GB2203534B - Apparatus for assessing the linearity of a diffraction grating under certification - Google Patents

Apparatus for assessing the linearity of a diffraction grating under certification

Info

Publication number
GB2203534B
GB2203534B GB8708620A GB8708620A GB2203534B GB 2203534 B GB2203534 B GB 2203534B GB 8708620 A GB8708620 A GB 8708620A GB 8708620 A GB8708620 A GB 8708620A GB 2203534 B GB2203534 B GB 2203534B
Authority
GB
United Kingdom
Prior art keywords
linearity
assessing
diffraction grating
grating under
under certification
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB8708620A
Other languages
English (en)
Other versions
GB8708620D0 (en
GB2203534A (en
Inventor
Boris Ganievich Turukhano
Vladimir Peitsevich Gorelik
Nikulina Turukhano
Sergei Nikolaevich Kovalenko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LE I YADERNOI FIZ IM B P KONST
Original Assignee
LE I YADERNOI FIZ IM B P KONST
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LE I YADERNOI FIZ IM B P KONST filed Critical LE I YADERNOI FIZ IM B P KONST
Priority to GB8708620A priority Critical patent/GB2203534B/en
Priority to FR8705696A priority patent/FR2614435B1/fr
Priority to DE19873714158 priority patent/DE3714158A1/de
Publication of GB8708620D0 publication Critical patent/GB8708620D0/en
Priority to CH411187A priority patent/CH674906A5/de
Publication of GB2203534A publication Critical patent/GB2203534A/en
Application granted granted Critical
Publication of GB2203534B publication Critical patent/GB2203534B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Holo Graphy (AREA)
  • Optical Transform (AREA)
GB8708620A 1987-04-10 1987-04-10 Apparatus for assessing the linearity of a diffraction grating under certification Expired - Fee Related GB2203534B (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB8708620A GB2203534B (en) 1987-04-10 1987-04-10 Apparatus for assessing the linearity of a diffraction grating under certification
FR8705696A FR2614435B1 (fr) 1987-04-10 1987-04-22 Dispositif pour l'estimation de la linearite d'un reseau de diffraction a homologuer
DE19873714158 DE3714158A1 (de) 1987-04-10 1987-04-28 Vorrichtung zur bewertung der linearitaet von zu attestierenden beugungsgittern
CH411187A CH674906A5 (enrdf_load_stackoverflow) 1987-04-10 1987-10-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8708620A GB2203534B (en) 1987-04-10 1987-04-10 Apparatus for assessing the linearity of a diffraction grating under certification

Publications (3)

Publication Number Publication Date
GB8708620D0 GB8708620D0 (en) 1987-05-13
GB2203534A GB2203534A (en) 1988-10-19
GB2203534B true GB2203534B (en) 1991-05-01

Family

ID=10615613

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8708620A Expired - Fee Related GB2203534B (en) 1987-04-10 1987-04-10 Apparatus for assessing the linearity of a diffraction grating under certification

Country Status (4)

Country Link
CH (1) CH674906A5 (enrdf_load_stackoverflow)
DE (1) DE3714158A1 (enrdf_load_stackoverflow)
FR (1) FR2614435B1 (enrdf_load_stackoverflow)
GB (1) GB2203534B (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3982837A (en) * 1975-01-24 1976-09-28 Controlled Environment Systems, Inc. Method and apparatus for calibrating Reseau grids
JPH0758206B2 (ja) * 1984-03-30 1995-06-21 株式会社日立製作所 モワレ縞を用いた位置検出装置

Also Published As

Publication number Publication date
GB8708620D0 (en) 1987-05-13
FR2614435B1 (fr) 1989-08-11
GB2203534A (en) 1988-10-19
CH674906A5 (enrdf_load_stackoverflow) 1990-07-31
FR2614435A1 (fr) 1988-10-28
DE3714158A1 (de) 1988-11-17

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee