GB2325342B - Method of crystallizing amorphous silicon layer and method of fabricating a thin film transistor - Google Patents

Method of crystallizing amorphous silicon layer and method of fabricating a thin film transistor

Info

Publication number
GB2325342B
GB2325342B GB9808250A GB9808250A GB2325342B GB 2325342 B GB2325342 B GB 2325342B GB 9808250 A GB9808250 A GB 9808250A GB 9808250 A GB9808250 A GB 9808250A GB 2325342 B GB2325342 B GB 2325342B
Authority
GB
United Kingdom
Prior art keywords
fabricating
thin film
film transistor
silicon layer
amorphous silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
GB9808250A
Other versions
GB9808250D0 (en
GB2325342A (en
Inventor
Dae-Gyu Moon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LG Electronics Inc
LG Display Co Ltd
Original Assignee
LG Electronics Inc
LG Philips LCD Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LG Electronics Inc, LG Philips LCD Co Ltd filed Critical LG Electronics Inc
Publication of GB9808250D0 publication Critical patent/GB9808250D0/en
Publication of GB2325342A publication Critical patent/GB2325342A/en
Application granted granted Critical
Publication of GB2325342B publication Critical patent/GB2325342B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02436—Intermediate layers between substrates and deposited layers
    • H01L21/02439—Materials
    • H01L21/02488—Insulating materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02422—Non-crystalline insulating materials, e.g. glass, polymers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02524—Group 14 semiconducting materials
    • H01L21/02532—Silicon, silicon germanium, germanium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02587—Structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02587—Structure
    • H01L21/0259—Microstructure
    • H01L21/02595—Microstructure polycrystalline
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02656—Special treatments
    • H01L21/02664—Aftertreatments
    • H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
    • H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
    • H01L29/66742—Thin film unipolar transistors
    • H01L29/6675—Amorphous silicon or polysilicon transistors
    • H01L29/66757—Lateral single gate single channel transistors with non-inverted structure, i.e. the channel layer is formed before the gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78696—Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the structure of the channel, e.g. multichannel, transverse or longitudinal shape, length or width, doping structure, or the overlap or alignment between the channel and the gate, the source or the drain, or the contacting structure of the channel
GB9808250A 1997-05-12 1998-04-17 Method of crystallizing amorphous silicon layer and method of fabricating a thin film transistor Expired - Lifetime GB2325342B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019970018243A KR100234894B1 (en) 1997-05-12 1997-05-12 Crystalizing method of amorphous silicon layer and method of fabricating thin film transistor using the same

Publications (3)

Publication Number Publication Date
GB9808250D0 GB9808250D0 (en) 1998-06-17
GB2325342A GB2325342A (en) 1998-11-18
GB2325342B true GB2325342B (en) 2000-03-01

Family

ID=19505571

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9808250A Expired - Lifetime GB2325342B (en) 1997-05-12 1998-04-17 Method of crystallizing amorphous silicon layer and method of fabricating a thin film transistor

Country Status (5)

Country Link
JP (1) JP4203141B2 (en)
KR (1) KR100234894B1 (en)
DE (1) DE19820441A1 (en)
FR (1) FR2766613B1 (en)
GB (1) GB2325342B (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19802131B4 (en) * 1998-01-21 2007-03-15 Robert Bosch Gmbh Process for producing a monocrystalline layer of a conductive or semiconductive material
SE514645C2 (en) 1998-10-06 2001-03-26 Perstorp Flooring Ab Floor covering material comprising disc-shaped floor elements intended to be joined by separate joint profiles
DE29911462U1 (en) 1999-07-02 1999-11-18 Akzenta Paneele & Profile Gmbh Fastening system for panels
SE518184C2 (en) 2000-03-31 2002-09-03 Perstorp Flooring Ab Floor covering material comprising disc-shaped floor elements which are joined together by means of interconnecting means
KR100380141B1 (en) 2000-09-25 2003-04-11 엘지.필립스 엘시디 주식회사 array panel for liquid crystal display and fabricating method of the same
KR100486676B1 (en) * 2002-10-04 2005-05-03 엘지.필립스 엘시디 주식회사 Phase Shift Laser Mask and sequential lateral solidification Crystallization Method using by the same
WO2005001921A1 (en) * 2003-06-27 2005-01-06 Nec Corporation Thin film transistor, thin film transistor substrate, electronic apparatus and process for producing polycrystalline semiconductor thin film
KR101116093B1 (en) 2009-06-26 2012-02-21 가시오게산키 가부시키가이샤 Semiconductor device and fabrication method thereof and display device
JP4973698B2 (en) * 2009-06-30 2012-07-11 カシオ計算機株式会社 THIN FILM TRANSISTOR AND METHOD FOR PRODUCING THIN FILM TRANSISTOR
DE102010004717A1 (en) 2010-01-15 2011-07-21 Pergo (Europe) Ab Set of panels comprising retaining profiles with a separate clip and method for introducing the clip
CA2906474C (en) 2010-05-10 2018-12-18 Pergo (Europe) Ab Set of panels
CN103325688A (en) * 2013-06-17 2013-09-25 深圳市华星光电技术有限公司 Method for forming channel of thin film transistor and compensating circuit

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS575327A (en) * 1980-06-13 1982-01-12 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS577117A (en) * 1980-06-17 1982-01-14 Fujitsu Ltd Manufacture of semiconductor device
JPS5724536A (en) * 1980-07-18 1982-02-09 Matsushita Electric Ind Co Ltd Preparation of semiconductor device
JPS57157519A (en) * 1981-03-23 1982-09-29 Fujitsu Ltd Manufacture of semiconductor device
JPS5892209A (en) * 1981-11-27 1983-06-01 Fujitsu Ltd Manufacture of semiconductor device
JPH0799321A (en) * 1993-05-27 1995-04-11 Sony Corp Method and device for manufacturing thin-film semiconductor element

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5166087A (en) * 1991-01-16 1992-11-24 Sharp Kabushiki Kaisha Method of fabricating semiconductor element having lightly doped drain (ldd) without using sidewalls
JPH06302824A (en) * 1993-02-16 1994-10-28 Sanyo Electric Co Ltd Thin-film transistor and its manufacture
JPH07335906A (en) * 1994-06-14 1995-12-22 Semiconductor Energy Lab Co Ltd Thin film semiconductor device and fabrication thereof

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS575327A (en) * 1980-06-13 1982-01-12 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS577117A (en) * 1980-06-17 1982-01-14 Fujitsu Ltd Manufacture of semiconductor device
JPS5724536A (en) * 1980-07-18 1982-02-09 Matsushita Electric Ind Co Ltd Preparation of semiconductor device
JPS57157519A (en) * 1981-03-23 1982-09-29 Fujitsu Ltd Manufacture of semiconductor device
JPS5892209A (en) * 1981-11-27 1983-06-01 Fujitsu Ltd Manufacture of semiconductor device
JPH0799321A (en) * 1993-05-27 1995-04-11 Sony Corp Method and device for manufacturing thin-film semiconductor element
US5648276A (en) * 1993-05-27 1997-07-15 Sony Corporation Method and apparatus for fabricating a thin film semiconductor device

Also Published As

Publication number Publication date
JP4203141B2 (en) 2008-12-24
FR2766613B1 (en) 2003-01-17
DE19820441A1 (en) 1998-11-19
KR19980083097A (en) 1998-12-05
FR2766613A1 (en) 1999-01-29
JPH10321870A (en) 1998-12-04
GB9808250D0 (en) 1998-06-17
KR100234894B1 (en) 1999-12-15
GB2325342A (en) 1998-11-18

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PE20 Patent expired after termination of 20 years

Expiry date: 20180416