GB2579028A - Molecular drag stage - Google Patents

Molecular drag stage Download PDF

Info

Publication number
GB2579028A
GB2579028A GB1818600.7A GB201818600A GB2579028A GB 2579028 A GB2579028 A GB 2579028A GB 201818600 A GB201818600 A GB 201818600A GB 2579028 A GB2579028 A GB 2579028A
Authority
GB
United Kingdom
Prior art keywords
stage
molecular drag
pump
gap
rotor shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB1818600.7A
Other languages
English (en)
Other versions
GB201818600D0 (en
Inventor
James Patey Alexander
Glyn Horler Richard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GB1818600.7A priority Critical patent/GB2579028A/en
Publication of GB201818600D0 publication Critical patent/GB201818600D0/en
Priority to PCT/GB2019/053149 priority patent/WO2020099834A1/fr
Priority to EP19804785.4A priority patent/EP3880969A1/fr
Priority to TW108141279A priority patent/TW202106979A/zh
Publication of GB2579028A publication Critical patent/GB2579028A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5806—Cooling the drive system

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
GB1818600.7A 2018-11-14 2018-11-14 Molecular drag stage Withdrawn GB2579028A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB1818600.7A GB2579028A (en) 2018-11-14 2018-11-14 Molecular drag stage
PCT/GB2019/053149 WO2020099834A1 (fr) 2018-11-14 2019-11-07 Moteur en tant qu'étage d'entraînement moléculaire
EP19804785.4A EP3880969A1 (fr) 2018-11-14 2019-11-07 Moteur en tant qu'étage d'entraînement moléculaire
TW108141279A TW202106979A (zh) 2018-11-14 2019-11-13 分子拖曳階段

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1818600.7A GB2579028A (en) 2018-11-14 2018-11-14 Molecular drag stage

Publications (2)

Publication Number Publication Date
GB201818600D0 GB201818600D0 (en) 2018-12-26
GB2579028A true GB2579028A (en) 2020-06-10

Family

ID=64739600

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1818600.7A Withdrawn GB2579028A (en) 2018-11-14 2018-11-14 Molecular drag stage

Country Status (4)

Country Link
EP (1) EP3880969A1 (fr)
GB (1) GB2579028A (fr)
TW (1) TW202106979A (fr)
WO (1) WO2020099834A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022254213A1 (fr) * 2021-06-04 2022-12-08 Edwards Limited Pompe à traînée holweck

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114076106B (zh) * 2020-08-18 2024-03-12 佛山市顺德区美的洗涤电器制造有限公司 电机组件、风机和吸油烟机

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1484508A2 (fr) * 2003-06-05 2004-12-08 VARIAN S.p.A. Pompe à vide compacte
JP2015025453A (ja) * 2013-07-26 2015-02-05 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ
EP3032107A2 (fr) * 2014-12-08 2016-06-15 Pfeiffer Vacuum Gmbh Pompe turbomoleculaire
JP2016114061A (ja) * 2014-12-17 2016-06-23 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL135263C (fr) * 1900-01-01
US6179573B1 (en) * 1999-03-24 2001-01-30 Varian, Inc. Vacuum pump with inverted motor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1484508A2 (fr) * 2003-06-05 2004-12-08 VARIAN S.p.A. Pompe à vide compacte
JP2015025453A (ja) * 2013-07-26 2015-02-05 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ
EP3032107A2 (fr) * 2014-12-08 2016-06-15 Pfeiffer Vacuum Gmbh Pompe turbomoleculaire
JP2016114061A (ja) * 2014-12-17 2016-06-23 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022254213A1 (fr) * 2021-06-04 2022-12-08 Edwards Limited Pompe à traînée holweck

Also Published As

Publication number Publication date
GB201818600D0 (en) 2018-12-26
WO2020099834A1 (fr) 2020-05-22
TW202106979A (zh) 2021-02-16
EP3880969A1 (fr) 2021-09-22

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)