GB2146120A - Photoacoustic force sensor - Google Patents

Photoacoustic force sensor Download PDF

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Publication number
GB2146120A
GB2146120A GB08327814A GB8327814A GB2146120A GB 2146120 A GB2146120 A GB 2146120A GB 08327814 A GB08327814 A GB 08327814A GB 8327814 A GB8327814 A GB 8327814A GB 2146120 A GB2146120 A GB 2146120A
Authority
GB
United Kingdom
Prior art keywords
light
sensor according
sensor
modulation
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB08327814A
Other versions
GB2146120B (en
GB8327814D0 (en
Inventor
Martin Collier
Stuart Michael Mcglade
Philip Edward Stephens
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co PLC
Original Assignee
General Electric Co PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co PLC filed Critical General Electric Co PLC
Publication of GB8327814D0 publication Critical patent/GB8327814D0/en
Publication of GB2146120A publication Critical patent/GB2146120A/en
Application granted granted Critical
Publication of GB2146120B publication Critical patent/GB2146120B/en
Expired legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/16Measuring force or stress, in general using properties of piezoelectric devices
    • G01L1/162Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
    • G01L1/167Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators optical excitation or measuring of vibrations
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/14Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measurement of pressure
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/14Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measurement of pressure
    • G01F23/16Indicating, recording, or alarm devices being actuated by mechanical or fluid means, e.g. using gas, mercury, or a diaphragm as transmitting element, or by a column of liquid
    • G01F23/164Indicating, recording, or alarm devices being actuated by mechanical or fluid means, e.g. using gas, mercury, or a diaphragm as transmitting element, or by a column of liquid using a diaphragm, bellow as transmitting element
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • G01H9/004Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/02Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/04Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by acoustic means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G01L9/0023Optical excitation or measuring

Abstract

A force sensor comprises a body 21 eg of quartz which resonates at a frequency dependent on the force imposed on the crystal. Light pulses on line 3 induce resonance of the body 21 by means of the photo acoustic effect. The resonance causes modulation of light passing from path 4 through the crystal onto path 5. The modulation of the light on path 5 is at a frequency which is the same as the frequency of vibration of the crystal and a feedback path 13, 14, serves to tune the light source 11 to produce light pulses of that frequency. The frequency displayed at 15 is thus representative of the force imposed on the member 21. <IMAGE>

Description

SPECIFICATION A sensor This invention relates to a sensor and is particularly though not exclusively applicable to a force or strain sensor hereinafter called a force sensor. Force sensors are particularly important compared with other types of sensor because a technique for measuring force can easily be adapted to measure other physi cai properties.
The invention arose when considering the design of a force sensor for use in circumstances where electrical cdnnections might cause a fire risk or be subjected to electromagnetic interference.
The invention provides a sensor comprising: a sensor body which has resonant frequency depending on the value of the property to be sensed; photo-acoustic means including a light source, for causing resonation of the body; modulating means for using the resonation of the body to modulate light travelling along a path to and from the body; and means for detecting the modulation of the light and deriving therefrom an indication of the value of the said property.
The term "light" when used in this Specification is to be interpreted as including the range of electromagnetic radiation from infrared to ultraviolet inclusive.
The sensor body can take many different forms.
For example it can be a piezoelectric (e.g.
quartz crystal such as is used in crystal controlled oscillators). These crystals resonate at a well defined frequency dependent on a force imposed on them and are therefore particularly useful for force sensors. A quartz crystal is also transparent to light and can be arranged to modulate light passing through it in time with its oscillations. The modulation means of the invention can thus simply consist of means for passing light through the crystal. It is possible to arrange for almost any material to resonate at a frequency depending on force or strain, which may either be compressive or tensile or torsional or flexural.
There is therefore a vast selection of possible forms which the sensor body may take. If it is transparent the light path may pass through the sensor body. If it is opaque the light path may be reflected off it. The sensor body need not necessarily be solid. A body of gas can also be arranged to resonate at a frequency dependent on properties such as density, temperature, volume and pressure and can therefore be used in sensors for detecting such properties.
The photo-acoustic means for causing resonation of the body preferably includes a light source which is adapted to generate light pulses at a frequency close to the resonant frequency of the body. A feedback path can advantageously be included to adjust the frequency of the light pulses until the amplitude of resonation is a maximum. The frequency giving the maximum amplitude can be assumed to be the frequency of resonation of the body.
The drive for the light source could be designed to repetitively sweep the frequency through a range of frequencies. In such an arrangement the means for detecting the modulation of the light would include a device for detecting the frequency at which the light received reached a maximum intensity. In this form of the invention there would be no need for a feedback from the detecting means to the drive for light source.
An alternative technique would be to use a light source which generates light pulses at a fixed frequency and to use amplitude (or an amplitude dependent function) of the resonation as a measure of the proximity of the resonant frequency of the sensor body to the frequency of the light pulses. This technique is not however preferred since it is subject to inaccuracies introduced by e.g. stray light.
One way in which the invention may be performed will now be described by way of example with reference to the accompanying schematic drawings in which: Figure 1 illustrates a force sensor constructed in accordance with the invention including parts located at remote positions 1 and 2; and Figures 2 to 5 illustrate respective alternative components for utilisation at position 2 of Figure 1.
Referring firstly to Figure 1, the illustrated strain sensor is located as previously mentioned at the two remote positions 1 and 2, these positions being joined by optical links in the form of optical fibres 3, 4 and 5.
At the position 1, a pulsed light source 11 and a continuous light source 1 2 transmit light respectively along light paths 3 and 4 to the location 2.
At the location 2, pulses of light from the light path 3 are incident on a quartz crystal body 21 having the illustrated shape in accordance with the invention described in our copending patent applications 8315565. It includes three arms joined at their ends by cross-pieces. In use the arms vibrate in planes perpendicular to a common plane in which all three arms lie. the centre arm vibrating in antiphase relative to the outer two arms. The centre arm of the crystal body 21 absorbs the pulses of light, each pulse momentarily generating heat which in turn produces expansion and contraction: resulting in the vibration previously described. This is known as the optoacoustic effect. The pulses of light from the light source 11 are arranged to have a frequency of the same order of magnitude as the resonant frequency of the crystal 21.
Light from the path 4 is directed through the crystal 21 by a lens assembly 22 and is then collected by lens assembly 23 and passed onto the return line 5. The light guiding properties of the crystal 21 are such that they are modified by its resonation thus imposing, on the light path, passing through the crystal, modulations in intensity, these modifications having the same frequency as the frequency of vibration. The modulated light from line 5 is collected by a photo-detector 1 3 at position 1. The resulting electrical signals at the output of photodetector 1 3 are modulated in a manner similar to the optical signals on line 5.The extent of modulation is measured in a pulse timing circuit 14 which integrates the modulus of the a.c. component of the received signal over set periods of time and adjusts the frequency of the light source 11 in such a way as to maximise the result of integration. The frequency of the light source 11 is thus made equal to the resonant frequency of the crystal 21. A display 15 connected to the output of the circuit 14 indicates this frequency. The crystal 21 is subjected to a force as indicated by the arrow on Figure 1 and the strain thus imposed on it affects its resonant frequency. The value displayed at 1 5 can thus be used as a measure of the force on the crystal 21.
Figure 2 shows alternative components for use at the position 2 including an optical element 21A which is subjected to a force to be measured and which is illuminated by the pulses of light from the optical path 3.
Light from path 4 is passed through a polariser P1 and the polarised light passes through the element 21A to another polariser P2 whose plane of polarisation is perpendicular to that of P1. The amount of light passing from optical line 4 to optical line 5 will be dependent on any rotation of the plane of polarisation in the element 21A which changes in time with vibration of the element 21A at a frequency dependent on the force to be measured.
In the arrangement shown in Figure 3 the force to be measured is applied so as to put an optical element 21 B under tensile stress.
Photo-acoustically generated vibrations of the element 21 B, caused by light from line 3, serve to deflect the light path passing from line 4 to line 5 thereby modulating the light on path 5 in time with the vibrations of the element 21 B the frequency of which depends on the force applied.
In Figure 4 a non-transparent vibrating element 21 C is used which is again caused to vibrate by the photo-acoustic effect of light pulses received from line 3. Light from line 4 passes through a fibre-optic coupler C onto lines 4A and 4B from whence it is reflected off the element 21 C and a reflective end surface of the fibre 4B respectively. The reflected light on lines 4A and 4B is mixed in the fibre-optic coupler and the result of mixing the light is applied to a line 4C and thence to a photodetector PD. Flexing of the member 21C during its vibration alters the distance between the end of line 4A and the part of the member 21 C from which reflection occurs. The phase of the light reflected back along line 4A thus changes relative to the phase of the light reflected back along line 4B causing an interference effect on line 4C. The electrical output of the photodetector PD is thus modulated in time with the vibration of the member 21C. It is notable that in this embodiment the output signal appears on an electrical line instead of on the optical line 5 as in the previous embodiments. This may be a disadvantage in some situations.
In Figure 5 the sensor body 21 D is similar to that shown in Figure 1 but, instead of passing light from line 4 through the sensor body, the light is reflected off its surface in the direction of line 5. Small movements of the member 21 D during its resonation cause changes in the direction of the reflected light beam so that a greater or larger amount of it is received by the line 5, thereby producing modulation in the light intensity on line 5.

Claims (11)

1. A sensor comprising: a sensor body which has a resonant frequency depending on the value of the property to be sensed; photoacoustic means, including a light source, for causing resonation of the body, modulation means for using resonation of the body to modulate light travelling along a path to and from the body; and means for detecting the modulation of the light and deriving therefrom an indication of the value of the said property.
2. A sensor according to Claim 1 for sensing force in which the sensor body is a piezoelectrid crystal having a resonant frequency depending on the mechanical force on the crystal.
3. A sensor according to Claim 1 or 2 in which the photo-acoustic means includes a pulsed light source and means for directing the light onto light absorbing matter forming part of or fixed relative to the sensor body.
4. A sensor according to any preceding claim in which at least a part of the sensor body is transparent and in which the modulating means is formed by a portion of the sensor body, through which the light path passes.
5. A sensor according to any one of Claims 1 to 3 in which the modulating means includes a reflective surface portion of the sensor body, and in which the light path includes a part where the light is reflected off the said reflective portion.
6. A sensor according to any preceding claim in which the means for detecting the modulation of the light includes means for measuring the frequency of modulation.
7. A sensor according to any of the Claims 1 to 5 in which the means for detecting the modulation of the light includes means for measuring the amplitude, or a function of amplitude of the modulation
8. A sensor according to Claim 1 and substantially as described with reference to Figure 1 of the accompanying drawing.
9. A sensor according to Claim 1 and substantially as described with reference to Figure 1 modified as shown in Figure 2 of the accompanying drawings.
10. A sensor according to Claim 1 and substantially as described with reference to Figure 1 modified as shown in Figure 3 of the accompanying drawings.
11. A sensor according to Claim 1 and substantially as described with reference to Figure 1 modified as shown in Figure 4 of the accompanying drawings.
1 2. A sensor according to Claim 1 and substantially as described with reference to Figure 1 modified as shown in Figure 5 of the accompanying drawings.
GB08327814A 1983-09-03 1983-10-18 Photoacoustic force sensor Expired GB2146120B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB838323685A GB8323685D0 (en) 1983-09-03 1983-09-03 Monitoring displacement

Publications (3)

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GB8327814D0 GB8327814D0 (en) 1983-11-16
GB2146120A true GB2146120A (en) 1985-04-11
GB2146120B GB2146120B (en) 1987-01-14

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GB838323685A Pending GB8323685D0 (en) 1983-09-03 1983-09-03 Monitoring displacement
GB08327814A Expired GB2146120B (en) 1983-09-03 1983-10-18 Photoacoustic force sensor
GB08419491A Expired GB2146123B (en) 1983-09-03 1984-07-31 Apparatus for monitoring displacement

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB838323685A Pending GB8323685D0 (en) 1983-09-03 1983-09-03 Monitoring displacement

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB08419491A Expired GB2146123B (en) 1983-09-03 1984-07-31 Apparatus for monitoring displacement

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Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0161671A2 (en) * 1984-05-18 1985-11-21 Luxtron Corporation Optical sensors for detecting physical parameters
GB2185106A (en) * 1985-12-13 1987-07-08 Gen Electric Co Plc An optically-driven vibrating sensor
GB2187551A (en) * 1986-03-04 1987-09-09 Gen Electric Co Plc Radiation detector
EP0244086A2 (en) * 1986-04-26 1987-11-04 Stc Plc Resonator device
US4713540A (en) * 1985-07-16 1987-12-15 The Foxboro Company Method and apparatus for sensing a measurand
GB2194049A (en) * 1986-08-15 1988-02-24 Gen Electric Co Plc A photoacoustic measuring device
GB2194054A (en) * 1986-08-15 1988-02-24 Gen Electric Co Plc Magnetometer
GB2197069A (en) * 1986-11-03 1988-05-11 Stc Plc Optically driven sensor device
EP0279515A1 (en) * 1987-01-24 1988-08-24 Schlumberger Industries Limited Sensors
GB2208931A (en) * 1987-08-19 1989-04-19 Stc Plc An optically driven mechanical oscillator
US4897541A (en) * 1984-05-18 1990-01-30 Luxtron Corporation Sensors for detecting electromagnetic parameters utilizing resonating elements
FR2636744A1 (en) * 1988-09-19 1990-03-23 Crouzet Sa Vibrating resonator having optical excitation and detection for use as a sensor
GB2223311A (en) * 1988-09-29 1990-04-04 Schlumberger Ind Ltd Micromachined solid state vibrating element sensors
US4960000A (en) * 1988-11-02 1990-10-02 Asulab, S.A. Device for measuring a physical quantity
EP0428263A1 (en) * 1989-10-17 1991-05-22 Lucas Industries Public Limited Company Vibrating sensor
US5265479A (en) * 1989-10-17 1993-11-30 Lucas Industries Public Limited Company Micro resonator
DE4230087A1 (en) * 1992-09-09 1994-03-10 Bezzaoui Hocine Dipl Ing Integrated optical micro-mechanical sensor for measuring physical or chemical parameters - has strip waveguide applied to etched membrane acting as integrated measuring path
EP0893675A1 (en) * 1997-07-21 1999-01-27 European Atomic Energy Community (EURATOM) Luminous intensity sensor element and light beam modulating method and device employing such a sensor element
US9998089B2 (en) 2012-12-14 2018-06-12 General Electric Company Resonator device
CN112097700A (en) * 2020-09-10 2020-12-18 中国科学院重庆绿色智能技术研究院 Wireless strain sensing system and monitoring method based on frequency reconfigurable antenna

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4677305A (en) * 1985-06-28 1987-06-30 Simmonds Precision Products, Inc. Opto-acoustic fuel quantity gauging system
US4900921A (en) * 1988-09-19 1990-02-13 Simmonds Precision Products, Inc. System and method for opto-acoustic liquid quantity measurement and transducer therefor
EP1996957A4 (en) * 2006-03-15 2012-12-26 Venkata Guruprasad Universal frequency generation and scaling
FI20075879A0 (en) * 2007-12-05 2007-12-05 Valtion Teknillinen Apparatus for measuring pressure, variation in sound pressure, magnetic field, acceleration, vibration and gas composition
US8850893B2 (en) 2007-12-05 2014-10-07 Valtion Teknillinen Tutkimuskeskus Device for measuring pressure, variation in acoustic pressure, a magnetic field, acceleration, vibration, or the composition of a gas

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1980001005A1 (en) * 1978-11-01 1980-05-15 A Rosencwaig Photoacoustic or thermoacoustic microscopy
GB1600883A (en) * 1977-02-14 1981-10-21 Gen Resistance System and method of measuring fluid pressure force

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB663946A (en) * 1947-07-04 1951-01-02 Georges Henri Dion Improvements in level measuring apparatus
DE2237613C3 (en) * 1972-07-31 1975-05-28 Faser-Und Kunststoff-Presswerk Romen Kg, 8450 Amberg Method and device for securing space
US3948345A (en) * 1973-06-15 1976-04-06 Allan Rosencwaig Methods and means for analyzing substances
US4163382A (en) * 1978-04-28 1979-08-07 The United States Of America As Represented By The United States Department Of Energy Method and apparatus for optoacoustic spectroscopy
US4269509A (en) * 1978-05-26 1981-05-26 Allied Chemical Corporation Photoacoustic Raman spectroscopy

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1600883A (en) * 1977-02-14 1981-10-21 Gen Resistance System and method of measuring fluid pressure force
WO1980001005A1 (en) * 1978-11-01 1980-05-15 A Rosencwaig Photoacoustic or thermoacoustic microscopy

Cited By (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0161671A3 (en) * 1984-05-18 1986-08-13 Luxtron Corporation Optical sensors for detecting physical parameters
US4678905A (en) * 1984-05-18 1987-07-07 Luxtron Corporation Optical sensors for detecting physical parameters utilizing vibrating piezoelectric elements
EP0161671A2 (en) * 1984-05-18 1985-11-21 Luxtron Corporation Optical sensors for detecting physical parameters
US4897541A (en) * 1984-05-18 1990-01-30 Luxtron Corporation Sensors for detecting electromagnetic parameters utilizing resonating elements
US4713540A (en) * 1985-07-16 1987-12-15 The Foxboro Company Method and apparatus for sensing a measurand
GB2185106B (en) * 1985-12-13 1990-04-25 Gen Electric Plc A sensor
GB2185106A (en) * 1985-12-13 1987-07-08 Gen Electric Co Plc An optically-driven vibrating sensor
US4772786A (en) * 1985-12-13 1988-09-20 The General Electric Company, P.L.C. Photothermal oscillator force sensor
GB2187551A (en) * 1986-03-04 1987-09-09 Gen Electric Co Plc Radiation detector
GB2187551B (en) * 1986-03-04 1990-03-14 Gen Electric Plc Radiation detector
US4813271A (en) * 1986-04-26 1989-03-21 Stc Plc Resonator device
EP0244086A2 (en) * 1986-04-26 1987-11-04 Stc Plc Resonator device
EP0244086A3 (en) * 1986-04-26 1989-07-19 Stc Plc Resonator device resonator device
GB2194049B (en) * 1986-08-15 1990-04-25 Gen Electric Plc A sensor
GB2194054A (en) * 1986-08-15 1988-02-24 Gen Electric Co Plc Magnetometer
GB2194049A (en) * 1986-08-15 1988-02-24 Gen Electric Co Plc A photoacoustic measuring device
US4884450A (en) * 1986-11-03 1989-12-05 Stc Plc Sensor device
GB2197069A (en) * 1986-11-03 1988-05-11 Stc Plc Optically driven sensor device
GB2197069B (en) * 1986-11-03 1990-10-24 Stc Plc Sensor device
GB2201776A (en) * 1987-01-24 1988-09-07 Schlumberger Electronics Resonantly vibratable sensors
EP0279515A1 (en) * 1987-01-24 1988-08-24 Schlumberger Industries Limited Sensors
GB2208931A (en) * 1987-08-19 1989-04-19 Stc Plc An optically driven mechanical oscillator
GB2208931B (en) * 1987-08-19 1991-06-26 Stc Plc Mechanical oscilattor
FR2636744A1 (en) * 1988-09-19 1990-03-23 Crouzet Sa Vibrating resonator having optical excitation and detection for use as a sensor
GB2223311B (en) * 1988-09-29 1992-04-08 Schlumberger Ind Ltd Sensors
GB2223311A (en) * 1988-09-29 1990-04-04 Schlumberger Ind Ltd Micromachined solid state vibrating element sensors
US4960000A (en) * 1988-11-02 1990-10-02 Asulab, S.A. Device for measuring a physical quantity
EP0428263A1 (en) * 1989-10-17 1991-05-22 Lucas Industries Public Limited Company Vibrating sensor
US5265479A (en) * 1989-10-17 1993-11-30 Lucas Industries Public Limited Company Micro resonator
DE4230087A1 (en) * 1992-09-09 1994-03-10 Bezzaoui Hocine Dipl Ing Integrated optical micro-mechanical sensor for measuring physical or chemical parameters - has strip waveguide applied to etched membrane acting as integrated measuring path
EP0893675A1 (en) * 1997-07-21 1999-01-27 European Atomic Energy Community (EURATOM) Luminous intensity sensor element and light beam modulating method and device employing such a sensor element
WO1999005490A1 (en) * 1997-07-21 1999-02-04 European Atomic Energy Community (Euratom) Luminous intensity sensor element and light beam modulating method and device employing such a sensor element
US9998089B2 (en) 2012-12-14 2018-06-12 General Electric Company Resonator device
CN112097700A (en) * 2020-09-10 2020-12-18 中国科学院重庆绿色智能技术研究院 Wireless strain sensing system and monitoring method based on frequency reconfigurable antenna
CN112097700B (en) * 2020-09-10 2021-11-02 中国科学院重庆绿色智能技术研究院 Wireless strain sensing system and monitoring method based on frequency reconfigurable antenna

Also Published As

Publication number Publication date
GB2146120B (en) 1987-01-14
GB8323685D0 (en) 1983-10-05
GB2146123A (en) 1985-04-11
GB8419491D0 (en) 1984-09-05
GB2146123B (en) 1987-04-23
GB8327814D0 (en) 1983-11-16

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PCNP Patent ceased through non-payment of renewal fee

Effective date: 19931018