JPH0240441U - - Google Patents
Info
- Publication number
- JPH0240441U JPH0240441U JP11921888U JP11921888U JPH0240441U JP H0240441 U JPH0240441 U JP H0240441U JP 11921888 U JP11921888 U JP 11921888U JP 11921888 U JP11921888 U JP 11921888U JP H0240441 U JPH0240441 U JP H0240441U
- Authority
- JP
- Japan
- Prior art keywords
- mass flow
- flow rate
- flow controller
- controller
- systems
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図は本考案の質量流量調節器の蓋を除いて
内部構造を表す平面図、第２図は従来の質量流量
調節器の同じ状態の平面図、第３図は従来の質量
流量調節器２個を用いた場合の平面図である。
１，５，９……質量流量調節器、ケース（匡体
）、２，２′……センサー部、３，３′……バイ
パス部、４，４′……コントロールバルブ、６…
…バルブ、７，８……三方バルブ。
Fig. 1 is a plan view showing the internal structure of the mass flow regulator of the present invention excluding the lid, Fig. 2 is a plan view of the conventional mass flow regulator in the same state, and Fig. 3 is the conventional mass flow regulator. It is a top view when two pieces are used. 1, 5, 9... Mass flow controller, case (casing), 2, 2'... Sensor section, 3, 3'... Bypass section, 4, 4'... Control valve, 6...
...Valve, 7, 8...3-way valve.
Claims (1)
調節部と高制御用質量流量調節部の２系統を並列
にもうけ、該２系統を三方バルブによつて切り換
え可能とした組み合わせを一つの匡体（ケース）
内に収容したことを特徴とする質量流量調節器。 ２ 流量範囲による三方コツクを切り換えと両質
量流量調節器の流量制御を行う１セツトの電気コ
ントローラーをもうけたことを特徴とする請求項
１記載の質量流量調節器。[Claims for Utility Model Registration] 1. A mass flow controller having two systems in parallel, a mass flow rate adjustment section for large flow rate and a mass flow rate adjustment section for high control, and the two systems can be switched by a three-way valve. A combination of these into one case
A mass flow controller, characterized in that the mass flow controller is housed in a mass flow controller. 2. The mass flow regulator according to claim 1, further comprising a set of electric controllers for switching between three-way controls according to flow rate ranges and controlling the flow rates of both mass flow regulators.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11921888U JPH0240441U (en) | 1988-09-10 | 1988-09-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11921888U JPH0240441U (en) | 1988-09-10 | 1988-09-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0240441U true JPH0240441U (en) | 1990-03-19 |
Family
ID=31364258
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11921888U Pending JPH0240441U (en) | 1988-09-10 | 1988-09-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0240441U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140064868A (en) * | 2011-08-17 | 2014-05-28 | 에드워즈 리미티드 | Apparatus for treating a gas stream |
| JP2019529081A (en) * | 2016-09-02 | 2019-10-17 | フルイディック・アナリティクス・リミテッド | Improvements to or related to fluid flow controllers for microfluidic devices |
-
1988
- 1988-09-10 JP JP11921888U patent/JPH0240441U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140064868A (en) * | 2011-08-17 | 2014-05-28 | 에드워즈 리미티드 | Apparatus for treating a gas stream |
| JP2014529493A (en) * | 2011-08-17 | 2014-11-13 | エドワーズ リミテッド | Gas flow treatment equipment |
| JP2019529081A (en) * | 2016-09-02 | 2019-10-17 | フルイディック・アナリティクス・リミテッド | Improvements to or related to fluid flow controllers for microfluidic devices |
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