GB0421305D0 - Improvements to substrate processing showerheads - Google Patents

Improvements to substrate processing showerheads

Info

Publication number
GB0421305D0
GB0421305D0 GBGB0421305.4A GB0421305A GB0421305D0 GB 0421305 D0 GB0421305 D0 GB 0421305D0 GB 0421305 A GB0421305 A GB 0421305A GB 0421305 D0 GB0421305 D0 GB 0421305D0
Authority
GB
United Kingdom
Prior art keywords
substrate processing
showerheads
processing showerheads
substrate
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GBGB0421305.4A
Other versions
GB2418381A (en
GB2418381B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Trikon Technologies Ltd
Original Assignee
Trikon Technologies Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trikon Technologies Ltd filed Critical Trikon Technologies Ltd
Priority to GB0421305A priority Critical patent/GB2418381B/en
Publication of GB0421305D0 publication Critical patent/GB0421305D0/en
Publication of GB2418381A publication Critical patent/GB2418381A/en
Application granted granted Critical
Publication of GB2418381B publication Critical patent/GB2418381B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
    • B05B1/18—Roses; Shower heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/001—Feed or outlet devices as such, e.g. feeding tubes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
    • B05B1/18—Roses; Shower heads
    • B05B1/185—Roses; Shower heads characterised by their outlet element; Mounting arrangements therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
GB0421305A 2004-09-24 2004-09-24 Substrate showerhead arrangement Expired - Fee Related GB2418381B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0421305A GB2418381B (en) 2004-09-24 2004-09-24 Substrate showerhead arrangement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0421305A GB2418381B (en) 2004-09-24 2004-09-24 Substrate showerhead arrangement

Publications (3)

Publication Number Publication Date
GB0421305D0 true GB0421305D0 (en) 2004-10-27
GB2418381A GB2418381A (en) 2006-03-29
GB2418381B GB2418381B (en) 2008-04-16

Family

ID=33397226

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0421305A Expired - Fee Related GB2418381B (en) 2004-09-24 2004-09-24 Substrate showerhead arrangement

Country Status (1)

Country Link
GB (1) GB2418381B (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2003282533A1 (en) * 2002-08-08 2004-02-25 Trikon Technologies Limited Improvements to showerheads

Also Published As

Publication number Publication date
GB2418381A (en) 2006-03-29
GB2418381B (en) 2008-04-16

Similar Documents

Publication Publication Date Title
EP1933609A4 (en) Substrate structure
EP2046252A4 (en) Dressing substrate
EP1739418A4 (en) Substrate for labo-on-a-chip
AU305483S (en) Showerhead
GB2436719B (en) Improved SERRS substrate
EP1872394A4 (en) Substrate processing apparatus
EP1872392A4 (en) Substrate processing apparatus
EP1805792A4 (en) Substrate processing apparatus
HK1124877A1 (en) Badge- and bpa-free can coating
PL1943197T3 (en) Substrate processing method
GB2406583B (en) Improvements to showerheads
EP1788618A4 (en) Substrate processing method
EP1943262A4 (en) Ire-1 alpha substrates
GB0624127D0 (en) Shower arrangement
TWI316095B (en) Plated substrate
EP2106554A4 (en) Second surface metallization
GB0404299D0 (en) Improved can processing
GB2412715B (en) Improvements Relating to Pointing Devices
AU302907S (en) Showerhead
GB0421305D0 (en) Improvements to substrate processing showerheads
GB0409177D0 (en) Improved substrate
GB0508909D0 (en) Improved substrate
GB0416859D0 (en) Improved deposition process
GB0608874D0 (en) Improved substrate
GB0620595D0 (en) Substrate cover

Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

Free format text: REGISTERED BETWEEN 20150716 AND 20150722

PCNP Patent ceased through non-payment of renewal fee

Effective date: 20200924