GB2493751A - Apparatus for cleaning a gas stream - Google Patents

Apparatus for cleaning a gas stream Download PDF

Info

Publication number
GB2493751A
GB2493751A GB1114173.6A GB201114173A GB2493751A GB 2493751 A GB2493751 A GB 2493751A GB 201114173 A GB201114173 A GB 201114173A GB 2493751 A GB2493751 A GB 2493751A
Authority
GB
United Kingdom
Prior art keywords
power
text
torch
control
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB1114173.6A
Other versions
GB201114173D0 (en
Inventor
Sergey Alexandrovich Voronin
Mark James Attwood
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GB1114173.6A priority Critical patent/GB2493751A/en
Publication of GB201114173D0 publication Critical patent/GB201114173D0/en
Priority to EP12740640.3A priority patent/EP2744586B1/en
Priority to US14/238,840 priority patent/US10064262B2/en
Priority to JP2014525483A priority patent/JP6392119B2/en
Priority to CN201280040003.7A priority patent/CN103732307B/en
Priority to PCT/GB2012/051631 priority patent/WO2013024248A1/en
Priority to KR1020147006775A priority patent/KR101976226B1/en
Priority to TW101125896A priority patent/TWI548017B/en
Publication of GB2493751A publication Critical patent/GB2493751A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
    • B01D53/323—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00 by electrostatic effects or by high-voltage electric fields
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/40—Nitrogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
    • B01D2259/818—Employing electrical discharges or the generation of a plasma

Abstract

The operable range of a DC plasma torch 14 in an abatement apparatus 10 for treating waste gases 12 is made variable depending on the type of abatement required. The apparatus comprises a power control 26 configured for controlling the power of the plasma torch 14 by selective control of the plasma source gas flow regulator 24 rather than solely the current supplied to the torch 14.

Description

APPARATUS FOR TREATING A GAS STREAM
The present invention relates to an apparatus and method for treating a gas stream. The invention finds particular application in the treatment of a gas stream exhaust from a process chamber used in the semiconductor or flat panel display industry.
A primary step in the fabrication of semiconductor devices is the formation of a thin film on a semiconductor substrate by chemical reaction of vapour precursors. One known technique for depositing a thin film on a substrate is chemical vapour deposition (CVD), which is commonly plasma enhanced (PECVD). In this technique, process gases are supplied to a process chamber housing the substrate and react to form a thin film over the surface of the substrate. Examples of gases supplied to the process chamber to form a thin film include, but are not restricted to: Silane and ammonia for the formation of a silicon nitride film; Silane, ammonia and nitrous oxide for the formation of a SiON film; TEOS and one of oxygen and ozone for the formation of a silicon oxide film; and Al(CH3)3 and water vapour for the formation of an aluminium oxide film.
After processing, the gases exhausted from a processing chamber must be treated prior to release or storage. Gases exhausted from a process chamber can be treated with high efficiency and at a relatively low cost using a plasma abatement device. In the plasma abatement process, the exhaust gas stream is caused to flow into a thermal atmospheric pressure plasma discharge, which is primarily a source of heat. The plasma causes dissociation of the gas stream into reactive species which can combine with oxygen or hydrogen to produce relatively stable by-products.
zs The different gases used in the cycle of operation of a processing chamber require different amounts of electrical power to be supplied to the torch for effective treatment. Ordinarily, the voltage of the source of electrical energy remains generally constant and change in power is controlled by controlling the supplied current. A typical DC plasma torch has a restricted power range between a lower limit which is defined by the minimum current at which a discharge may be sustained by the torch without quenching and a higher limit which is defined by the maximum current rating of the power supply used or the maximum current which does not result in thermal damage to the torch electrodes.
However, the voltage-current characteristics of a DC plasma torch shows a decrease in voltage with a current increase and vice versa. Thus, even large changes in the torch current result in relatively smaller variations in the power.
For example, changing the operating current from 20 A to 40 A (i.e. a 100% increase) increases the torch power by as little as about 60%.
It is an object of the present invention to increase the operable power range of a DC plasma torch in a treatment apparatus.
The present invention provides apparatus for treating a gas stream, comprising a DC plasma torch for generating a plasma flare from a source gas when energised by a source of electrical energy, a flow regulator for regulating is the flow rate of the source gas supplied to the torch to be energised, and a DC plasma torch power control configured for controlling the power of the plasma torch by selective control of the flow regulator.
Other preferred and/or optional features of the invention are defined in the accompanying claims.
In order that the invention may be well understood, some embodiments and methods of operating thereof, which are given by way of example only, will now be described with reference to the accompanying drawings, in which: Figure 1 shows schematically apparatus for treating a gas stream; Figure 2 shows graphically a relationship between power, current and flow rate; Figure 3 shows a flow regulator for regulating the flow rate; and Figure 4 shows a more detailed view of a plasma generator.
Referring to Figure 1, apparatus 10 is shown for treating a gas stream 12.
The apparatus comprising a DC plasma torch 14 for generating a plasma flare 16 from a source gas 18 when energised by a source of electrical energy 20. A current control 22 controls the amount of current supplied to the torch by the power source. A flow regulator 24 regulates the flow rate of the source gas 18 supplied to the torch to be energised. A power control 26 is configured for controlling the power of the plasma torch by selective control of the current control 22 and the flow regulator 24. As explained in more detail below, a change in current produces relatively small changes in power, whereas changes in flow produce relatively large changes in power. In one arrangement therefore, the current control may be omitted so that power is controlled by the flow regulator alone.
The source of electrical energy 20 is connected by electrical conductors 28 to the electrodes 32 of the plasma torch, shown highly schematically in Figure 1.
is A more detailed description of the plasma torch is provided in relation to Figure 4.
When electrical energy is supplied to the electrodes, an electric field passes through a source gas 18 conveyed into the plasma torch thereby ionising the source gas generating the plasma flare 16. The plasma flare extends downstream into a plasma reactor chamber 36 in which a reaction with the exhaust gas stream 12 occurs. The gas stream to be treated 12 is conveyed into the reactor chamber through inlet 38. The current control 22 is responsive to current control signals output from the power control 26 along a control line 40 shown schematically in broken lines. In response to the power control 26, the current control 22 controls the current supplied to the electrodes by the source of electrical energy 20.
The flow regulator 24 is responsive to flow control signals output from the power control 26 along a control line 42 shown schematically in broken lines. In response to the power control, the flow regulator controls the flow rate of source gas conveyed from a supply 44 of source gas to the plasma device and which is energised to form the plasma flare. The source gas is typically nitrogen, but other gases may be used as required.
The power control 26 is configured to vary the power supplied to the torch 14 by varying both the current and the flow rate in accordance with a predetermined relationship between power, current and flow rate. The relationship is shown in Figure 2, in which power, F, is shown on the y-axis, s current, I, is shown on the x-axis and increasing source gas flow rate is shown by arrow F. The graph shows three curves Fl, F2, F3, representing three different source gas flow rates. The flow rate increases from Fl to F2 to F3. For example, Fl may be 10 slm, F2 may be 20 slm and F3 may be 30 slm. The curves El, F2, F3, show the relationship of current against power for different flow rates. It will be seen that at a constant flow rate a relatively large change in current results in a relatively small change in power.
Accordingly, the power control 26 is configured to control the power of the torch in a plurality of different power regimes 46, 48, 50. The power is varied within a power regime by controlling the current supplied to the torch and is switching between the regimes is controlled by regulating the flow of source gas.
The operable power range of the torch is shown by the thick line in Figure 2. A step change 52 in power occurs between regime 48 and 50 when the flow rate is increased from Fl to F2. A further step change 54 in power occurs when the flow rate is increased from F2 to F3.
Accordingly, slight adjustments of power can be effected by current control. On the other hand, the step change in power between regimes is relatively large compared to the limits of power control of said torch so that large changes in power can be effected by flow rate control. If the limits of power control are considered to be 100%, a current change may achieve a change in power of less about 10% for a given flow source gas flow rate; whilst a source gas flow rate change may achieve a change in power of 20% or more.
Although three power regimes are shown in Figure 2, the control may instead be configured to operate the torch in two power regimes or in more than three power regimes depending on the requirements of the treatment apparatus.
In comparison with the prior art, the operable power range of the present treatment apparatus is extended from a known 30-70% to as much as 300-500% combining changes of the torch operating current with the feed gas (N2) 110w rate.
The plasma torch is therefore controllable to treat a plurality of gas streams which require different amounts of power for treatment, and the plurality of power regimes utilised for this are arranged to correspond with respective different amounts of required power. The plasma torch may additionally or alternatively be controlled to operate in an idle mode for reducing the consumption of electrical energy, and at least one of the power regimes is ao arranged to correspond with the power required to operate the plasma torch in the idle mode. That is, the torch may have two power regimes, one for idle mode and one for gas treatment, or both for gas treatment without an idle mode.
Alternatively, the torch may have more than two power regimes, one being for idle mode and the others being for treatment of different exhaust gas compositions.
By way of example, the precursors used in a CVD process cycle may have three power band requirements.
In an idle mode, 0.5 to 1 kW of power may be required. A first power regime, for example 46 in Figure 2 is arranged for operating the torch in such an idle mode. A flow rate El, which may be 10 slm, may be selected to achieve the required power range, whilst current control within the range allows smaller adjustment of power. This regime is used to sustain plasma discharge at a minimum consumption of the electrical energy to avoid quenching of the discharge.
In a deposition mode, 2 to 3 kW of power may be required. A second power regime, for example 48 in Figure 2 is arranged for operating the torch to treat deposition gases such as pyrophoric or flammable precursors used for dielectric film deposition (e.g. Silane, Ammonia, TEOS, or4MS). Aflow rate F2, which may be 20 slm, may be selected to achieve the required power range, whilst current control within the range allows smaller adjustment of power.
In a cleaning mode, 2.5 to 5 kW of power may be required. A third power regime, for example 50 in Figure 2 is arranged for operating the torch the cleaning mode to treat cleaning gases such as F2 or NF3. A flow rate F3, which may be 30 slm, may be selected to achieve the required power range, whilst current control within the range allows smaller adjustment of power.
In another exemplary arrangement, two different N2 flow rates may be used for high and low power operating regimes. A high power operating regime for F2 and NF3 abatement may be used during a cleaning step. This regime may require 15 slm N2 for an operating power of 3 to 5kW. A low power operating ao regime may be used for a deposition step and idle mode. This latter regime may require 5 slm N2 for an operating power of 1.5 to 2.5 kW. The power control may be configured to switch between these two regimes at a moderate current of 25A.
The flow regulator 24 may be a mass flow controller which is operable by the power control 26 for selecting any one flow rate between zero, or no flow, and 100%, or maximum flow. A mass flow controller gives good design flexibility and control for operating the torch at any flow rate required between maximum and minimum flow rates. However, a mass flow controller is expensive and requires regular maintenance.
In an alternative arrangement shown in Figure 3, a simplified flow regulator 56 is shown which comprises a plurality of gas conduits 58, 60 arranged to allow different flow rates of source gas 18 therethrough. A flow switch 62 directs the source gas to flow through one or more selected gas conduits for regulating the flow rate to the torch. For example, the gas conduit 58 is configured to allow a first flow rate of gas therethrough. The gas conduit 60 is configured to allow a second flow rate of gas therethrough which is different from the first flow rate. As shown in Figure 2, the first flow rate is Fl and may for example be 10 slm. The second flow rate is F2 and may for example be 20 slm. The flow switch 62 is connected for operation by the power control 26 and the control is configured to control which of the selected one or more gas conduits source gas is conveyed dependent on the power regime required for operation of the plasma torch. A rotameter may be used to control flow.
The gas conduits may be sized to permit gas flow therethrough at the required rates or alternatively may be provided with flow controllers 64, 66, as shown, which are configured to allow a fixed flow rate through the conduits. Such fixed flow controllers are less expensive than the variable mass flow controller as described above.
Whilst two gas conduits 58, 60 are shown in Figure 3, more than two gas conduits may be provided and used individually or in combination to provide a io selected flow rate as controlled by the power control 26.
The plasma generator 14 may in one example be formed by the DC plasma torch shown in Figure 4. The torch comprises a cathode arrangement 1 and an anode arrangement 2. The cathode arrangement comprises a substantially cylindrical body 1 a and a button-type cathode lb. The cooled (for is example water-cooled) cathode body 1 a is formed of a conducting metal with a higher thermal conductivity and work function than that of the thermionic material of the button cathode 1 b, for example it is common to use a copper cathode body and a hafnium button cathode. The anode arrangement comprises a hollow body 2a, usually formed of copper, which further comprises an anode throat 2b and an inner frustro-conical surface portion 2c convergent towards, and terminating at, the throat 2b. When assembled the cathode arrangement 1 is located at least partially within and concentric to the copper anode 2. A gap must exist between the anode 2 and cathode 1 such that a conduit 3 is formed between the outer surface of the anode 2 and inner surface of the cathode assembly 1 through which source gas is conveyed for generating a plasma. The cathode 1 terminates within the conical portion 2c forming a plasma generating region 4 within said conical portion 2c.

Claims (1)

  1. <claim-text>CLAIMS1. Apparatus for treating a gas stream, comprising: a DC plasma torch for generating a plasma flare from a source gas when energised by a source of electrical energy; a flow regulator for regulating the flow rate of a source gas supplied to the torch to be energised; and a power control configured for controlling the power of the plasma torch by selective control of the flow regulator.</claim-text> <claim-text>2. Apparatus as claimed in claim 1, comprising a current control for controlling the amount of current supplied to the torch by the power source, wherein the power control is configured for controlling the power of the plasma torch by selective control of the current control and the flow regulator.</claim-text> <claim-text>3. Apparatus as claimed in claim 1, wherein the power control is configured to vary the power supplied to the torch by varying both the current and the source gas flow rate.</claim-text> <claim-text>4. Apparatus as claimed in claim 2, wherein the power control is configured to control the power of the torch in a plurality of different power regimes, the power being variable within a power regime by controlling the current supplied to the torch and switching between the regimes being controlled by regulating the flow of source gas.</claim-text> <claim-text>5. Apparatus as claimed in claim 4, wherein the plasma torch is configured to treat a plurality of gas streams which require different amounts of power for treatment, and the plurality of power regimes are arranged to correspond with respective different amounts of required power.</claim-text> <claim-text>6. Apparatus as claimed in claim 4 or 5, wherein the plasma torch is configured to operate in an idle mode for reducing the consumption of electrical energy, and at least one of the power regime is arranged to correspond with the power required to operate the plasma torch in the idle mode.</claim-text> <claim-text>7. Apparatus as claimed in any of claims 4 to 6, wherein within a regime the power is variable by relative small amounts by controlling the current compared to the limits of power control of said torch.</claim-text> <claim-text>8. Apparatus as claimed in any of claims 4 to 7, wherein the step change in power between regimes is relatively large compared to the limits of power control of said torch.</claim-text> <claim-text>9. Apparatus as claimed in any of the preceding claims, wherein the flow regulator is a mass flow controller.</claim-text> <claim-text>10. Apparatus as claimed in any of claims 1 to 8, wherein the flow regulator comprises a plurality of gas conduits arranged to allow different flow rates of source gas therethrough and a flow switch for directing the source gas to flow through selected one or more of the gas conduits for regulating the flow rate to the torch.</claim-text> <claim-text>11. Apparatus as cialmed in claim 10 when dependent on claim 4, wherein the flow switch is connected for operation by the power control and the power control is configured to control which of the selected one or more gas conduits through source gas is conveyed dependent on the power regime required for operation of the plasma torch.</claim-text>
GB1114173.6A 2011-08-17 2011-08-17 Apparatus for cleaning a gas stream Withdrawn GB2493751A (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
GB1114173.6A GB2493751A (en) 2011-08-17 2011-08-17 Apparatus for cleaning a gas stream
EP12740640.3A EP2744586B1 (en) 2011-08-17 2012-07-11 Apparatus for treating a gas stream
US14/238,840 US10064262B2 (en) 2011-08-17 2012-07-11 Apparatus for treating a gas stream
JP2014525483A JP6392119B2 (en) 2011-08-17 2012-07-11 Gas flow treatment equipment
CN201280040003.7A CN103732307B (en) 2011-08-17 2012-07-11 For the treatment of the device of air-flow
PCT/GB2012/051631 WO2013024248A1 (en) 2011-08-17 2012-07-11 Apparatus for treating a gas stream
KR1020147006775A KR101976226B1 (en) 2011-08-17 2012-07-11 Apparatus for treating a gas stream
TW101125896A TWI548017B (en) 2011-08-17 2012-07-18 Apparatus for treating a gas stream

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1114173.6A GB2493751A (en) 2011-08-17 2011-08-17 Apparatus for cleaning a gas stream

Publications (2)

Publication Number Publication Date
GB201114173D0 GB201114173D0 (en) 2011-10-05
GB2493751A true GB2493751A (en) 2013-02-20

Family

ID=44800458

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1114173.6A Withdrawn GB2493751A (en) 2011-08-17 2011-08-17 Apparatus for cleaning a gas stream

Country Status (8)

Country Link
US (1) US10064262B2 (en)
EP (1) EP2744586B1 (en)
JP (1) JP6392119B2 (en)
KR (1) KR101976226B1 (en)
CN (1) CN103732307B (en)
GB (1) GB2493751A (en)
TW (1) TWI548017B (en)
WO (1) WO2013024248A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016124887A1 (en) * 2015-02-03 2016-08-11 Edwards Limited Thermal plasma torch
WO2017021693A1 (en) * 2015-08-04 2017-02-09 Edwards Limited Gas treatment system

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2535528A (en) * 2015-02-23 2016-08-24 Edwards Ltd Apparatus for treating gas
GB2540994A (en) * 2015-08-04 2017-02-08 Edwards Ltd Control of power supplied to a plasma torch to compensate for changes at an electrode
KR102508351B1 (en) * 2022-08-29 2023-03-13 주식회사 원익홀딩스 Gas processing device
KR102508350B1 (en) * 2022-08-29 2023-03-13 주식회사 원익홀딩스 Gas processing device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008068917A1 (en) * 2006-12-01 2008-06-12 Kanken Techno Co., Ltd. Device for detoxicating semiconductor production exhaust gas
EP1977815A1 (en) * 2006-01-27 2008-10-08 Taiyo Nippon Sanso Corporation Apparatus for treating exhaust gas
EP2386347A1 (en) * 2002-05-08 2011-11-16 Benjamin Chun Pong Chan Hazardous waste treatment appartatus

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2613792B2 (en) 1988-07-29 1997-05-28 株式会社トキメック Air conditioning control device
JPH0240441U (en) * 1988-09-10 1990-03-19
US5506384A (en) * 1994-04-21 1996-04-09 Kabushiki Kaisha Komatsu Seisakusho Plasma arc cutting machine with variable constant current source and variable resistor
US6723091B2 (en) * 2000-02-22 2004-04-20 Gyrus Medical Limited Tissue resurfacing
US6620394B2 (en) 2001-06-15 2003-09-16 Han Sup Uhm Emission control for perfluorocompound gases by microwave plasma torch
JP2006224066A (en) 2005-02-21 2006-08-31 Kanken Techno Co Ltd Control method of plazma harmful material removing machine and device using it
JP4570506B2 (en) * 2005-04-20 2010-10-27 カンケンテクノ株式会社 Plasma detoxifier and exhaust gas treatment system using the plasma detoxifier
US20070079892A1 (en) * 2005-10-10 2007-04-12 Cohen Joseph P Gas filling system
TW200829325A (en) 2007-01-15 2008-07-16 Kanken Techno Co Ltd Apparatus and method for processing gas
WO2009123977A1 (en) * 2008-03-31 2009-10-08 Nellcor Puritan Bennett Llc Ventilator based on a fluid equivalent of the "digital to analog voltage" concept
JP2010142749A (en) 2008-12-19 2010-07-01 Kanken Techno Co Ltd Gas treatment apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2386347A1 (en) * 2002-05-08 2011-11-16 Benjamin Chun Pong Chan Hazardous waste treatment appartatus
EP1977815A1 (en) * 2006-01-27 2008-10-08 Taiyo Nippon Sanso Corporation Apparatus for treating exhaust gas
WO2008068917A1 (en) * 2006-12-01 2008-06-12 Kanken Techno Co., Ltd. Device for detoxicating semiconductor production exhaust gas

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016124887A1 (en) * 2015-02-03 2016-08-11 Edwards Limited Thermal plasma torch
WO2017021693A1 (en) * 2015-08-04 2017-02-09 Edwards Limited Gas treatment system
TWI702631B (en) * 2015-08-04 2020-08-21 英商愛德華有限公司 Method of controlling power output by a power supply configured to supply power to a plasma torch in a gas treatment system and computer program to be executed by a processor

Also Published As

Publication number Publication date
CN103732307A (en) 2014-04-16
EP2744586B1 (en) 2021-10-13
JP2014529493A (en) 2014-11-13
US20140209575A1 (en) 2014-07-31
US10064262B2 (en) 2018-08-28
JP6392119B2 (en) 2018-09-19
WO2013024248A1 (en) 2013-02-21
EP2744586A1 (en) 2014-06-25
KR101976226B1 (en) 2019-05-07
TWI548017B (en) 2016-09-01
CN103732307B (en) 2015-11-25
GB201114173D0 (en) 2011-10-05
TW201324650A (en) 2013-06-16
KR20140064868A (en) 2014-05-28

Similar Documents

Publication Publication Date Title
EP2744586B1 (en) Apparatus for treating a gas stream
US10056233B2 (en) RPS assisted RF plasma source for semiconductor processing
US8017527B1 (en) Method and apparatus to reduce defects in liquid based PECVD films
CN105379428B (en) Plasma processing apparatus and method of plasma processing
JP5025614B2 (en) Atmospheric pressure plasma treatment method
JP6224247B2 (en) Radical gas generation system
GB2490014A (en) Plasma torch
US9673062B1 (en) Plasma processing method
EP2032235B1 (en) Method and apparatus for treating a gas stream
CN101809720A (en) Method of plasma treatment and plasma treatment apparatus
JP7002165B1 (en) Board processing equipment and board processing method
JP2011108615A (en) Plasma treatment device
KR100485816B1 (en) High pressure plasma discharge device
TW201711081A (en) Control of gas flow and power supplied to a plasma torch in a multiple process chamber gas treatment system
WO2018191021A1 (en) High deposition rate high quality silicon nitride enabled by remote nitrogen radical source
JP2012019024A (en) Atmospheric-pressure plasma treatment apparatus
KR20240036083A (en) Graphene-capped copper with dual damascene interconnects
KR20240041961A (en) SELECTIVE DEPOSITION OF GRAPHENE ON COBALT-CAPPED COPPER DUAL DAMASCINE INTERCONNECTS
KR101538409B1 (en) Plasma chemical vapor apparatus and Cathode unit for plasma chemical vapor apparatus
KR20050006095A (en) High pressure plasma discharge device

Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)