GB2386962B - Method for manufacturing a thin film assembly - Google Patents

Method for manufacturing a thin film assembly

Info

Publication number
GB2386962B
GB2386962B GB0305042A GB0305042A GB2386962B GB 2386962 B GB2386962 B GB 2386962B GB 0305042 A GB0305042 A GB 0305042A GB 0305042 A GB0305042 A GB 0305042A GB 2386962 B GB2386962 B GB 2386962B
Authority
GB
United Kingdom
Prior art keywords
manufacturing
thin film
film assembly
assembly
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0305042A
Other languages
English (en)
Other versions
GB2386962A (en
GB0305042D0 (en
Inventor
Peter Schmollngruber
Ingo Herrmann
Henrik Siegle
Paul Farber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of GB0305042D0 publication Critical patent/GB0305042D0/en
Publication of GB2386962A publication Critical patent/GB2386962A/en
Application granted granted Critical
Publication of GB2386962B publication Critical patent/GB2386962B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Magnetic Variables (AREA)
GB0305042A 2002-03-28 2003-03-05 Method for manufacturing a thin film assembly Expired - Fee Related GB2386962B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2002113940 DE10213940A1 (de) 2002-03-28 2002-03-28 Verfahren zur Herstellung einer auf einem Substrat aufgebauten Dünnschichtanordnung, insbesondere Sensoranordnung sowie eine Dünnschichtanordnung

Publications (3)

Publication Number Publication Date
GB0305042D0 GB0305042D0 (en) 2003-04-09
GB2386962A GB2386962A (en) 2003-10-01
GB2386962B true GB2386962B (en) 2004-07-21

Family

ID=7714239

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0305042A Expired - Fee Related GB2386962B (en) 2002-03-28 2003-03-05 Method for manufacturing a thin film assembly

Country Status (3)

Country Link
DE (1) DE10213940A1 (de)
FR (1) FR2837984B1 (de)
GB (1) GB2386962B (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2036746B1 (de) * 2007-09-17 2014-07-23 S & T Daewoo Co., Ltd. Sensormodul mit Beschleunigungssensor und Versetzungssensor, Dämpfer und elektronisch steuerbares Aufhängungssystem damit sowie Verfahren zur Steuerung von Fahrzeugbewegungen damit

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4462881A (en) * 1980-11-27 1984-07-31 Hitachi, Ltd. Method of forming a multilayer thin film
US20020039264A1 (en) * 2000-08-31 2002-04-04 Kabushiki Kaisha Toshiba Yoke type magnetic head and magnetic disk unit

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1197776B (it) * 1986-07-15 1988-12-06 Gte Telecom Spa Processo per l'ottenimento di circuiti passivi a strato sottile con linee resistive a differenti resistenze di strato e circuito passivo realizzato con il processo suddetto
DE19507303A1 (de) * 1995-03-02 1996-09-05 Siemens Ag Sensoreinrichtung mit einer Brückenschaltung von magnetoresistiven Sensorelementen

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4462881A (en) * 1980-11-27 1984-07-31 Hitachi, Ltd. Method of forming a multilayer thin film
US20020039264A1 (en) * 2000-08-31 2002-04-04 Kabushiki Kaisha Toshiba Yoke type magnetic head and magnetic disk unit

Also Published As

Publication number Publication date
GB2386962A (en) 2003-10-01
FR2837984B1 (fr) 2005-09-16
DE10213940A1 (de) 2003-10-30
GB0305042D0 (en) 2003-04-09
FR2837984A1 (fr) 2003-10-03

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20080305