GB2418381B - Substrate showerhead arrangement - Google Patents
Substrate showerhead arrangementInfo
- Publication number
- GB2418381B GB2418381B GB0421305A GB0421305A GB2418381B GB 2418381 B GB2418381 B GB 2418381B GB 0421305 A GB0421305 A GB 0421305A GB 0421305 A GB0421305 A GB 0421305A GB 2418381 B GB2418381 B GB 2418381B
- Authority
- GB
- United Kingdom
- Prior art keywords
- substrate
- showerhead arrangement
- showerhead
- arrangement
- substrate showerhead
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
- B05B1/18—Roses; Shower heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J4/00—Feed or outlet devices; Feed or outlet control devices
- B01J4/001—Feed or outlet devices as such, e.g. feeding tubes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
- B05B1/18—Roses; Shower heads
- B05B1/185—Roses; Shower heads characterised by their outlet element; Mounting arrangements therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0421305A GB2418381B (en) | 2004-09-24 | 2004-09-24 | Substrate showerhead arrangement |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0421305A GB2418381B (en) | 2004-09-24 | 2004-09-24 | Substrate showerhead arrangement |
Publications (3)
Publication Number | Publication Date |
---|---|
GB0421305D0 GB0421305D0 (en) | 2004-10-27 |
GB2418381A GB2418381A (en) | 2006-03-29 |
GB2418381B true GB2418381B (en) | 2008-04-16 |
Family
ID=33397226
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0421305A Expired - Fee Related GB2418381B (en) | 2004-09-24 | 2004-09-24 | Substrate showerhead arrangement |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB2418381B (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004015165A1 (en) * | 2002-08-08 | 2004-02-19 | Trikon Technologies Limited | Improvements to showerheads |
-
2004
- 2004-09-24 GB GB0421305A patent/GB2418381B/en not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004015165A1 (en) * | 2002-08-08 | 2004-02-19 | Trikon Technologies Limited | Improvements to showerheads |
Also Published As
Publication number | Publication date |
---|---|
GB2418381A (en) | 2006-03-29 |
GB0421305D0 (en) | 2004-10-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
732E | Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977) |
Free format text: REGISTERED BETWEEN 20150716 AND 20150722 |
|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20200924 |