GB2447977B - Magnetrons - Google Patents

Magnetrons

Info

Publication number
GB2447977B
GB2447977B GB0706298A GB0706298A GB2447977B GB 2447977 B GB2447977 B GB 2447977B GB 0706298 A GB0706298 A GB 0706298A GB 0706298 A GB0706298 A GB 0706298A GB 2447977 B GB2447977 B GB 2447977B
Authority
GB
United Kingdom
Prior art keywords
magnetrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0706298A
Other versions
GB2447977A (en
GB0706298D0 (en
Inventor
Michael Barry Clive Brady
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
e2v Technologies Ltd
Original Assignee
e2v Technologies Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by e2v Technologies Ltd filed Critical e2v Technologies Ltd
Priority to GB0706298A priority Critical patent/GB2447977B/en
Publication of GB0706298D0 publication Critical patent/GB0706298D0/en
Priority to US12/073,467 priority patent/US8018160B2/en
Priority to FR0851461A priority patent/FR2914486B1/en
Priority to JP2008097586A priority patent/JP5224174B2/en
Priority to CN2008100864465A priority patent/CN101276723B/en
Publication of GB2447977A publication Critical patent/GB2447977A/en
Application granted granted Critical
Publication of GB2447977B publication Critical patent/GB2447977B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J25/00Transit-time tubes, e.g. klystrons, travelling-wave tubes, magnetrons
    • H01J25/50Magnetrons, i.e. tubes with a magnet system producing an H-field crossing the E-field
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J23/00Details of transit-time tubes of the types covered by group H01J25/00
    • H01J23/12Vessels; Containers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J25/00Transit-time tubes, e.g. klystrons, travelling-wave tubes, magnetrons
GB0706298A 2007-03-30 2007-03-30 Magnetrons Expired - Fee Related GB2447977B (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB0706298A GB2447977B (en) 2007-03-30 2007-03-30 Magnetrons
US12/073,467 US8018160B2 (en) 2007-03-30 2008-03-05 Magnetron having a feature for collecting material lost from a cathode thereof
FR0851461A FR2914486B1 (en) 2007-03-30 2008-03-06 MAGNETRONS.
JP2008097586A JP5224174B2 (en) 2007-03-30 2008-03-06 Magnetron
CN2008100864465A CN101276723B (en) 2007-03-30 2008-03-11 Magnetron

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0706298A GB2447977B (en) 2007-03-30 2007-03-30 Magnetrons

Publications (3)

Publication Number Publication Date
GB0706298D0 GB0706298D0 (en) 2007-05-09
GB2447977A GB2447977A (en) 2008-10-01
GB2447977B true GB2447977B (en) 2011-08-10

Family

ID=38050598

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0706298A Expired - Fee Related GB2447977B (en) 2007-03-30 2007-03-30 Magnetrons

Country Status (5)

Country Link
US (1) US8018160B2 (en)
JP (1) JP5224174B2 (en)
CN (1) CN101276723B (en)
FR (1) FR2914486B1 (en)
GB (1) GB2447977B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6342173B2 (en) * 2014-02-01 2018-06-13 新日本無線株式会社 Radar device
CN114446741B (en) * 2021-11-18 2023-04-07 电子科技大学 Array module magnetron and novel high-power magnetron unit

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4219397A (en) * 1978-11-24 1980-08-26 Clarke Peter J Magnetron sputter apparatus
US6495000B1 (en) * 2001-07-16 2002-12-17 Sharp Laboratories Of America, Inc. System and method for DC sputtering oxide films with a finned anode

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2452272A (en) * 1944-10-28 1948-10-26 Philco Corp Magnetron
JPS6227568A (en) * 1985-07-26 1987-02-05 Nec Corp Sputtering device
US5073245A (en) * 1990-07-10 1991-12-17 Hedgcoth Virgle L Slotted cylindrical hollow cathode/magnetron sputtering device
JPH04157720A (en) * 1990-10-20 1992-05-29 Fujitsu Ltd Sputtering method
JPH11250816A (en) * 1998-02-27 1999-09-17 Toshiba Corp Magnetron
JP2003077401A (en) * 2001-08-31 2003-03-14 Sanyo Electric Co Ltd Magnetron
GB2424753B (en) * 2005-03-31 2009-02-18 E2V Tech Magnetron

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4219397A (en) * 1978-11-24 1980-08-26 Clarke Peter J Magnetron sputter apparatus
US6495000B1 (en) * 2001-07-16 2002-12-17 Sharp Laboratories Of America, Inc. System and method for DC sputtering oxide films with a finned anode

Also Published As

Publication number Publication date
FR2914486A1 (en) 2008-10-03
GB2447977A (en) 2008-10-01
GB0706298D0 (en) 2007-05-09
US20080238558A1 (en) 2008-10-02
JP2008258167A (en) 2008-10-23
CN101276723A (en) 2008-10-01
US8018160B2 (en) 2011-09-13
JP5224174B2 (en) 2013-07-03
CN101276723B (en) 2012-10-10
FR2914486B1 (en) 2015-06-05

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20230330