GB2327513B - Power control apparatus for an ion source having an indirectly heated cathode - Google Patents

Power control apparatus for an ion source having an indirectly heated cathode

Info

Publication number
GB2327513B
GB2327513B GB9714990A GB9714990A GB2327513B GB 2327513 B GB2327513 B GB 2327513B GB 9714990 A GB9714990 A GB 9714990A GB 9714990 A GB9714990 A GB 9714990A GB 2327513 B GB2327513 B GB 2327513B
Authority
GB
United Kingdom
Prior art keywords
control apparatus
power control
ion source
indirectly heated
heated cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9714990A
Other languages
English (en)
Other versions
GB9714990D0 (en
GB2327513A (en
Inventor
Stephen Wells
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to GB9714990A priority Critical patent/GB2327513B/en
Publication of GB9714990D0 publication Critical patent/GB9714990D0/en
Priority to PCT/GB1998/002075 priority patent/WO1999004409A1/fr
Priority to JP2000503540A priority patent/JP4054525B2/ja
Priority to EP98933797A priority patent/EP0995215A1/fr
Publication of GB2327513A publication Critical patent/GB2327513A/en
Application granted granted Critical
Publication of GB2327513B publication Critical patent/GB2327513B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Plasma Technology (AREA)
GB9714990A 1997-07-16 1997-07-16 Power control apparatus for an ion source having an indirectly heated cathode Expired - Fee Related GB2327513B (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB9714990A GB2327513B (en) 1997-07-16 1997-07-16 Power control apparatus for an ion source having an indirectly heated cathode
PCT/GB1998/002075 WO1999004409A1 (fr) 1997-07-16 1998-07-14 Appareil de commande de puissance pour source d'ions possedant une cathode rechauffee indirectement
JP2000503540A JP4054525B2 (ja) 1997-07-16 1998-07-14 間接加熱される陰極を有するイオン源の出力制御装置
EP98933797A EP0995215A1 (fr) 1997-07-16 1998-07-14 Appareil de commande de puissance pour source d'ions possedant une cathode rechauffee indirectement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9714990A GB2327513B (en) 1997-07-16 1997-07-16 Power control apparatus for an ion source having an indirectly heated cathode

Publications (3)

Publication Number Publication Date
GB9714990D0 GB9714990D0 (en) 1997-09-24
GB2327513A GB2327513A (en) 1999-01-27
GB2327513B true GB2327513B (en) 2001-10-24

Family

ID=10815952

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9714990A Expired - Fee Related GB2327513B (en) 1997-07-16 1997-07-16 Power control apparatus for an ion source having an indirectly heated cathode

Country Status (4)

Country Link
EP (1) EP0995215A1 (fr)
JP (1) JP4054525B2 (fr)
GB (1) GB2327513B (fr)
WO (1) WO1999004409A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7276847B2 (en) 2000-05-17 2007-10-02 Varian Semiconductor Equipment Associates, Inc. Cathode assembly for indirectly heated cathode ion source
US6777686B2 (en) * 2000-05-17 2004-08-17 Varian Semiconductor Equipment Associates, Inc. Control system for indirectly heated cathode ion source
US7138768B2 (en) 2002-05-23 2006-11-21 Varian Semiconductor Equipment Associates, Inc. Indirectly heated cathode ion source

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0215626A2 (fr) * 1985-09-09 1987-03-25 Applied Materials, Inc. Dispositifs et procédés de contrôle de la source d'ions dans les implanteurs ioniques
US5097179A (en) * 1990-01-30 1992-03-17 Tokyo Electron Limited Ion generating apparatus
US5497006A (en) * 1994-11-15 1996-03-05 Eaton Corporation Ion generating source for use in an ion implanter
JPH08106872A (ja) * 1994-10-05 1996-04-23 Nissin Electric Co Ltd イオン源

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2325786C2 (de) * 1973-05-22 1983-10-06 Leybold-Heraeus Gmbh, 5000 Koeln Schaltung zur Regelung der Betriebsparameter eines Elektronenstrahlerzeugers
US4506160A (en) * 1982-05-24 1985-03-19 Tokyo Shibaura Denki Kabushiki Kaisha Ion source apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0215626A2 (fr) * 1985-09-09 1987-03-25 Applied Materials, Inc. Dispositifs et procédés de contrôle de la source d'ions dans les implanteurs ioniques
US5097179A (en) * 1990-01-30 1992-03-17 Tokyo Electron Limited Ion generating apparatus
JPH08106872A (ja) * 1994-10-05 1996-04-23 Nissin Electric Co Ltd イオン源
US5497006A (en) * 1994-11-15 1996-03-05 Eaton Corporation Ion generating source for use in an ion implanter

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
WPI Abstract Accession No 96-257020 26 & JP 08 106 872 A *

Also Published As

Publication number Publication date
WO1999004409A1 (fr) 1999-01-28
EP0995215A1 (fr) 2000-04-26
JP4054525B2 (ja) 2008-02-27
GB9714990D0 (en) 1997-09-24
JP2001510928A (ja) 2001-08-07
GB2327513A (en) 1999-01-27

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20090716