GB2164788B - A high vacuum on ultra-high vacuum system comprising a getter/ion atomisation combination pump - Google Patents

A high vacuum on ultra-high vacuum system comprising a getter/ion atomisation combination pump

Info

Publication number
GB2164788B
GB2164788B GB08523212A GB8523212A GB2164788B GB 2164788 B GB2164788 B GB 2164788B GB 08523212 A GB08523212 A GB 08523212A GB 8523212 A GB8523212 A GB 8523212A GB 2164788 B GB2164788 B GB 2164788B
Authority
GB
United Kingdom
Prior art keywords
high vacuum
atomisation
getter
ultra
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08523212A
Other versions
GB8523212D0 (en
GB2164788A (en
Inventor
Friedrich Lobs
Heinz Magdefessel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of GB8523212D0 publication Critical patent/GB8523212D0/en
Publication of GB2164788A publication Critical patent/GB2164788A/en
Application granted granted Critical
Publication of GB2164788B publication Critical patent/GB2164788B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
GB08523212A 1984-09-21 1985-09-19 A high vacuum on ultra-high vacuum system comprising a getter/ion atomisation combination pump Expired GB2164788B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19843434787 DE3434787A1 (en) 1984-09-21 1984-09-21 GETTER-ION SPRAYER COMBINATION PUMP FOR HIGH AND ULTRA-HIGH VACUUM SYSTEMS

Publications (3)

Publication Number Publication Date
GB8523212D0 GB8523212D0 (en) 1985-10-23
GB2164788A GB2164788A (en) 1986-03-26
GB2164788B true GB2164788B (en) 1988-07-20

Family

ID=6246041

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08523212A Expired GB2164788B (en) 1984-09-21 1985-09-19 A high vacuum on ultra-high vacuum system comprising a getter/ion atomisation combination pump

Country Status (2)

Country Link
DE (1) DE3434787A1 (en)
GB (1) GB2164788B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101455044B1 (en) * 2008-03-28 2014-10-27 사에스 게터스 에스.페.아. Combined pumping system comprising a getter pump and an ion pump

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5150001A (en) * 1990-04-10 1992-09-22 Orchid One Corporation Field emission electron gun and method having complementary passive and active vacuum pumping
DE4110588A1 (en) * 1991-04-02 1992-10-08 Leybold Ag ION SPRAYER PUMP WITH GETTER MODULE
DE19959210C2 (en) * 1999-12-08 2003-07-10 Max Planck Gesellschaft Ion getter pump and method for its activation
ITMI20090402A1 (en) 2009-03-17 2010-09-18 Getters Spa COMBINED PUMPING SYSTEM INCLUDING A GETTER PUMP AND A ION PUMP
GB2576968B (en) 2019-05-24 2021-12-08 Edwards Ltd A vacuum pumping system having multiple pumps
GB2592654B (en) * 2020-03-05 2022-12-14 Edwards Vacuum Llc Pump module

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2040555A (en) * 1978-11-21 1980-08-28 Westinghouse Electric Corp Gettering vacuum systems

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101455044B1 (en) * 2008-03-28 2014-10-27 사에스 게터스 에스.페.아. Combined pumping system comprising a getter pump and an ion pump

Also Published As

Publication number Publication date
GB8523212D0 (en) 1985-10-23
DE3434787A1 (en) 1986-04-03
GB2164788A (en) 1986-03-26

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee