GB2268802B - Electron spectroscopy apparatus - Google Patents

Electron spectroscopy apparatus

Info

Publication number
GB2268802B
GB2268802B GB9313950A GB9313950A GB2268802B GB 2268802 B GB2268802 B GB 2268802B GB 9313950 A GB9313950 A GB 9313950A GB 9313950 A GB9313950 A GB 9313950A GB 2268802 B GB2268802 B GB 2268802B
Authority
GB
United Kingdom
Prior art keywords
electron spectroscopy
spectroscopy apparatus
electron
spectroscopy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9313950A
Other languages
English (en)
Other versions
GB2268802A (en
GB9313950D0 (en
Inventor
Toshihisha Tomie
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Publication of GB9313950D0 publication Critical patent/GB9313950D0/en
Publication of GB2268802A publication Critical patent/GB2268802A/en
Application granted granted Critical
Publication of GB2268802B publication Critical patent/GB2268802B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
    • G01N23/2273—Measuring photoelectron spectrum, e.g. electron spectroscopy for chemical analysis [ESCA] or X-ray photoelectron spectroscopy [XPS]
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K7/00—Gamma- or X-ray microscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/085—Investigating materials by wave or particle radiation secondary emission photo-electron spectrum [ESCA, XPS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/20—Sources of radiation
    • G01N2223/204—Sources of radiation source created from radiated target

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
GB9313950A 1992-07-09 1993-07-06 Electron spectroscopy apparatus Expired - Fee Related GB2268802B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4205954A JP2764505B2 (ja) 1992-07-09 1992-07-09 電子分光方法とこれを用いた電子分光装置

Publications (3)

Publication Number Publication Date
GB9313950D0 GB9313950D0 (en) 1993-08-18
GB2268802A GB2268802A (en) 1994-01-19
GB2268802B true GB2268802B (en) 1995-12-20

Family

ID=16515457

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9313950A Expired - Fee Related GB2268802B (en) 1992-07-09 1993-07-06 Electron spectroscopy apparatus

Country Status (3)

Country Link
JP (1) JP2764505B2 (ja)
DE (1) DE4322852C2 (ja)
GB (1) GB2268802B (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2752101B1 (fr) * 1996-07-30 1998-10-09 Commissariat Energie Atomique Dispositif de generation d'impulsions ultra-courtes de rayonnement x
DE19924204A1 (de) * 1999-05-27 2000-11-30 Geesthacht Gkss Forschung Einrichtung und Verfahren zur Erzeugung von Röntgenstrahlen
EP2557416A3 (en) * 2002-04-17 2013-02-27 Ebara Corporation Sample surface inspection apparatus and method
JP5110812B2 (ja) * 2006-07-14 2012-12-26 日本電子株式会社 オージェ電子分光による化学状態分析法及び装置
CN106198581B (zh) * 2016-08-30 2023-04-07 中国工程物理研究院激光聚变研究中心 一种基于激光驱动固体靶的超短x射线双角度双色背光照相系统

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4435828A (en) * 1982-04-14 1984-03-06 Battelle Development Corporation Fluorescence laser EXAFS
JPH0225737A (ja) * 1988-07-15 1990-01-29 Hitachi Ltd 表面分析方法および装置
JPH0718960B2 (ja) * 1989-08-25 1995-03-06 株式会社島津製作所 Ｘ線顕微鏡
JP3152455B2 (ja) * 1991-08-02 2001-04-03 浜松ホトニクス株式会社 荷電粒子のエネルギー分布測定装置

Also Published As

Publication number Publication date
JPH0627058A (ja) 1994-02-04
DE4322852C2 (de) 1999-10-14
JP2764505B2 (ja) 1998-06-11
GB2268802A (en) 1994-01-19
GB9313950D0 (en) 1993-08-18
DE4322852A1 (de) 1994-01-13

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20110706