GB2286990A - Film removing apparatus - Google Patents

Film removing apparatus Download PDF

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Publication number
GB2286990A
GB2286990A GB9415285A GB9415285A GB2286990A GB 2286990 A GB2286990 A GB 2286990A GB 9415285 A GB9415285 A GB 9415285A GB 9415285 A GB9415285 A GB 9415285A GB 2286990 A GB2286990 A GB 2286990A
Authority
GB
United Kingdom
Prior art keywords
film
projection
substrate
roller
stuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB9415285A
Other versions
GB9415285D0 (en
Inventor
Katsuya Sangu
Atushi Oguma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Adtec Engineering Co Ltd
Original Assignee
Adtec Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Adtec Engineering Co Ltd filed Critical Adtec Engineering Co Ltd
Publication of GB9415285D0 publication Critical patent/GB9415285D0/en
Publication of GB2286990A publication Critical patent/GB2286990A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B43/00—Operations specially adapted for layered products and not otherwise provided for, e.g. repairing; Apparatus therefor
    • B32B43/006—Delaminating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C63/00—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor
    • B29C63/0004—Component parts, details or accessories; Auxiliary operations
    • B29C63/0013—Removing old coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/36—Layered products comprising a layer of synthetic resin comprising polyesters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00—Ancillary operations in connection with laminating processes
    • B32B38/10—Removing layers, or parts of layers, mechanically or chemically
    • B32B38/105—Removing layers, or parts of layers, mechanically or chemically on edges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H41/00—Machines for separating superposed webs
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/161—Coating processes; Apparatus therefor using a previously coated surface, e.g. by stamping or by transfer lamination
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2067/00—Use of polyesters or derivatives thereof, as moulding material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2367/00—Polyesters, e.g. PET, i.e. polyethylene terephthalate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00—Electrical equipment
    • B32B2457/08—PCBs, i.e. printed circuit boards

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
  • Cleaning In General (AREA)
  • Printing Methods (AREA)

Abstract

An apparatus for removing a film stuck on an object such as the cover film (F) on the surface of a photoresist dry film (R), comprises separating means and a roller having an adhesive surface. The separating means, such as knurled tools, have a claw-like projection (11) which catches a film and partially separates it from the object and a recess (12) for holding the separated film. In use, the roller having an adhesive surface gets in contact with the partially separated film for picking it up and removing it from the object. <IMAGE>

Description

Film Removing Apparatus The present invention relates to an apparatus for removing a film such as a cover film made of polyester which is formed on the surface of a photoresist dry film.
Recently, a lithography method used for IC fabrication has been applied to the formation of circuits on substrates.
In this application, a photoresist dry film is formed on a substrate.
As Fig. 8 shows, photoresists R, R are formed on both surfaces of a substrate W, and protective cover films F, F made of polyester are stuck on the photoresists.
The film F, F must be removed after a circuit pattern is printed on the photoresist R, R in an exposure step.
Accordingly, an attempt has heretofore been made to develop an apparatus for automatically removing a film of this kind with high efficiency.
When a film F is removed, photoresist R must not be damaged, and the surface of the film F should be smooth.
However, an automatic removing apparatus which meets the above-described requirements still stands desired. In a conventional technique, a film is removed by giving scratches or flaws to a film and then blowing off the film with air jet. This technique has a drawback in that tentlike breakages are generated in the photoresist R and the broken pieces tend to adhere to the substrate again.
Moreover, the conventional technique involves other drawbacks of prolonging the tact time because the removing operation must be performed under stationary conditions, which means the work line is temporarily stopped; and of increasing the size of the apparatus. Due to these drawbacks, under the present circumstances, the removing operation is performed manually in most cases.
The present invention is to solve the above-described problems of the prior art techniques, and an object of the present invention is to provide a film removing apparatus capable of removing a film simply and quickly.
Another object of the present invention is to provide a film removing apparatus capable of removing a film without damaging the object covered with the film.
To achieve the above-described objects, the present invention provides an improved film removing apparatus for removing a film stuck on an object. The film removing apparatus according to the present invention includes separating means having a projection which catches a film on an object and uplifting it from the object, and a recess which holds the uplifted film; and a roller having an adhesive surface (herein referred to as an adhesive surface), which surface comes in contact with the uplifted film, in use, for removing the film from the object.
In the use of the film removing apparatus of the present invention, part of a film is scraped and uplifted from an object by separating means. The uplifted film is then gradually removed by adhesive rollers until the whole film is cleared from the object.
Accordingly, it becomes possible to remove a film on an object with ease and at high speed. Moreover, the present invention has an effect to eliminate the fear of damaging the surface of the object covered with the film.
The novel features of the present invention are set forth in particular in the appended claims. The invention itself, however, both as to its construction and its manner of operation, will be best understood from the following description of preferred embodiments, which is accompanied by the following drawings.
Fig. 1 is a schematic plan view showing an embodiment of a film removing apparatus according to the present invention; Fig. 2 is a schematic side view of the film removing apparatus of Fig. 1 according to the present invention; Fig. 3 is a partially enlarged illustration of Fig. 2; Fig. 4A is an enlarged side view of a knurled tool used in a film removing apparatus according to the present invention; Fig. 4B is an enlarged front view of a knurled tool used in a film removing apparatus according to the present invention; Fig. 5 is an enlarged view of claw-like projections of the knurled tool shown in Figs. 4A and 4B; Fig. 6 is a schematic illustration of the operation of a knurled tool used in the present invention; Fig. 7 is a view illustrating the operation of the film removing apparatus according to the present invention; and Fig. 8 is a sectional view showing a structure of a circuit substrate W on which a photoresist dry film is formed.
Now, preferred embodiments of the present invention will be described with reference to the drawings.
Fig. 1 is a schematic plan view showing an embodiment of the present invention. A substrate W is provided with a photoresist and a film on each surface thereof. A film removing apparatus of the present invention is capable of simultaneously removing the films on both surfaces of the substrate W.
The substrate W is transported by means of a belt conveyor 5 to advance in the direction of the arrow. The opposite ends of the substrate W in the transverse direction are held vertically as sandwiched by feed rollers 3 and 3.
End-separating apparatuses 1, 1 and adhesive rollers 2, 2 are provided on the downstream side of the feed rollers 3, 3, which are disposed to hold the substrate W by sandwiching the transverse opposite ends thereof.
In this embodiment, two pairs of the end-separating apparatuses 1, 1 are disposed in such a manner that each pair sandwiches the substrate W.
As shown in Fig. 2, the end-separating apparatus 1 includes knurled tools lOa and lOb, a pilot roller 13, and elevators 15 and 15 for supporting them for advancing and retracting movement with respect to the substrate w. The elevators 15 and 15 lower the knurled tools lOa and lOb and the pilot roller 13 as needed for allowing them to get in contact with the film F of the substrate W, thereby peeling part of the film F. Sensors 16 and 17 for detecting the edge of a substrate are provided to control the timing of the advancing or retracting movement of the knurled tools 10a and 10b and the pilot roller 13 by the elevators 15 and 15.
As shown in Fig. 3, the pilot roller 13 is disposed over the substrate W for pressing it downwards. The knurled tool 10a is positioned so that the lowermost peripheral edge thereof is lower than that of the pilot roller 13 by the length substantially equivalent to the thickness of the film F for achieving a suitable contact with the film F. The knurled tool 10b, which is to be in contact with the down surface of film F, is provided on the downstream side of the knurled tool 10a in the moving direction of the substrate W.
The pilot roller 13, knurled tools lOa and 10b can be moved up and down by the elevator 15 and 15, or without the aid of the elevators for forcing themselves toward the film F by pressing means such as a spring (not shown).
The sensors 16 and 17 are provided downstream of the knurled tool 10a and 10b, respectively. The sensors 16 and 17 are movable in the direction of the transportation of the substrate W. They detect the edge of the substrate W. On the basis of the detection signal, the elevators 15 and 15 are driven retract the end-separating apparatus 1 from the substrate W. Accordingly, by changing the positions of the sensors 16 and 17, the length of the peeled portion of the film F by the knurled tools 10a and 10b can be controlled as desired.
As shown in Figs. 4A and 4B, each of the knurled tools 10 and 10b includes a disk around which sawtoothed claw-like projections 11 are formed. Recesses 12 are formed between the claw-like projections 11 and 11.
In this embodiment, when one of claw-like projections 11, 11, 11 ... is worn, the knurled tool 10 is rotated to use the adjacent claw-like projection 11, thereby capable of minimizing trouble for replacement. As shown in Fig. 5, the positions of the claw-like projections 11 are vertically shifted with each other by suitable amounts, so that only a single claw-like projection is allowed to get contact with the film F.
The mechanism for separating the film F using the knurled tool 10 will be described with reference to Fig. 6.
The claw-like projection 11 of the knurled tool 10 approaches to get contact with the edge of the film F formed on the substrate W by the elevator 15 (A). When a contact is obtained, and as the substrate W advances in the direction of the arrow, the edge of the film F is caught by the tip of the claw-like projection 11 and is partially scraped or picked up for separation, and the thus lifted portion is then received and held in the recess 12 (B, C).
As the substrate W furthermore advances, the projection 11 which is vertically movable run on to the film F, so that the film is folded (D). The folded film F prevents the photoresist R from being damaged by the claw-like projections 11. When the edge of the substrate W is detected by the sensor 16 (E), the elevator 15 is operated to retract the end-separating apparatus 1 (F).
Alternatively, the end-separating apparatus 1 may be retracted, for example, in step (C) by adjusting the position of the sensor 16. Thus, operations which meet the users' needs can be obtained.
The removing operation for the lower film F using the knurled tool 10b is performed in the same manner as described above.
As shown in Fig. 7, a peeled portion T is formed at the edge of the film F on the substrate W after it passes through the end-separating apparatus 1, so that the edge of the film F is partially separated from the substrate W.
Adhesive rollers 2 are provided downstream of the endseparating apparatus 1. In this embodiment, four rollers are provided, two for each surface of the substrate W.
The adhesive rollers 2 are aligned to the endseparating apparatus 1, and which adhere to the peeled portion T formed by the end-separating apparatus 1 for removing the film F from the photoresist R on the substrate W.
The adhesive roller 2 is provided with an adhesive agent on its surface, to pick up the film for removing from the photoresist R.
The adhesive rollers 2 and the feed rollers 3 are disposed for advancing and retracting movement with regard to the substrate W.
The operation of the film removing apparatus of the present invention will be described below.
The substrate W carried by the belt conveyor 5 is transported toward the end-separating apparatuses 1 and the adhesive rollers 2, with transverse opposite ends being held by the feed rollers 3.
When the substrate W reaches the end-separating apparatuses 1, the elevator 15 is operated to allow the knurled tool 10 to be vertically in contact with a surface of the substrate W. The claw-like projection 11 of the knurled tool 10 peels the end portion of the film F, to form the peeled portion F of the film F as shown in Fig. 7.
Next, when the edge of the substrate W reaches the position of the adhesive rollers 2, the film F is caught by the adhesive rollers 2 because of its adhesion. Since the peeled portion T is formed on the contact area between the film F and the adhesive rollers 2, the film F is peeled off from the photoresist R by the adhesiveness of the adhesive rollers 2. The removing operation proceeds from the peeled portion T, and the film F is eventually removed completely by the adhesive rollers 2 as the substrate W advances.
According to the present invention, a film F is partially peeled off from a photoresist R formed on a substrate W by the end-separating apparatuses 1 to form a peeled portion T, and subsequently the film F is entirely removed by adhesive rollers 2. These actions are continuously performed without stopping the transportation of substrate W, thereby providing an advantage of a high operational efficiency.
It is to be noted that other modifications may be made to the construction of the present invention, without departing from the spirit and scope of the appended claims.

Claims (8)

Claims:
1. An apparatus for removing a film stuck on an object, comprising: separating means having a projection which catches a film and separates it from an object, and a recess for holding the separated film; and a roller having an adhesive surface, which surface, in use, gets in contact with the separated film for picking it up and removing it from the object.
2. An apparatus according to claim 1, wherein the object is moved relative to said removing apparatus, said projection catches and separates the film which is in a relative movement; and said roller is adhered to the film which is in a relative movement for removing said film.
3. An apparatus according to claim 1 or 2, wherein said projection is vertically movable upward and downward, and said apparatus further comprising means for forcing said projection against the surface of the film, said projection being movable in the vertical directions according to the vertical displacements of the film surface.
4. An apparatus according to any one of claims 1 to 3, wherein a plurality of said projections are regularly disposed around the periphery of a disk at predetermined intervals, and said recess is defined in the space between said projections.
5. An apparatus according to any one of claims 1 to 4, further comprising driving means for driving said separating means in advancing and retracting movements with respect to the object.
6. An apparatus according to any one of claims 1 to 5, wherein said film is stuck on both surfaces of the object, one or more pairs of said separating means are disposed such that members of each pair faces a first and a second sides of the object, and one or more pairs of said adhesive rollers are disposed such that members of each pair faces a first and a second sides of the object.
7. An apparatus according to any one of claims 1 to 6, wherein the object is a circuit substrate including photoresist provided thereon and a film stuck on the photoresist.
8. An apparatus substantially described in the foregoing description and accompanying drawings.
GB9415285A 1994-03-01 1994-07-27 Film removing apparatus Withdrawn GB2286990A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP05658794A JP3353021B2 (en) 1994-03-01 1994-03-01 Film peeling device

Publications (2)

Publication Number Publication Date
GB9415285D0 GB9415285D0 (en) 1994-09-21
GB2286990A true GB2286990A (en) 1995-09-06

Family

ID=13031321

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9415285A Withdrawn GB2286990A (en) 1994-03-01 1994-07-27 Film removing apparatus

Country Status (4)

Country Link
JP (1) JP3353021B2 (en)
KR (1) KR100311777B1 (en)
GB (1) GB2286990A (en)
TW (1) TW307885B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19716875A1 (en) * 1996-04-23 1997-11-06 Fuji Heavy Ind Ltd Stripping coating film from substrate, for use with acrylic] films

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4651840B2 (en) * 2001-03-21 2011-03-16 株式会社リコー Release paper separator
JP2010150040A (en) * 2008-11-28 2010-07-08 Sharp Corp Film peeling apparatus and film peeling method
KR102128396B1 (en) * 2013-10-22 2020-07-01 삼성디스플레이 주식회사 Film peeling apparatus
CN107444725B (en) * 2017-08-07 2019-10-25 台州市黄岩康亿丰塑业有限公司 A kind of full-automatic coat peeling unit and its dyestripping method
CN117283279B (en) * 2023-11-27 2024-01-23 中电科风华信息装备股份有限公司 Light sheet diaphragm pre-stripping manipulator

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2181094A (en) * 1985-10-02 1987-04-15 Wand Tool Co Sheet stripping machine and method
EP0267844A2 (en) * 1986-11-14 1988-05-18 Claude Limon Apparatus for the continuous stripping of plastic films on a board, especially a printed circuit one
WO1992010922A1 (en) * 1990-12-04 1992-06-25 Cedal S.R.L. Machines for automatic removal of protective film from boards for making printed circuits

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6316980A (en) * 1986-07-04 1988-01-23 Fuji Photo Film Co Ltd Polishing tape
US5102491A (en) * 1988-12-09 1992-04-07 Morton International, Inc. Wet lamination process and apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2181094A (en) * 1985-10-02 1987-04-15 Wand Tool Co Sheet stripping machine and method
EP0267844A2 (en) * 1986-11-14 1988-05-18 Claude Limon Apparatus for the continuous stripping of plastic films on a board, especially a printed circuit one
WO1992010922A1 (en) * 1990-12-04 1992-06-25 Cedal S.R.L. Machines for automatic removal of protective film from boards for making printed circuits

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19716875A1 (en) * 1996-04-23 1997-11-06 Fuji Heavy Ind Ltd Stripping coating film from substrate, for use with acrylic] films
DE19716875C2 (en) * 1996-04-23 2003-04-03 Fuji Heavy Ind Ltd Process for peeling off a peelable cover sheet

Also Published As

Publication number Publication date
KR950028589A (en) 1995-10-18
JPH07239553A (en) 1995-09-12
JP3353021B2 (en) 2002-12-03
TW307885B (en) 1997-06-11
GB9415285D0 (en) 1994-09-21
KR100311777B1 (en) 2001-12-15

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WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)