GB2260282B - Three-dimensional silicon structure - Google Patents

Three-dimensional silicon structure

Info

Publication number
GB2260282B
GB2260282B GB9221282A GB9221282A GB2260282B GB 2260282 B GB2260282 B GB 2260282B GB 9221282 A GB9221282 A GB 9221282A GB 9221282 A GB9221282 A GB 9221282A GB 2260282 B GB2260282 B GB 2260282B
Authority
GB
United Kingdom
Prior art keywords
silicon structure
dimensional silicon
dimensional
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9221282A
Other versions
GB9221282D0 (en
GB2260282A (en
Inventor
Udo Jauernig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of GB9221282D0 publication Critical patent/GB9221282D0/en
Publication of GB2260282A publication Critical patent/GB2260282A/en
Application granted granted Critical
Publication of GB2260282B publication Critical patent/GB2260282B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
    • F02M61/16—Details not provided for in, or of interest apart from, the apparatus of groups F02M61/02 - F02M61/14
    • F02M61/166—Selection of particular materials
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
    • F02M61/16—Details not provided for in, or of interest apart from, the apparatus of groups F02M61/02 - F02M61/14
    • F02M61/168—Assembling; Disassembling; Manufacturing; Adjusting

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Micromachines (AREA)
GB9221282A 1991-10-12 1992-10-09 Three-dimensional silicon structure Expired - Fee Related GB2260282B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4133885A DE4133885C2 (en) 1991-10-12 1991-10-12 Three-dimensional silicon structure

Publications (3)

Publication Number Publication Date
GB9221282D0 GB9221282D0 (en) 1992-11-25
GB2260282A GB2260282A (en) 1993-04-14
GB2260282B true GB2260282B (en) 1995-04-26

Family

ID=6442595

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9221282A Expired - Fee Related GB2260282B (en) 1991-10-12 1992-10-09 Three-dimensional silicon structure

Country Status (3)

Country Link
JP (1) JPH05293965A (en)
DE (1) DE4133885C2 (en)
GB (1) GB2260282B (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6579452B1 (en) 1998-09-17 2003-06-17 Advion Biosciences, Inc. Integrated monolithic microfabricated electrospray and liquid chromatography system and method
US6596988B2 (en) 2000-01-18 2003-07-22 Advion Biosciences, Inc. Separation media, multiple electrospray nozzle system and method
US6627882B2 (en) 1999-12-30 2003-09-30 Advion Biosciences, Inc. Multiple electrospray device, systems and methods
US6633031B1 (en) 1999-03-02 2003-10-14 Advion Biosciences, Inc. Integrated monolithic microfabricated dispensing nozzle and liquid chromatography-electrospray system and method

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5872010A (en) * 1995-07-21 1999-02-16 Northeastern University Microscale fluid handling system
US6245227B1 (en) 1998-09-17 2001-06-12 Kionix, Inc. Integrated monolithic microfabricated electrospray and liquid chromatography system and method
IT1303195B1 (en) * 1998-12-02 2000-10-30 Giuliano Cozzari FUEL INJECTOR DEVICE FOR INTERNAL COMBUSTION ENGINES AND RELATED INJECTION METHOD.
DE10049517B4 (en) * 2000-10-06 2005-05-12 Robert Bosch Gmbh Fuel injector
DE10154601B4 (en) * 2000-11-13 2007-02-22 Agilent Technologies, Inc. (n.d.Ges.d.Staates Delaware), Palo Alto A micro device with an integrated protruding electrospray emitter and a method of fabricating the micro device
NL1024033C2 (en) * 2003-08-04 2005-02-07 Univ Delft Tech Method for manufacturing nano channels and nano channels manufactured therewith.
EP2271788A2 (en) * 2008-03-26 2011-01-12 GT Solar Incorporated Systems and methods for distributing gas in a chemical vapor deposition reactor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0413023A1 (en) * 1989-02-24 1991-02-20 Interuniversitair Microelektronica Centrum Vzw A method and an apparatus for disposing epitaxial silicon and silicides
US5006202A (en) * 1990-06-04 1991-04-09 Xerox Corporation Fabricating method for silicon devices using a two step silicon etching process

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07111940B2 (en) * 1987-09-11 1995-11-29 日産自動車株式会社 Method for joining semiconductor substrates

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0413023A1 (en) * 1989-02-24 1991-02-20 Interuniversitair Microelektronica Centrum Vzw A method and an apparatus for disposing epitaxial silicon and silicides
US5006202A (en) * 1990-06-04 1991-04-09 Xerox Corporation Fabricating method for silicon devices using a two step silicon etching process

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6579452B1 (en) 1998-09-17 2003-06-17 Advion Biosciences, Inc. Integrated monolithic microfabricated electrospray and liquid chromatography system and method
US6790354B1 (en) 1998-09-17 2004-09-14 Advion Biosciences, Inc. Integrated monolithic microfabricated electrospray and liquid chromatography system and method
US6633031B1 (en) 1999-03-02 2003-10-14 Advion Biosciences, Inc. Integrated monolithic microfabricated dispensing nozzle and liquid chromatography-electrospray system and method
US6768107B2 (en) 1999-03-02 2004-07-27 Advion Biosciences, Inc. Integrated monolithic microfabricated dispensing nozzle and liquid chromatography-electrospray system and method
US6787766B2 (en) 1999-03-02 2004-09-07 Advion Biosciences, Inc. Integrated monolithic microfabricated dispensing nozzle and liquid chromatography-electrospray system and method
US6822231B2 (en) 1999-03-02 2004-11-23 Advion Biosciences, Inc. Integrated monolithic microfabricated dispensing nozzle and liquid chromatography-electrospray system and method
US6627882B2 (en) 1999-12-30 2003-09-30 Advion Biosciences, Inc. Multiple electrospray device, systems and methods
US6723985B2 (en) 1999-12-30 2004-04-20 Advion Biosciences, Inc. Multiple electrospray device, systems and methods
US6596988B2 (en) 2000-01-18 2003-07-22 Advion Biosciences, Inc. Separation media, multiple electrospray nozzle system and method

Also Published As

Publication number Publication date
DE4133885C2 (en) 1996-03-21
GB9221282D0 (en) 1992-11-25
GB2260282A (en) 1993-04-14
DE4133885A1 (en) 1993-04-15
JPH05293965A (en) 1993-11-09

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19991009