GB2423870A

GB2423870A - Organic EL device and method for fabricating same

Info

Publication number: GB2423870A
Application number: GB0611571A
Authority: GB
Inventors: Toshio Negishi
Original assignee: Ulvac Inc
Current assignee: Ulvac Inc
Priority date: 2004-05-13
Filing date: 2005-05-11
Publication date: 2006-09-06
Anticipated expiration: 2025-05-11
Also published as: GB0611571D0; GB2423870B; TW200603669A; CN100566487C; KR101223333B1; JP4964591B2; WO2005112517A1; CN1898994A; JPWO2005112517A1; KR20070021103A; TWI406586B

Abstract

An organic EL device having high luminous efficiency. An organic EL device (1) has an inorganic material film (14) of titanium oxide on a transparent electrode film (12). Since the inorganic material film (14) exhibits higher affinity to a solvent such as water than the transparent electrode film (12), once a first organic material such as a hole-transporting material dispersed in a solvent is placed on the surface of the inorganic material film (14), the first organic material spreads over the surface of the inorganic material film (14), thereby forming a first organic layer (21) having a uniform thickness. Since the surface of the first organic layer (21) is flat, a second organic layer (22) having a uniform thickness can be formed when a second organic material is placed on the first organic layer (21). Since the first through third organic layers (21-23) constituting an organic film (20) respectively have a uniform thickness in the organic EL element (1), emission of the organic layer (22) containing a light-emitting substance can be uniform and high luminous efficiency is ensured.

Description

P/Ti OFFICE COPY 1 2423870

ORGANIC EL DEVICE AND METHOD FOR

MANUFACTURING ORGANIC EL DEVICE

TECHNICAL FIELD

The present invention relates to an organic EL device and a method for manufacturing the same.

BACKGROUND ART

Displays using an organic EL (Electro-Luminescence) device have been conventionally used. An exemplary manufacturing process of an organic EL device is now described. In Fig. 4a, the reference numeral 110 denotes a substrate to be processed that is used for manufacturing an organic EL device.

The substrate to be processed 110 includes a transparent substrate Ill, a transparent electrode film 112 formed on a surface of the transparent substrate Ill, and a barrier rib film 115 arranged on the surface of the transparent substrate 111 on which the transparent electrode film 112 is formed. The barrier rib film 115 has a hole 116 formed therein. The transparent electrode film 112 is exposed at the bottom of the hole 116.

The organic EL device is manufactured using the substrate to be processed 110 in the following manner. A liquid first organic material in which a hole transport material is dispersed is put into a tank of an ink-jet printer. When a nozzle of the ink-jet printer is arranged to face the hole 116, the first organic material is ejected so as to form a coating layer of the first organic material on the surface of the transparent electrode film 112 at the bottom of the hole 116. Then, the coating layer is dried so as to vaporize off solvent of the first organic material. In this manner, a first organic layer 121 containing the hole transport material as a main component is formed (Fig. 4b).

A second organic material in which a luminescent material is dispersed and a third organic material in which an electron transport material is dispersed are prepared. Then, a second organic layer 122 containing the luminescent material as its main component and a third organic layer 123 containing the electron transport material as its main component are formed using the ink-jet printer in the same manner as that of the first organic layer 121. Moreover, an upper electrode film 125 is formed on the third organic layer 123. In this manner, an organic EL device 101 is obtained (Fig. 4c).

An organic film 120 formed by the first to third organic layers 121 to 123 is sandwiched between the transparent electrode film 112 and the upper electrode film 125. When a positive voltage and a negative voltage are applied to the transparent electrode film 112 and the upper electrode film 125, respectively, positive holes are injected into the first organic layer 121 and electrons are injected into the third organic layer 123.

The first to third organic layers 121 to 123 mainly contain the hole transport material, the luminescent material, and the electron transport material, respectively. Thus, positive holes are transported from the first organic layer 121 to the second organic layer 122, and electrons are transported from the third organic layer 123 to the second organic layer 122.

When the positive holes and the electrons are coupled to each other in the second organic layer 122, the second orgamc layer 122 emits light.

Light radiated from the second organic layer 122 to the side of the transparent electrode film 112 is transmitted through the transparent electrode film 112 and the transparent substrate Ill and then exits to the outside of the organic EL device 101.

As described above, the use of the ink-jet printer allows the first to third organic materials to be applied solely onto a desired position. Thus, it is possible to efficiently form the first to third organic layers 121 to 123 without wasting the first to third organic materials.

However, the affinity between the solvent used in the first organic material and the transparent electrode film 112 is usually low. Thus, when the first organic material is arranged inside the hole 116, the first organic material does not spread on the surface of the transparent electrode film 112 but forms a droplet. Therefore, the thickness of the first organic layer 121 becomes nonuniform, as shown in Fig. 4b. That is, the thickness of the first organic layer 121 is thick around a center of the bottom of the hole 116 and is thin near side faces of the hole 116.

When the second organic material is applied on the surface of the first organic layer 121 in that state and the second organic layer 122 is formed, the thickness of the second organic layer 122 is also nonuniform. The nonuniform thickness of the layer containing the luminescent material, such as the second organic layer 122, makes the amount and color of emitted light in the organic film 120 unstable and nonuniform, thus lowering light-emission efficiency.

A method is known in order to solve the above problem, in which a hydrophilic organic thin film is formed on the surface of the transparent electrode film 112 in advance and thereafter the first organic material is applied (see Japanese Patent Laid-Open Publication No. 2002-237383, for example). In this method, however, the hydrophilic organic thin film is formed by leaving a glass substrate for a long period of time in an atmosphere of organic gas. Thus, manufacturing times are increased. Moreover, the affinity of the hydrophilic organic thin film for the first organic material is not sufficient.

DISCLOSURE OF THE INVENTION

PROBLEMS TO BE SOLVED BY THE INVENTION

The present invention seeks to overcome the above problems of the conventional techniques. It is an object of the present invention to provide an organic EL device having high light-emission efficiency.

MEANS TO SOLVE THE PROBLEMS

In order to achieve the above object, according to a first aspect of the present invention there is provided a method for manufactunng an organic EL device including: a transparent electrode film that is arranged on a transparent substrate and is patterned in a predetermined shape; a barrier rib film located at least on the transparent electrode film; a plurality of holes formed in the barrier rib film, the transparent electrode film being located at a bottom of each of the holes; an organic film arranged in each of the holes; and an upper electrode film arranged at least on the organic film, wherein the organic film emits light when a voltage is applied across the transparent electrode film and the upper electrode film. The method includes the steps of: arranging the barrier rib film on the transparent electrode film; forming an inorganic material film on the transparent electrode film that is exposed at the bottom of each of the holes included in the barrier rib film; and then arranging a liquid organic material that contains a solvent having a higher affinity for the inorganic material film than for the transparent electrode film on a surface of the inorganic material film to form the organic film.

Preferably, the organic material is arranged on the surface of the inorganic material film by ejecting liquid droplets of the organic material to the holes.

Conveniently, the organic material contains any one of or both of poly(ethylenedioxy)thiophene and polyaniline.

Advantageously, the solvent contained in the organic material is a hydrophilic solvent.

Preferably, the hydrophilic solvent contains any one of or both of water and an alcohol.

Conveniently, the inorganic material film contains titanium oxide as a main component.

Advantageously, the inorganic material film is formed by sputtering a target containing a constituent of the inorganic material film to eject sputtered particles and making the sputtered particles adhere to a surface of the transparent electrode film located at the bottom of each of the holes.

According to a second aspect of the present invention, there is provided an organic EL device including: a transparent electrode film that is arranged on a transparent substrate and is patterned in a predetermined shape; a barrier rib film located at least on the transparent electrode film; a plurality of holes formed in the barrier rib film, the transparent electrode film being located at a bottom of each of the holes; an organic film arranged in each of the holes; and an upper electrode film arranged at least on the organic film. In the organic EL device, the organic film emits light when a voltage is applied across the transparent electrode film and the upper electrode film, an inorganic material film containing titanium oxide as a main component is formed on the transparent electrode film arranged in each of the holes, and the organic film is formed on a surface of the inorganic material film.

Preferably, the organic film contains any one of or both of poly(ethylenedioxy)thiophene and polyaniline.

Conveniently, the inorganic material film is hydrophilic.

Advantageously, the transparent electrode film contains a hydrophobic conductive material as a main component.

Preferably, the hydrophobic conductive material contains one conductive material selected from the group consisting of indium tin oxide, zinc oxide, and tin oxide.

ADVANTAGES OF TIlE INVENTION According to the present invention, the inorganic material film having a high affinity for the solvent of the organic material is formed on the surface of the transparent electrode film located at the bottom of the hole. Thus, when the organic material is arranged inside the hole, the organic material spreads on the surface of the inorganic material film and forms an organic layer having a uniform thickness. Moreover, when a new organic material is arranged on the surface of that organic layer, the thickness of the coating layer of the new organic material is also uniform because the new organic material is arranged on the surface of the organic layer having unifonri thickness.

Accordingly, the organic layers, each having uniform thickness, are stacked on the transparent electrode film, thus forming an organic film including a plurality of organic layers on the transparent electrode film. In the case where the thickness of the organic layer containing the luminescent material is uniform, when a voltage is applied to that organic layer, the amount and color of emitted light are stable and lightemission efficiency becomes high. In addition, when the inorganic material film is formed by sputtering, it is possible to reduce the time required for depositing the inorganic material film and to easily control the thickness thereof. In this case, adhesion between the deposited inorganic material film and the transparent electrode film is high.

BRIEF DESCRIPTION OF THE DRAWINGS

Figs. la to id are cross-sectional views showing a former part of a manufacturing process of an organic EL device of the present invention.

Figs. 2a to 2d are cross-sectional views showing a latter part of the manufacturing process of the organic EL device of the present invention.

Fig. 3 is a cross-sectional view showing another exemplary manufacturing process of the organic EL device of the present invention.

Figs. 4a to 4c are cross-sectional views showing a manufacturing process of a conventional organic EL device.

DESCRIPTION OF REFERENCE NUMERALS

1, 3... Organic EL device; 11... Substrate; 12... Transparent electrode film; 14, 34... Inorganic material film; 15... Barrier rib film; 16... Hole; 20 Organic film; 21... First organic layer; 22... Second organic layer; 23 Third organic layer

BEST MODE FOR CARRYING OUT THE INVENTION

An exemplary manufacturing process of an embodiment of an organic EL device of the present invention is now described. In Fig. I a, the reference numeral 10 denotes a substrate to be processed that is used for manufacturing an organic EL device. This substrate to be processed 10 includes a transparent substrate 11.

A plurality of elongate transparent electrode films 12 that arc insulated from each other are arranged to extend on the surface of the transparent substrate 11. A barrier rib film 15 is also formed on the surface of the transparent substrate 11 on which the transparent electrode films 12 are arranged.

The barrier rib film 15 includes a plurality of holes 16. Two or more of the plurality of holes 16 are arranged on each transparent electrode film 12.

Each hole 16 is formed by etching an insulating film formed of an insulating resin. The transparent electrode film 12 is exposed at the bottom of each hole 16.

The organic EL device is manufactured using the substrate to be processed 10 in the following manner. The substrate to be processed 10 is placed into a vacuum chamber of a sputtering apparatus. In the vacuum chamber, a target composed of titanium is arranged and a vacuum atmosphere is formed in advance. The substrate to be processed 10 is arranged in such a manner that the surface on which the barrier rib film 15 is formed faces the target.

Fig. lb shows a state in which the substrate to be processed 10 is arranged to be opposed to the target 5. in that state, a mask 18 is placed on the barrier rib film 15. The mask 18 has an opening at a position above each hole 16. The transparent electrode film 12 located at the bottom of the hole 16 is exposed inside the opening of the mask 18, whereas the surface of the barrier rib film 15 is covered by the mask 18.

A reaction gas composed of 02 gas is introduced into the vacuum chamber while the inside of the vacuum chamber is evacuated, and the target is sputtered. Sputtered particles do not reach portions covered by the mask 18. However, the sputtered particles passing through the opening of the mask 18 reach the transparent electrode film 12 exposed at the bottom of the hole 16 and react with the reaction gas so as to form an inorganic material film 14 composed of titanium oxide (Ti02) (Fig. ic).

The thickness of the titanium oxide film forming the inorganic material film 14 is not specifically limited. However, it is very difficult to form a titanium oxide film having a uniform thickness set as smaller than 5 angstroms. Moreover, movement of positive holes is disturbed when the thickness is set as larger than 50 angstrorns. Therefore, it is preferable that the thickness of the titanium oxide film be 0.5 nm or more and 5 nm or less (namely, 5 angstroms or more and 50 angstroms or less).

Subsequently, a hquid first organic material, in which a first organic compound composed of a hole transport material is dispersed in a first solvent composed of water, is put into a tank of an ink-jet printer (not shown). When a nozzle of the ink-jet printer is arranged to rest at a position above the hole 16 of the substrate to be processed 10 brought out from the vacuum chamber, and the first organic material is ejected from the nozzle, liquid droplets of the first organic material rcach the inside of the hole 16. Thus, the first organic material is arranged on the surface of the inorganic material layer 14.

In general, alcohols, such as ethanol and methanol, and water, are used as the solvent in which a hole transport material is dispersed (i.e., the first solvent). The barrier rib film 15 is composed of an insulation material such as polyimide resin, and the affinity of its surface for the above first solvent is low because the surface is exposed to plasma in advance. Therefore, even if the position of the nozzle changes during the ejection of the first organic material so as to cause the first organic material to reach the surface of the barricr rib film 15 outside the hole 16, the first organic material does not spread on the surface of the barrier rib film 15 but forms droplets.

The affinity of the inorganic material film 14, which is composed of titanium oxide, for the first solvent is much higher than that of the surface of the barrier rib film 15 for the first solvent. Therefore, if the position which the first organic material reaches is close to the hole 16, the droplets of the first organic material are attracted to the inorganic material film 14 so as to move inside the hole 16. As a result, the first organic material is arranged on the surface of the inorganic material film 14.

The transparent electrode film 12 is composed of a transparent conductive material such as ITO (indium tin oxide). The affinity of the transparent electrode film 12 for the first solvent is much lower than that of the inorganic material film 14 for the first solvent. Thus, when the first organic material is arranged directly on the surface of the transparent electrode film 12, the first organic material is repelled. However, when the first organic material is arranged on the surface of the inorganic matenal film 14, the first organic material spreads without being repelled, so that a coating layer of the first organic material having a uniform thickness is formed.

Subsequently, the entire substrate is heated in that state and dried so as to remove excess first solvent from the coating layer. In this manner, a first organic layer 21 that contains the first organic compound as a main component and has a uniform thickness is formed (Fig. I d).

Then, a liquid second organic material, in which a second organic compound composed of a luminescent material is dispersed in a second solvent, is put into the tank of the ink-jet printer. When the nozzle of the ink- jet printer is placed at the position above the hole 16 and the second organic material is ejected from the nozzle, liquid droplets of the second organic material reach the inside of the hole 16, so that the second organic material is arranged on the surface of the first organic layer 21.

As described above, the first organic layer 21 has a uniform thickness and the surface thereof is flat. Therefore, when the second organic material is arranged on the surface of the first organic layer 21, a coating layer of the second organic matenal having a uniform thickness is formed. Then, the entire substrate is heated in that state and dried to remove excess second solvent from the coating layer. In this manner, a second organic layer 22 that contains the second organic compound as a main component and which has a uniform thickness is formed (Fig. 2a).

Subsequently, a liquid third organic matenal, in which a third organic compound composed of an electron transport material is dispersed in a third solvent, is put into the tank of the ink-jet printer. When the nozzle of the ink- jet printer is placed at the position above the hole 16 and the third organic material is ejected from the nozzle, liquid droplets of the third organic material reach the inside of the hole 16. In this manner, the third organic matenal is arranged on the surface of the second organic layer 22 to form a coating layer. Then, the entire substrate is heated in that state and dried to remove excess third solvent from the coating layer of the third organic matenal. In this manner, a third organic layer 23 is formed (Fig. 2b).

In Fig. 2b, the reference numeral 20 denotes an organic film formed by the first to third organic layers 21 to 23, which is formed inside the hole 16. The substrate to be processed 10 with the organic film 20 formed thereon is placed into a vacuum chamber of an evaporation apparatus, in which a vacuum atmosphere has been formed in advance. The substrate to be processed 10 is arranged in such a manner that the surface on which the barrier rib film 15 is formed faces an evaporation source inside the vacuum chamber. An electrode mask 28 is arranged on the barrier rib film 15, as shown in Fig. 2c.

The electrode mask 28 has a plurality of elongate openings. The electrode mask 28 is placed on the barrier rib film 15 in such a manner that the respective openings cross the transparent electrode films 12 at positions above the hole 16. Thus, the surface of the barrier rib film 15 and the surface of the organic film 20 are exposed inside each opening.

When the vapor of an electrode material is discharged from the evaporation source in that state, the vapor passing through the opening of the mask 28 adheres to the surface of the organic film 20 and a portion of the barrier rib film 15 that is exposed inside the opening. In this manner, elongate upper electrode films crossing the transparent electrode films 12 at the positions above the holes 16 are formed. The number of the upper electrode films is the same as the number of the openings.

In Fig. 2d, the reference numeral 1 denotes an organic EL device in which the upper electrode films 25 are formed. The transparent electrode films 12 are formed to be straight and are arranged parallel to each other at predetermined intervals. The upper electrode films 25 are also formed to be straight and are arranged to perpendicularly cross the transparent electrode films 12. Thus, a plurality of the organic films 20 formed on the same transparent electrode film 12 are in close contact with respective upper electrode films 25.

Therefore, when one transparent electrode film 12 and one upper electrode film 25 are selected and a positive voltage and a negative voltage are applied to the transparent electrode film 12 and the upper electrode film that are selected, respectively, electrons are injected into one of the organic films 20 on the selected transparent electrode film 12, which is in close contact with the selected upper electrode film 25.

The surface of the organic film 20, on which the third organic layer 23 is formed, is in close contact with the upper electrode film 25. The third organic layer 23 contains the third organic compound composed of the electron transport material. Therefore, the electrons injected from the upper electrode film 25 are transported from the third organic layer 23 to the second organic layer 22.

On the other hand, positive holes are injected into the inorganic material film 14, because the transparent electrode film 12 is in close contact with the inorganic material film 14.

In this example, the first organic compound is composed of PEDOT (poly(ethylenedioxy)thiophene) serving as a hole transport material. A work function of the first organic layer 21 is 5.0 eV in the case that PEDOT is used.

Moreover, a work function of the transparent electrode film 12 composed of ITO is 4.8 eV. Since a work function of the inorganic material film 14 composed of titanium oxide is between 4.8 eV and 5.0 eV, the positive holes injected into the inorganic material film 14 are transported into the first organic layer 21, are transported by PEDOT in the first organic layer 21, and are then injected into the second organic layer 22.

The second organic layer 22 contains the second organic compound composed of a luminescent material as its main component. Thus, when the electrons and the positive holes that are injected into the second organic layer 22 are coupled to each other, the luminescent material is excited to cause light emission in the second organic layer 22. Since the second organic layer 22 has a uniform thickness in the present invention as described above, there is no resistance difference in the second organic layer 22 and therefore the second organic layer 22 emits light uniformly.

The inorganic material film 14 is sufficiently thin that the inorganic material film 14 has a light-transmitting property. Thus, light radiated from the second organic layer 22 toward the inorganic material film 14 exits to the outside of the organic EL device 1 after passing through the first organic layer 21, the inorganic material film 14, the transparent electrode film 12, and the transparent substrate 11.

As described above, when a voltage is applied to only one of the organic films 20 located above the selected transparent electrode film 12 with the organic film 20 being in close contact with the selected upper electrode film 25, light is thereby emitted. Therefore, by selecting the upper electrode film 25 and the transparent electrode film 12, it is possible to cause only a desired organic film 20 to emit light so as to display image information such as a character or a diagram.

When a coloring matter is added to the organic film 20, it is possible to provide a color of the coloring matter to light emitted from the organic EL device. For example, one light-emission unit includes three or more organic films 20. The organic films 20 of one light-emission unit are formed to contain coloring matters of different colors such as red, green, and blue, respectively. When each light-emission unit is made to emit light as one pixel, image information can be displayed with colors.

In adding coloring matter to the organic film 20 formed by a plurality of organic layers 21 to 23, there is no specific limitation as to which one of the organic layers 21 to 23 is to contain the coloring matter.

However, it is preferable to add the coloring matter to the organic layers 22 containing the luminescent material and/or organic layers which are closer to the inorganic material film 14 than the organic layer 22. It is most preferable to add the coloring matter to the organic layer 22 containing the luminescent material.

In the above description, a case is described in which the inorganic matenal film 14 is formed only on the surface of the transparent electrode film 12 exposed at the bottom of the hole 16. However, the present invention is not limited thereto.

In Fig. 3, the reference numeral 3 denotes another exemplary organic EL device of the present invention. In the organic EL device 3, an inorganic material film 34 is formed so as to be continuous on the side faces and the bottom of the hole 16 by sputtering.

The first organic material is also arranged on the surface of the inorganic material film 34 inside the hole 16 in the organic EL device 3.

Thus, the thickness of the first organic layer 21 is uniform and therefore the thickness of the second organic layer 22 formed thereon is also uniform.

In the above description, a case is described in which the organic film includes first to third organic layers 21 to 23. However, the present invention is not limited thereto. One organic film may be formed by two or less organic layers, as long as the organic film contains at least a hole transport material and a luminescent material. Alternatively, one organic film may be formed by four or more organic layers. The hole transport material and the luminescent material may be contained in different organic layers or in the same organic layer.

Another layer such as a buffer layer may be formed between the transparent electrode film 1 2 and the inorganic material film 14 and/or between the organic film 20 and the upper electrode film 25. The hole transport material is not limited to a material composed of PEDOT.

PEDOT/PSS (poly(styrenesulfonate)), PANI (polyaniline), and the like can be used.

The solvent in which the first organic compound is dispersed (i.e., the first solvent) is not limited to water. Alcohols such as methanol, ethanol, or bulanol can be used, as long as they have a higher affinity for the inorganic material film 14 than that for the transparent electrode film 12. Moreover, two or more types of the above solvent may he mixed and used.

Since alcohol is a hydrophilic solvent, the first solvent containing alcohol or water is a hydrophilic solvent. Therefore, when a hydrophilic inorganic material is used as the main component of the inorganic material film 14 and a hydrophobic conductive material is used as the main component of the transparent conductive film, the affinity of the first solvent for the inorganic material film 14 is higher than that for the transparent electrode film 12.

The first solvent used in the present invention is not]imited to alcohol and water. Other hydrophilic solvents may be used, as long as they do not chemically modify the first organic compound.

Moreover, additives such as coloring matter, dispersing agent, or buffering agent can be dispersed in the solvent together with the first organic compound such as the hole transport material.

The luminescent material used in the present invention is not specifically limited. Various luminescent materials, e.g., polyparaphenylenevinylene and its derivatives, polynaphtylenevinylene, and polyalkyithiophene, canbe used.

Various electron transport materials such as Alq (tris(8-quinolinolate) aluminum (III) complex), silole derivatives, and zinc benzothiazole complexes can be used. Moreover, the solvent in which the luminescent material or the electron transport material is dispersed (i.e., the second or third solvent) is not specifically limited. Various types of solvent such as water, xylene, ethanol, and methanol can be used. The above solvent may be used alone, or two or more types may be mixed and used. Furthermore, additives such as a dispersing agent, a buffering agent, and a coloring matter can be added to a liquid organic material obtained by dispersing the luminescent material or the electron transport material in the solvent.

The material forming the transparent electrode film 12 is not limited to ITO. Another conductive material such as zinc oxide or tin oxide can be used as the main component of the transparent electrode film 12, as long as the material has a high light-transmitting property and a conducting property.

Moreover, two or more conductive materials may be used together. ITO, zinc oxide, and tin oxide are hydrophobic conductive materials. When the aforementioned hydrophilic inorganic material film is arranged on the transparent electrode film 12 containing the hydrophobic conductive material as its main component, an organic material containing hydrophilic solvent can be applied onto the inorganic material film 14 without being repelled.

The conductive material for the upper electrode film 25 is not specifically limited. Various conductive materials such as a magnesium alloy, an aluminum alloy, and metallic calcium can be used. The method for depositing the upper electrode film is not limited to vacuum deposition. Other deposition methods such as ion-plating, ionized evaporation, and sputtering can be used.

The resin material forming the barrier rib film 15 is not limited to polyimide resin. Other resin materials such as epoxy resin may he used.

Moreover, the material forming the barrier rib film 15 is not limited to a resin material. Instead, an inorganic material such as silicon can be used. It is preferable to use an insulating material for the barrier rib film 15.

Furtheniiore, two or more types of insulating layers each composed of an insulating material may be stacked so as to fonri a single barrier rib film.

In the above description, a case is described in which a plurality of transparent electrode films 12 and a plurality of upper electrode films 25 are formed. However, the present invention is not limited thereto. One of the transparent electrode film 12 and the upper electrode film 25 may be deposited over a large area, and the other may be divided into a plurality of parts. In this case, when electric means capable of individually applying a voltage to each of divided parts of the electrode film, such as a transistor, is provided, it is possible to make only a desired organic film emit light by selecting the electrode film part to which the voltage is applied.

Claims

1. A method of manufacturing an organic EL device, the device including: a transparent electrode film that is arranged on a transparent substrate and is patterned in a predetermined shape; a harrier rib film located at least on the transparent electrode film; a plurality of holes formed in the barrier rib film, the transparent electrode film being located at a bottom of each of the holes; an organic film arranged in each of the holes; and an upper electrode film arranged at least on the organic film, wherein the organic film emits light when a voltage is applied across the transparent electrode film and the upper electrode film, the method comprising the steps of: arranging the barrier rib film on the transparent electrode film; forming an inorganic material film on the transparent electrode film that is exposed at the bottom of each of the holes included in the barrier rib film; and then arranging a liquid organic material that contains a solvent having a higher affinity for the inorganic material film than for the transparent electrode film on a surface of the inorganic material film to form the organic fi Im.

2. The method of manufacturing an organic EL device according to claim I, wherein the organic material is arranged on the surface of the inorganic material film by ejecting liquid droplets of the organic material to the holes.

3. The method of manufacturing an organic EL device according to claim 1, wherein the organic material contains any one of or both of poly(ethylenedioxy)thiophene and polyaniline.

4. The method of manufacturing an organic EL device according to claim 1, wherein the solvent contained in the organic material is a hydrophilic solvent.

5. The method of manufacturing an organic EL device according to claim 4, wherein the hydrophilic solvent contains any one of or both of water and an alcohol.

6. The method of manufacturing an organic EL device according to claim 1, wherein the inorganic material film contains titanium oxide as a main component.

7. The method of manufacturing an organic EL device according to claim 1, wherein the inorganic material film is formed by sputtering a target containing a constituent of the inorganic material film to eject sputtered particles and making the sputtered particles adhere to a surface of the transparent electrode film located at the bottom of each of the holes.

8. An organic EL device comprising: a transparent electrode film that is arranged on a transparent substrate and is patterned in a predetermined shape; a harrier rib film located at least on the transparent electrode film; a plurality of holes formed in the barrier rib film, the transparent electrode film being located at a bottom of each of the holes; an organic film arranged in each of the holes; and an upper electrode film arranged at least on the organic film, wherein: the organic film emits light when a voltage is applied across the transparent electrode film and the upper electrode film; an inorganic material film containing titanium oxide as a main component is formed on the transparent electrode film arranged in each of the holes; and the organic film is formed on a surface of the inorganic material film.

9. The organic EL device according to claim 8, wherein the organic film contains any one of or both of poly(ethylenedioxy)thiophene and P0 lyani line.

10. The organic EL device according to claim 8, wherein the inorganic material film is hydrophilic.

11. The organic EL device according to claim 10, wherein the transparent electrode film contains a hydrophobic conductive material as a main component.

12. The organic EL device according to claim 11, wherein the hydrophobic conductive material contains one conductive material selected from the group consisting of indium tin oxide, zinc oxide, and tin oxide.

13. An organic EL device substantially as hereinbefore described with reference to Figures Ia to Id and 2a to 2d.

14. An organic EL device substantially as hereinbefore described with reference to Figure 3.

15. A method of manufacturing an organic EL device substantially as hereinbefore described with reference to Figures Ia to I d and 2a to 2d.

16. A method of manufacturing an organic EL device substantially as hereinbefore described with reference to Figure 3.