GB2151372B - Control of shutter position - Google Patents

Control of shutter position

Info

Publication number
GB2151372B
GB2151372B GB08428372A GB8428372A GB2151372B GB 2151372 B GB2151372 B GB 2151372B GB 08428372 A GB08428372 A GB 08428372A GB 8428372 A GB8428372 A GB 8428372A GB 2151372 B GB2151372 B GB 2151372B
Authority
GB
United Kingdom
Prior art keywords
control
shutter position
shutter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08428372A
Other versions
GB8428372D0 (en
GB2151372A (en
Inventor
Mitsuga Yamamura
Minoru Yomoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of GB8428372D0 publication Critical patent/GB8428372D0/en
Publication of GB2151372A publication Critical patent/GB2151372A/en
Application granted granted Critical
Publication of GB2151372B publication Critical patent/GB2151372B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
GB08428372A 1983-11-10 1984-11-09 Control of shutter position Expired GB2151372B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58209939A JPS60102737A (en) 1983-11-10 1983-11-10 Shutter device

Publications (3)

Publication Number Publication Date
GB8428372D0 GB8428372D0 (en) 1984-12-19
GB2151372A GB2151372A (en) 1985-07-17
GB2151372B true GB2151372B (en) 1987-12-16

Family

ID=16581162

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08428372A Expired GB2151372B (en) 1983-11-10 1984-11-09 Control of shutter position

Country Status (3)

Country Link
JP (1) JPS60102737A (en)
DE (1) DE3441298A1 (en)
GB (1) GB2151372B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61188152U (en) * 1985-05-15 1986-11-22
DE3772467D1 (en) * 1986-06-13 1991-10-02 Dainippon Screen Mfg EXPOSURE SYSTEM.
DE10029444B4 (en) * 2000-06-21 2004-07-22 Leica Microsystems Heidelberg Gmbh Optical arrangement
CN108663871B (en) * 2017-03-31 2021-06-25 上海微电子装备（集团）股份有限公司 Shutter device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4227079A (en) * 1978-12-15 1980-10-07 Hewlett-Packard Company Multipath fine positioning beam director
GB2041576A (en) * 1979-02-02 1980-09-10 Leeds & Northrup Co Electric drive unit control apparatus
FR2461408A1 (en) * 1979-07-06 1981-01-30 Jaeger ELECTRIC PULSE TOTALIZER USING AN ELECTRIC MOTOR PROVIDED BY A POSITION CONTROL
US4350428A (en) * 1979-10-09 1982-09-21 Optimetrix Corporation Shutter mechanism
JPS5655927A (en) * 1979-10-15 1981-05-16 Ushio Inc Shutter device
JPS5697105A (en) * 1979-12-31 1981-08-05 Fanuc Ltd Controller for stopping in place for main shaft
US4430657A (en) * 1982-03-03 1984-02-07 The Perkin-Elmer Corporation Pen drive for recorder
JPS5932012A (en) * 1982-08-17 1984-02-21 Sumitomo Electric Ind Ltd Positioning servo system

Also Published As

Publication number Publication date
DE3441298A1 (en) 1985-05-23
JPS60102737A (en) 1985-06-06
GB8428372D0 (en) 1984-12-19
GB2151372A (en) 1985-07-17

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Legal Events

Date Code Title Description
PE20 Patent expired after termination of 20 years

Effective date: 20041108