GB2425592B - Method and instrument for measuring complex dielectric constant of sample by optical spectrum measurement - Google Patents
Method and instrument for measuring complex dielectric constant of sample by optical spectrum measurementInfo
- Publication number
- GB2425592B GB2425592B GB0612243A GB0612243A GB2425592B GB 2425592 B GB2425592 B GB 2425592B GB 0612243 A GB0612243 A GB 0612243A GB 0612243 A GB0612243 A GB 0612243A GB 2425592 B GB2425592 B GB 2425592B
- Authority
- GB
- United Kingdom
- Prior art keywords
- instrument
- sample
- dielectric constant
- optical spectrum
- spectrum measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005259 measurement Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 230000003287 optical effect Effects 0.000 title 1
- 238000001228 spectrum Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N22/00—Investigating or analysing materials by the use of microwaves or radio waves, i.e. electromagnetic waves with a wavelength of one millimetre or more
Landscapes
- Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electromagnetism (AREA)
- Mathematical Physics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003391201A JP4006525B2 (en) | 2003-11-20 | 2003-11-20 | Sample flatness and complex permittivity measurement device and measurement method by light transmission measurement |
JP2004311458A JP4235826B2 (en) | 2004-10-26 | 2004-10-26 | Method for measuring complex permittivity of samples by reflection measurement of light |
PCT/JP2004/017361 WO2005050177A1 (en) | 2003-11-20 | 2004-11-22 | Method and instrument for measuring complex dielectric constant of sample by optical spectrum measurement |
Publications (3)
Publication Number | Publication Date |
---|---|
GB0612243D0 GB0612243D0 (en) | 2006-08-02 |
GB2425592A GB2425592A (en) | 2006-11-01 |
GB2425592B true GB2425592B (en) | 2007-09-05 |
Family
ID=34622187
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0612243A Expired - Fee Related GB2425592B (en) | 2003-11-20 | 2004-11-22 | Method and instrument for measuring complex dielectric constant of sample by optical spectrum measurement |
Country Status (2)
Country | Link |
---|---|
GB (1) | GB2425592B (en) |
WO (1) | WO2005050177A1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4528952B2 (en) * | 2007-05-17 | 2010-08-25 | 独立行政法人産業技術総合研究所 | Method and apparatus for measuring flatness |
EP3745144A1 (en) * | 2019-05-29 | 2020-12-02 | ALCAN Systems GmbH | A method of inspecting a radio frequency device and a radio frequency device |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002098634A (en) * | 2000-03-27 | 2002-04-05 | Tochigi Nikon Corp | Electrical characteristic evaluation apparatus and method for semiconductor |
WO2002095372A1 (en) * | 2001-05-22 | 2002-11-28 | Horiba, Ltd. | Thin-film characteristic measuring method using spectroellipsometer |
JP2003014620A (en) * | 2001-06-27 | 2003-01-15 | Matsushita Electric Ind Co Ltd | Polarization analysis apparatus and method |
US20040008346A1 (en) * | 2002-07-09 | 2004-01-15 | National Inst. Of Advanced Ind. Science And Tech. | Optical system for measurement of optical constant |
US20040169863A1 (en) * | 2003-02-27 | 2004-09-02 | Etsuo Kawate | Optical system for measurement |
-
2004
- 2004-11-22 GB GB0612243A patent/GB2425592B/en not_active Expired - Fee Related
- 2004-11-22 WO PCT/JP2004/017361 patent/WO2005050177A1/en active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002098634A (en) * | 2000-03-27 | 2002-04-05 | Tochigi Nikon Corp | Electrical characteristic evaluation apparatus and method for semiconductor |
WO2002095372A1 (en) * | 2001-05-22 | 2002-11-28 | Horiba, Ltd. | Thin-film characteristic measuring method using spectroellipsometer |
EP1406080A1 (en) * | 2001-05-22 | 2004-04-07 | Horiba, Ltd. | Thin-film characteristic measuring method using spectroellipsometer |
JP2003014620A (en) * | 2001-06-27 | 2003-01-15 | Matsushita Electric Ind Co Ltd | Polarization analysis apparatus and method |
US20040008346A1 (en) * | 2002-07-09 | 2004-01-15 | National Inst. Of Advanced Ind. Science And Tech. | Optical system for measurement of optical constant |
US20040169863A1 (en) * | 2003-02-27 | 2004-09-02 | Etsuo Kawate | Optical system for measurement |
Non-Patent Citations (1)
Title |
---|
M. Li et al, "Time-domain dielectric constant measurement of thin film in GHz, THz frequency range near the Brewster angle", Applied Physics Letters, Vol.74, No.15, 12 April 1999, pages 2113-2115 * |
Also Published As
Publication number | Publication date |
---|---|
GB0612243D0 (en) | 2006-08-02 |
WO2005050177A1 (en) | 2005-06-02 |
GB2425592A (en) | 2006-11-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
789A | Request for publication of translation (sect. 89(a)/1977) | ||
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20141122 |