GB2399221B - Oxide vertical cavity surface-emitting laser - Google Patents

Oxide vertical cavity surface-emitting laser

Info

Publication number
GB2399221B
GB2399221B GB0400506A GB0400506A GB2399221B GB 2399221 B GB2399221 B GB 2399221B GB 0400506 A GB0400506 A GB 0400506A GB 0400506 A GB0400506 A GB 0400506A GB 2399221 B GB2399221 B GB 2399221B
Authority
GB
United Kingdom
Prior art keywords
emitting laser
cavity surface
vertical cavity
oxide vertical
oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0400506A
Other languages
English (en)
Other versions
GB0400506D0 (en
GB2399221A (en
Inventor
Gregory N Debrabander
An-Nien Cheng
Suning Xie
Wilson H Widjaja
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of GB0400506D0 publication Critical patent/GB0400506D0/en
Publication of GB2399221A publication Critical patent/GB2399221A/en
Application granted granted Critical
Publication of GB2399221B publication Critical patent/GB2399221B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18308—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement
    • H01S5/18311—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement using selective oxidation
    • H01S5/18313—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement using selective oxidation by oxidizing at least one of the DBR layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S2301/00—Functional characteristics
    • H01S2301/17—Semiconductor lasers comprising special layers
    • H01S2301/176—Specific passivation layers on surfaces other than the emission facet

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)
GB0400506A 2003-02-06 2004-01-09 Oxide vertical cavity surface-emitting laser Expired - Fee Related GB2399221B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/361,092 US6862309B2 (en) 2003-02-06 2003-02-06 Passivation scheme for oxide vertical cavity surface-emitting laser

Publications (3)

Publication Number Publication Date
GB0400506D0 GB0400506D0 (en) 2004-02-11
GB2399221A GB2399221A (en) 2004-09-08
GB2399221B true GB2399221B (en) 2005-12-14

Family

ID=31715604

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0400506A Expired - Fee Related GB2399221B (en) 2003-02-06 2004-01-09 Oxide vertical cavity surface-emitting laser

Country Status (3)

Country Link
US (1) US6862309B2 (enExample)
JP (1) JP2004241777A (enExample)
GB (1) GB2399221B (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7011979B2 (en) * 2003-03-12 2006-03-14 Debrabander Gregory N Detecting pinholes in vertical cavity surface-emitting laser passivation
US20060013276A1 (en) * 2004-07-15 2006-01-19 Mchugo Scott A VCSEL having an air gap and protective coating
JP5165861B2 (ja) * 2006-06-26 2013-03-21 昭和電工株式会社 過弗化物の処理方法及び処理装置
US8189642B1 (en) 2007-08-08 2012-05-29 Emcore Corporation VCSEL semiconductor device
US20090041074A1 (en) * 2007-08-08 2009-02-12 Emcore Corporation Passivation of Vertical Cavity Surface Emitting Lasers
JP4609508B2 (ja) * 2007-11-20 2011-01-12 富士ゼロックス株式会社 層間絶縁膜の応力制御により信頼性を改善した表面発光型半導体レーザアレイ素子
US7957447B2 (en) 2007-11-20 2011-06-07 Fuji Xerox Co., Ltd. VCSEL array device and method for manufacturing the VCSEL array device
TWI497854B (zh) * 2009-10-08 2015-08-21 Truelight Corp 氧化侷限式面射型雷射製作方法
JP2012060061A (ja) * 2010-09-13 2012-03-22 Stanley Electric Co Ltd 半導体発光装置の製造方法及び半導体発光装置
JP5720994B2 (ja) * 2011-03-16 2015-05-20 スタンレー電気株式会社 半導体装置および半導体装置の製造方法
GB2494008A (en) * 2011-08-23 2013-02-27 Oclaro Technology Ltd semiconductor laser device and a method for manufacturing a semiconductor laser device
JP2015126077A (ja) * 2013-12-26 2015-07-06 豊田合成株式会社 発光部品および発光装置とこれらの製造方法
US11581705B2 (en) 2019-04-08 2023-02-14 Lumentum Operations Llc Vertical-cavity surface-emitting laser with dense epi-side contacts
CN111313236B (zh) * 2020-05-11 2020-10-16 北京金太光芯科技有限公司 具有复合钝化层的垂直腔表面发射激光器和其制作方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020003822A1 (en) * 2000-05-26 2002-01-10 Torsten Wipiejewski Vertical cavity surface emitting laser diode and method for manufacturing same
WO2002019484A2 (en) * 2000-08-31 2002-03-07 Honeywell International Inc. Protective side wall passivation for vcsel chips
EP1217702A2 (en) * 2000-12-19 2002-06-26 Samsung Electronics Co., Ltd. Semiconductor light-emitting device with improved electro-optical characteristics and method of manufacturing the same
JP2002208755A (ja) * 2000-11-13 2002-07-26 Fuji Xerox Co Ltd 面発光型半導体レーザ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW347149U (en) * 1993-02-26 1998-12-01 Dow Corning Integrated circuits protected from the environment by ceramic and barrier metal layers
US5719893A (en) * 1996-07-17 1998-02-17 Motorola, Inc. Passivated vertical cavity surface emitting laser
US6107188A (en) * 1999-08-16 2000-08-22 Taiwan Semiconductor Manufacturing Company Passivation method for copper process
US6589805B2 (en) * 2001-03-26 2003-07-08 Gazillion Bits, Inc. Current confinement structure for vertical cavity surface emitting laser
US6680964B2 (en) * 2001-12-07 2004-01-20 Agilent Technologies, Inc. Moisture passivated planar index-guided VCSEL

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020003822A1 (en) * 2000-05-26 2002-01-10 Torsten Wipiejewski Vertical cavity surface emitting laser diode and method for manufacturing same
WO2002019484A2 (en) * 2000-08-31 2002-03-07 Honeywell International Inc. Protective side wall passivation for vcsel chips
JP2002208755A (ja) * 2000-11-13 2002-07-26 Fuji Xerox Co Ltd 面発光型半導体レーザ
EP1217702A2 (en) * 2000-12-19 2002-06-26 Samsung Electronics Co., Ltd. Semiconductor light-emitting device with improved electro-optical characteristics and method of manufacturing the same

Also Published As

Publication number Publication date
US6862309B2 (en) 2005-03-01
GB0400506D0 (en) 2004-02-11
GB2399221A (en) 2004-09-08
US20040156410A1 (en) 2004-08-12
JP2004241777A (ja) 2004-08-26

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

Free format text: REGISTERED BETWEEN 20130725 AND 20130731

PCNP Patent ceased through non-payment of renewal fee

Effective date: 20140109