GB2418381B - Substrate showerhead arrangement - Google Patents

Substrate showerhead arrangement

Info

Publication number
GB2418381B
GB2418381B GB0421305A GB0421305A GB2418381B GB 2418381 B GB2418381 B GB 2418381B GB 0421305 A GB0421305 A GB 0421305A GB 0421305 A GB0421305 A GB 0421305A GB 2418381 B GB2418381 B GB 2418381B
Authority
GB
United Kingdom
Prior art keywords
substrate
showerhead arrangement
showerhead
arrangement
substrate showerhead
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0421305A
Other versions
GB2418381A (en
GB0421305D0 (en
Inventor
Schlottmann Ole
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Trikon Technologies Ltd
Original Assignee
Trikon Technologies Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trikon Technologies Ltd filed Critical Trikon Technologies Ltd
Priority to GB0421305A priority Critical patent/GB2418381B/en
Publication of GB0421305D0 publication Critical patent/GB0421305D0/en
Publication of GB2418381A publication Critical patent/GB2418381A/en
Application granted granted Critical
Publication of GB2418381B publication Critical patent/GB2418381B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
    • B05B1/18—Roses; Shower heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/001—Feed or outlet devices as such, e.g. feeding tubes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
    • B05B1/18—Roses; Shower heads
    • B05B1/185—Roses; Shower heads characterised by their outlet element; Mounting arrangements therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
GB0421305A 2004-09-24 2004-09-24 Substrate showerhead arrangement Expired - Fee Related GB2418381B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0421305A GB2418381B (en) 2004-09-24 2004-09-24 Substrate showerhead arrangement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0421305A GB2418381B (en) 2004-09-24 2004-09-24 Substrate showerhead arrangement

Publications (3)

Publication Number Publication Date
GB0421305D0 GB0421305D0 (en) 2004-10-27
GB2418381A GB2418381A (en) 2006-03-29
GB2418381B true GB2418381B (en) 2008-04-16

Family

ID=33397226

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0421305A Expired - Fee Related GB2418381B (en) 2004-09-24 2004-09-24 Substrate showerhead arrangement

Country Status (1)

Country Link
GB (1) GB2418381B (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004015165A1 (en) * 2002-08-08 2004-02-19 Trikon Technologies Limited Improvements to showerheads

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004015165A1 (en) * 2002-08-08 2004-02-19 Trikon Technologies Limited Improvements to showerheads

Also Published As

Publication number Publication date
GB2418381A (en) 2006-03-29
GB0421305D0 (en) 2004-10-27

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

Free format text: REGISTERED BETWEEN 20150716 AND 20150722

PCNP Patent ceased through non-payment of renewal fee

Effective date: 20200924