GB2233524A - Whole-wafer superconducting tunnel junctions - Google Patents

Whole-wafer superconducting tunnel junctions

Info

Publication number
GB2233524A
GB2233524A GB9018944A GB9018944A GB2233524A GB 2233524 A GB2233524 A GB 2233524A GB 9018944 A GB9018944 A GB 9018944A GB 9018944 A GB9018944 A GB 9018944A GB 2233524 A GB2233524 A GB 2233524A
Authority
GB
United Kingdom
Prior art keywords
junction
wafer
whole
superconducting tunnel
tunnel junctions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB9018944A
Other versions
GB9018944D0 (en
GB2233524B (en
Inventor
Mark Giffard Blamire
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CAMBRIDGE ADVANCED MATERIALS
Original Assignee
CAMBRIDGE ADVANCED MATERIALS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CAMBRIDGE ADVANCED MATERIALS filed Critical CAMBRIDGE ADVANCED MATERIALS
Priority to GB9018944A priority Critical patent/GB2233524B/en
Publication of GB9018944D0 publication Critical patent/GB9018944D0/en
Publication of GB2233524A publication Critical patent/GB2233524A/en
Application granted granted Critical
Publication of GB2233524B publication Critical patent/GB2233524B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0156—Manufacture or treatment of devices comprising Nb or an alloy of Nb with one or more of the elements of group 4, e.g. Ti, Zr, Hf
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices

Abstract

A method of fabricating a superconducting tunnel junction in which a single resist mark simultaneously defines the area of the counterelectrode and the junction itself, which is achieved by locating the junction at least one edge of a base electrode which has previously been insulated. Further patterning of the completed device is envisaged so as to reduce the area of the junction. The superconducting layers may be formed from niobium or niobium nitrate and the barrier layer from aluminium or tantalum. The etching may be performed by means of a chloride plasma capable of etching both the superconductor material and the barrier material.
GB9018944A 1988-02-27 1989-02-24 Whole-wafer superconducting tunnel junctions Expired - Fee Related GB2233524B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB9018944A GB2233524B (en) 1988-02-27 1989-02-24 Whole-wafer superconducting tunnel junctions

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB888804668A GB8804668D0 (en) 1988-02-27 1988-02-27 Whole-wafer superconducting tunnel junctions
GB9018944A GB2233524B (en) 1988-02-27 1989-02-24 Whole-wafer superconducting tunnel junctions
PCT/GB1989/000193 WO1989008334A1 (en) 1988-02-27 1989-02-24 Whole-wafer superconducting tunnel junctions

Publications (3)

Publication Number Publication Date
GB9018944D0 GB9018944D0 (en) 1990-10-24
GB2233524A true GB2233524A (en) 1991-01-09
GB2233524B GB2233524B (en) 1992-02-12

Family

ID=10632530

Family Applications (2)

Application Number Title Priority Date Filing Date
GB888804668A Pending GB8804668D0 (en) 1988-02-27 1988-02-27 Whole-wafer superconducting tunnel junctions
GB9018944A Expired - Fee Related GB2233524B (en) 1988-02-27 1989-02-24 Whole-wafer superconducting tunnel junctions

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB888804668A Pending GB8804668D0 (en) 1988-02-27 1988-02-27 Whole-wafer superconducting tunnel junctions

Country Status (2)

Country Link
GB (2) GB8804668D0 (en)
WO (1) WO1989008334A1 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0181457A2 (en) * 1984-10-01 1986-05-21 International Business Machines Corporation Method for making contacts to integrated circuits

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0181457A2 (en) * 1984-10-01 1986-05-21 International Business Machines Corporation Method for making contacts to integrated circuits

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
Applied Phys *
IBM Technica *
IEEE Transac *
The Transact *

Also Published As

Publication number Publication date
WO1989008334A1 (en) 1989-09-08
GB9018944D0 (en) 1990-10-24
GB8804668D0 (en) 1988-03-30
GB2233524B (en) 1992-02-12

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19940224