GB2435757B - Gyroscopes and accelerometers - Google Patents

Gyroscopes and accelerometers

Info

Publication number
GB2435757B
GB2435757B GB0707218A GB0707218A GB2435757B GB 2435757 B GB2435757 B GB 2435757B GB 0707218 A GB0707218 A GB 0707218A GB 0707218 A GB0707218 A GB 0707218A GB 2435757 B GB2435757 B GB 2435757B
Authority
GB
United Kingdom
Prior art keywords
substrate
disc
conductive elements
electrodes
gyroscopes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0707218A
Other versions
GB2435757A (en
GB0707218D0 (en
Inventor
Diana Hodgins
Denis James Hodgins
David John Pedder
Simon Mason
Peter John Robinson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
European Technology for Business Ltd
Original Assignee
European Technology for Business Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by European Technology for Business Ltd filed Critical European Technology for Business Ltd
Publication of GB0707218D0 publication Critical patent/GB0707218D0/en
Publication of GB2435757A publication Critical patent/GB2435757A/en
Application granted granted Critical
Publication of GB2435757B publication Critical patent/GB2435757B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
    • G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure

Landscapes

  • Gyroscopes (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)

Abstract

A method of assembling a solid-state gyroscope in which a disc (10) of piezo-electric material having electrodes (12) formed on its circular surfaces is mounted on but spaced from a substrate (20). A plurality of upstanding conductive elements (24) are provided on connection points (14) on one of the disc (10) and substrate (20) in the central region thereof and then the disc is moved towards the substrate to cause the conductive elements to effect connections between the disc electrodes and conducting tracks formed on the substrate. The disc is then bonded to the substrate either by a central adhesive pad (25) or by bonding the conductive elements to the associated tracks in a conducting manner.
GB0707218A 2004-09-25 2005-09-23 Gyroscopes and accelerometers Expired - Fee Related GB2435757B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0421416A GB0421416D0 (en) 2004-09-25 2004-09-25 Gyroscopes and accelerometers
PCT/GB2005/003657 WO2006032895A1 (en) 2004-09-25 2005-09-23 Gyroscopes and accelerometers

Publications (3)

Publication Number Publication Date
GB0707218D0 GB0707218D0 (en) 2007-05-23
GB2435757A GB2435757A (en) 2007-09-05
GB2435757B true GB2435757B (en) 2008-05-07

Family

ID=33397309

Family Applications (2)

Application Number Title Priority Date Filing Date
GB0421416A Ceased GB0421416D0 (en) 2004-09-25 2004-09-25 Gyroscopes and accelerometers
GB0707218A Expired - Fee Related GB2435757B (en) 2004-09-25 2005-09-23 Gyroscopes and accelerometers

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB0421416A Ceased GB0421416D0 (en) 2004-09-25 2004-09-25 Gyroscopes and accelerometers

Country Status (2)

Country Link
GB (2) GB0421416D0 (en)
WO (1) WO2006032895A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103322995B (en) * 2013-06-20 2016-04-13 上海交通大学 Piezoelectric Driving electrostatic detection bulk acoustic resonance three axle microthrust test and preparation method thereof

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2304903A (en) * 1995-09-07 1997-03-26 Sagem An electromechanical sensor device and a method of manufacturing it
JPH10246638A (en) * 1997-03-05 1998-09-14 Tokin Corp Piezoelectric oscillation gyro
JPH11101645A (en) * 1997-09-26 1999-04-13 Miyota Kk Angular velocity sensor
US6472610B1 (en) * 1997-04-15 2002-10-29 Murata Manufacturing Co., Ltd. Support structure for electronic component
WO2003023323A1 (en) * 2001-09-12 2003-03-20 European Technology For Business Limited Angular rate sensors and method of fabricating them
JP2005083767A (en) * 2003-09-04 2005-03-31 Tdk Corp Angular velocity sensor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2304903A (en) * 1995-09-07 1997-03-26 Sagem An electromechanical sensor device and a method of manufacturing it
JPH10246638A (en) * 1997-03-05 1998-09-14 Tokin Corp Piezoelectric oscillation gyro
US6472610B1 (en) * 1997-04-15 2002-10-29 Murata Manufacturing Co., Ltd. Support structure for electronic component
JPH11101645A (en) * 1997-09-26 1999-04-13 Miyota Kk Angular velocity sensor
WO2003023323A1 (en) * 2001-09-12 2003-03-20 European Technology For Business Limited Angular rate sensors and method of fabricating them
JP2005083767A (en) * 2003-09-04 2005-03-31 Tdk Corp Angular velocity sensor

Also Published As

Publication number Publication date
GB0421416D0 (en) 2004-10-27
GB2435757A (en) 2007-09-05
WO2006032895A1 (en) 2006-03-30
GB0707218D0 (en) 2007-05-23

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20090923