste gypsum |
CN100575998C (en) * | 2008-04-09 | 2009-12-30 | 厦门大学 | A kind of array type microresonant cavity tunable integrated optical filter |
CN101359715B (en) * | 2008-09-26 | 2012-05-16 | 清华大学 | Self-rotary transferring device and preparation thereof |
CN101521177B (en) * | 2009-01-23 | 2010-09-08 | 中国科学院上海微系统与信息技术研究所 | Method for preparing transverse phase transition memory by using single-walled carbon nanotube as electrode |
CN101587936B (en) * | 2009-06-10 | 2012-06-13 | 中国科学院宁波材料技术与工程研究所 | Resistive random access memory based on bismuth iron thin film system and manufacturing method thereof |
CN103293660B (en) * | 2013-05-31 | 2015-06-10 | 华中科技大学 | Miniature F-P (Fabry-Perot) cavity tunable filter and method for manufacturing same |
CN104064607A (en) * | 2014-07-08 | 2014-09-24 | 天津工业大学 | Novel solar cell double-trapping-light structure with AAO nanometer gratings |
CN105445495B (en) * | 2014-07-16 | 2018-11-02 | 中国科学院地质与地球物理研究所 | A kind of symmetrical MEMS acceleration sensitives chip and its manufacturing process |
CN105182000B (en) * | 2015-05-30 | 2018-05-22 | 浙江大学 | Three optical path signal compensation systems and its method in optical MEMS accelerometer |
CN107219378B (en) * | 2017-05-26 | 2019-08-30 | 浙江大学 | Large range high precision acceleration measurement system and measurement method based on dual wavelength interference |
CN109698241A (en) * | 2018-12-28 | 2019-04-30 | 天津大学 | The flexible thin-film transistor and its manufacturing method of high-dielectric-coefficient grid medium layer |
-
2019
- 2019-07-31 CN CN201910702334.6A patent/CN110360935B/en active Active
-
2020
- 2020-07-31 GB GB2011991.3A patent/GB2589415B/en active Active
Also Published As
Publication number | Publication date |
---|---|
GB2589415A (en) | 2021-06-02 |
CN110360935B (en) | 2020-05-12 |
CN110360935A (en) | 2019-10-22 |
GB2589415B (en) | 2022-05-04 |
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