FR2614435B1 - Dispositif pour l'estimation de la linearite d'un reseau de diffraction a homologuer - Google Patents

Dispositif pour l'estimation de la linearite d'un reseau de diffraction a homologuer

Info

Publication number
FR2614435B1
FR2614435B1 FR8705696A FR8705696A FR2614435B1 FR 2614435 B1 FR2614435 B1 FR 2614435B1 FR 8705696 A FR8705696 A FR 8705696A FR 8705696 A FR8705696 A FR 8705696A FR 2614435 B1 FR2614435 B1 FR 2614435B1
Authority
FR
France
Prior art keywords
homologated
linearity
estimating
diffraction network
diffraction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8705696A
Other languages
English (en)
French (fr)
Other versions
FR2614435A1 (fr
Inventor
Boris Ganievich Turukhano
Vladimir Peitsevich Gorelik
Nikulina Turukhano
Sergei Nikolaevich Kovalenko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LE I YADERNOI F
Original Assignee
LE I YADERNOI F
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LE I YADERNOI F filed Critical LE I YADERNOI F
Publication of FR2614435A1 publication Critical patent/FR2614435A1/fr
Application granted granted Critical
Publication of FR2614435B1 publication Critical patent/FR2614435B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Holo Graphy (AREA)
  • Optical Transform (AREA)
FR8705696A 1987-04-10 1987-04-22 Dispositif pour l'estimation de la linearite d'un reseau de diffraction a homologuer Expired FR2614435B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8708620A GB2203534B (en) 1987-04-10 1987-04-10 Apparatus for assessing the linearity of a diffraction grating under certification

Publications (2)

Publication Number Publication Date
FR2614435A1 FR2614435A1 (fr) 1988-10-28
FR2614435B1 true FR2614435B1 (fr) 1989-08-11

Family

ID=10615613

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8705696A Expired FR2614435B1 (fr) 1987-04-10 1987-04-22 Dispositif pour l'estimation de la linearite d'un reseau de diffraction a homologuer

Country Status (4)

Country Link
CH (1) CH674906A5 (enrdf_load_stackoverflow)
DE (1) DE3714158A1 (enrdf_load_stackoverflow)
FR (1) FR2614435B1 (enrdf_load_stackoverflow)
GB (1) GB2203534B (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3982837A (en) * 1975-01-24 1976-09-28 Controlled Environment Systems, Inc. Method and apparatus for calibrating Reseau grids
JPH0758206B2 (ja) * 1984-03-30 1995-06-21 株式会社日立製作所 モワレ縞を用いた位置検出装置

Also Published As

Publication number Publication date
GB8708620D0 (en) 1987-05-13
GB2203534B (en) 1991-05-01
GB2203534A (en) 1988-10-19
CH674906A5 (enrdf_load_stackoverflow) 1990-07-31
FR2614435A1 (fr) 1988-10-28
DE3714158A1 (de) 1988-11-17

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Legal Events

Date Code Title Description
ST Notification of lapse