GB2367146B - Method of fabricating a semiconductor device - Google Patents

Method of fabricating a semiconductor device

Info

Publication number
GB2367146B
GB2367146B GB0128504A GB0128504A GB2367146B GB 2367146 B GB2367146 B GB 2367146B GB 0128504 A GB0128504 A GB 0128504A GB 0128504 A GB0128504 A GB 0128504A GB 2367146 B GB2367146 B GB 2367146B
Authority
GB
United Kingdom
Prior art keywords
fabricating
semiconductor device
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0128504A
Other versions
GB2367146A (en
GB0128504D0 (en
Inventor
Masashi Fujimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP19676699A external-priority patent/JP3371852B2/en
Application filed by NEC Corp filed Critical NEC Corp
Publication of GB0128504D0 publication Critical patent/GB0128504D0/en
Publication of GB2367146A publication Critical patent/GB2367146A/en
Application granted granted Critical
Publication of GB2367146B publication Critical patent/GB2367146B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7073—Alignment marks and their environment
    • G03F9/7076—Mark details, e.g. phase grating mark, temporary mark

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
GB0128504A 1999-07-09 2000-07-10 Method of fabricating a semiconductor device Expired - Fee Related GB2367146B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP19676699A JP3371852B2 (en) 1999-07-09 1999-07-09 Reticle
GB0016949A GB2358714B (en) 1999-07-09 2000-07-10 Reticle

Publications (3)

Publication Number Publication Date
GB0128504D0 GB0128504D0 (en) 2002-01-23
GB2367146A GB2367146A (en) 2002-03-27
GB2367146B true GB2367146B (en) 2002-10-02

Family

ID=26244631

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0128504A Expired - Fee Related GB2367146B (en) 1999-07-09 2000-07-10 Method of fabricating a semiconductor device

Country Status (1)

Country Link
GB (1) GB2367146B (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01312994A (en) * 1988-06-09 1989-12-18 Kao Corp Antimycotic substance yi-hu1 and production thereof

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01312994A (en) * 1988-06-09 1989-12-18 Kao Corp Antimycotic substance yi-hu1 and production thereof

Also Published As

Publication number Publication date
GB2367146A (en) 2002-03-27
GB0128504D0 (en) 2002-01-23

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20090710