GB202011991D0 - An in-plane displacement sensing unit based on a simplified optical nanometer scale resonant cavity - Google Patents

An in-plane displacement sensing unit based on a simplified optical nanometer scale resonant cavity

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Publication number
GB202011991D0
GB202011991D0 GBGB2011991.3A GB202011991A GB202011991D0 GB 202011991 D0 GB202011991 D0 GB 202011991D0 GB 202011991 A GB202011991 A GB 202011991A GB 202011991 D0 GB202011991 D0 GB 202011991D0
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Prior art keywords
sensing unit
unit based
resonant cavity
nanometer scale
displacement sensing
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GBGB2011991.3A
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GB2589415A (en
GB2589415B (en
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Northwestern Polytechnical University
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Northwestern Polytechnical University
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GB2011991.3A 2019-07-31 2020-07-31 An in-plane displacement sensing unit based on a simplified optical nanometer scale resonant cavity Active GB2589415B (en)

Applications Claiming Priority (1)

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CN201910702334.6A CN110360935B (en) 2019-07-31 2019-07-31 In-plane displacement sensing unit and method based on simplified optical nano resonant cavity

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GB202011991D0 true GB202011991D0 (en) 2020-09-16
GB2589415A GB2589415A (en) 2021-06-02
GB2589415B GB2589415B (en) 2022-05-04

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Publication number Priority date Publication date Assignee Title
CN110836640B (en) * 2019-11-19 2021-05-07 西北工业大学 Out-of-plane displacement sensing unit and method based on near-field optical resonant cavity
CN110865204B (en) * 2019-11-19 2020-09-25 西北工业大学 Open-loop type out-of-plane acceleration sensor and method based on surface plasmons
CN112240748A (en) * 2020-11-17 2021-01-19 中国科学院上海微系统与信息技术研究所 Micro-displacement mechanism with non-hermite coupling angle detection and correction device
CN113295112B (en) * 2021-04-26 2022-11-18 杭州电子科技大学 Microwave displacement sensor for realizing high dynamic range
CN113433094B (en) * 2021-05-11 2023-01-17 中山大学 Biosensor for realizing FP-WA coupling mode and preparation method and application thereof
CN115128800B (en) * 2022-06-27 2024-02-02 西北工业大学 Optical displacement sensitive unit based on F-P cavity and reverse design method
CN115574722B (en) * 2022-11-04 2024-03-29 中国计量科学研究院 Self-tracing interference type displacement sensor

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CN100402975C (en) * 2004-12-07 2008-07-16 中山大学 White light interference optical fibre sensor for straining measure
JP2008114198A (en) * 2006-11-08 2008-05-22 Yoshinobu Hayashi Treatment method of waste gypsum
CN100575998C (en) * 2008-04-09 2009-12-30 厦门大学 A kind of array type microresonant cavity tunable integrated optical filter
CN101359715B (en) * 2008-09-26 2012-05-16 清华大学 Self-rotary transferring device and preparation thereof
CN101521177B (en) * 2009-01-23 2010-09-08 中国科学院上海微系统与信息技术研究所 Method for preparing transverse phase transition memory by using single-walled carbon nanotube as electrode
CN101587936B (en) * 2009-06-10 2012-06-13 中国科学院宁波材料技术与工程研究所 Resistive random access memory based on bismuth iron thin film system and manufacturing method thereof
CN103293660B (en) * 2013-05-31 2015-06-10 华中科技大学 Miniature F-P (Fabry-Perot) cavity tunable filter and method for manufacturing same
CN104064607A (en) * 2014-07-08 2014-09-24 天津工业大学 Novel solar cell double-trapping-light structure with AAO nanometer gratings
CN105445495B (en) * 2014-07-16 2018-11-02 中国科学院地质与地球物理研究所 A kind of symmetrical MEMS acceleration sensitives chip and its manufacturing process
CN105182000B (en) * 2015-05-30 2018-05-22 浙江大学 Three optical path signal compensation systems and its method in optical MEMS accelerometer
CN107219378B (en) * 2017-05-26 2019-08-30 浙江大学 Large range high precision acceleration measurement system and measurement method based on dual wavelength interference
CN109698241A (en) * 2018-12-28 2019-04-30 天津大学 The flexible thin-film transistor and its manufacturing method of high-dielectric-coefficient grid medium layer

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GB2589415A (en) 2021-06-02
CN110360935B (en) 2020-05-12
CN110360935A (en) 2019-10-22
GB2589415B (en) 2022-05-04

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