GB2143853A - Deposition - Google Patents

Deposition Download PDF

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Publication number
GB2143853A
GB2143853A GB08418549A GB8418549A GB2143853A GB 2143853 A GB2143853 A GB 2143853A GB 08418549 A GB08418549 A GB 08418549A GB 8418549 A GB8418549 A GB 8418549A GB 2143853 A GB2143853 A GB 2143853A
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United Kingdom
Prior art keywords
composition
radical anion
hydrocarbon
examples
compound
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GB08418549A
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GB8418549D0 (en
Inventor
Oskar Friedrich Olaj
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Centre Suisse dElectronique et Microtechnique SA CSEM
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Laboratoire Suisse de Recherches Horlogeres
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/52Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating using reducing agents for coating with metallic material not provided for in a single one of groups C23C18/32 - C23C18/50

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  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemically Coating (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

A method for the electroless deposition of metals or semiconductors in form of a powder or in form of an adherent layer on different substrates comprises reducing a compound of the material to be deposited by means of a radical anion. The compound of the material to be deposited may be dissolved in a non-aqueous solvent the radical anion, which may be of a hydrocarbon, also dissolved in the non-aqueous solvent. The deposited material can be silicon for photovoltaic energy conversion purposes, MoSi2 as a wear resistant coating or tantalum as a corrosion resistant coating. Preferred radical anions are formed by the action of a reducing metal such as sodium on polycyclic aromatic hydrocarbons such as naphthalene, biphenyl and phenanthrene.

Description

SPECIFICATION Deposition The present invention relates to the electroless deposition of substances like metals or semiconductors from non-aqueous solvents, for example as powders or especially adherent layers on substrates.
Presently, there are both electrochemical and chemical (electroless) methods of depositing from aqueous solutions metals on substrates, especially in the form of adherent layers. These methods give good results for metals which are stable in such solutions, for example gold, nickel, chromium and many others. Such methods however do not work for metals which are not stable in water.
It is of high technical and economic interest to be able to deposit metals or semiconductors on appropriate substrates. Examples include silicon for photovoltaic energy conversion purposes, molybdenum, aluminium and tantalum as a corrosion resistant coating and also intermetallic compounds such as MoSi2 as wear resistant coatings.
It is possible to deposit such metals or semiconductors by electrolytic reduction in fused salts or in certain non-aqueous solvents. Such methods are described e.g. in the Journal of the Electrochemical Society 128 1 708-1 711(1981) or in U.S. Patent 3,990,953. These methods of electrolytic reduction have however the disadvantage that the substrates on which the substance is to be deposited must be electrical conductors and must be connected to a current source. However, if the substance to be deposited is a bad conductor, such as silicon, the deposition speed is reduced, which is a further inconvenience. If the electrolytic deposition is carried out in a molten salt, operation at a high temperature is necessary, which is another disadvantage.
The electroless deposition of metals out of a solution of one of its compounds, such as the well known electroless deposition of nickel, avoids such inconveniences. This method consists of adding to a solution containing a compound of the to be deposited substance a reducing agent so that the metal precipitates as a powder or as an adherent layer on a substrate. Such a method for the production of pure silicon is described in the German Patent DBP 1,071,680. As a solvent, one of the well known non-aqueous solvents in which a silicon compound such as SiCI4 is soluble can be used. As a reducing agent, a dispersion of sodium is used. In this way, silicon powder can be produced. The powder must be separated from the sodium dispersion in an additional step.The use of a non-soluble reduction agent has therefore the disadvantage of introducing an additional step in the process of metal winning.
The deposition of the metal in form of a well adherent layer on a substrate using an insoluble reducing agent does not seem to be possible.
The present invention overcomes or at least mitigates these difficulties. It has been found that one can deposit in the desired form substances such as silicon, molybdenum, tantalum, chromium, cobalt and many others, as well as intermetallic compounds, out of solutions of their compounds in non-aqueous solvents by using radical anions as a reducing agent. The invention may therefore be viewed broadly as the use of a radical anion as a reducing agent in an electroless deposition process or as an electroless deposition process in which the reducing agent is a radical anion. The method can be realised by contacting a reducible precursor of the material with a radical anion. In the case of depositing an element, which may be a metal or a semiconductor, the reducible precursor will be a compound of the element.In the case of depositing an intermetallic compound, the reducible precursor will be a compound or a mixture of compounds of the elements of the intermetallic compound. The radical anions are soluble in non-aqueous solvents. Preferred radical anions are those formed from aromatic polycyclic hydrocarbons such as naphthalene, biphenyl and phenanthrene. To obtain solutions of such radical anions, one adds sodium or another reducing agent to a non-aqueous solution of the hydrocarbon. Alternatively, one electrolyses a non-aqueous solution of the hydrocarbon to which a supporting electrolyte, such as a tetraalkylammonium halide, has been added.
A method according to the present invention comprises mixing a non-aqueous solution of a compound of a substance to be deposited with a non-aqueous solution of a radical anion and contacting a substrate on which the substance is to be deposited in form of an adherent layer with the mixture. The substrate can be of a wide variety of materials, such as metals, glass, ceramic, sapphire, plastics, PTFE and resins.
Another method of the invention comprises mixing a non-aqueous solution of the compounds and the anion radical without contacting a substrate into the mixture. In that way one obtains the substance in form of powder.
The invention also provides an electroless deposition composition comprising a reducible precursor of a depositable material and a radical anion.
The following examples illustrate the invention.
EXAMPLE 1 A closed reactor vessel flushed with dry argon, contains a 0.5 molar solution of SiHCl3 in propylene-carbonate, in which copper substrates are immersed. To the solution is added a 0.05 molar solution of naphthalene in propylene carbonate which contains solid sodium. After mixing, a silicon layer of about 5 Mm thickness is deposited on the substrates.
EXAMPLE 2 A closed reactor vessel, flushed with dry nitrogen, contains a 0.1 molar solution of biphenyl in dimethyl-formamide, which for 1 hour was in contact with a dispersion of sodium and has been filtered thereafter. In this solution steel substrates are immersed. A 0.1 molar solution of MoCI5 in dimethylformamide is added. After mixing, an adherent layer of molybdenum is deposited on the steel substrates.
EXAMPLES 3A-3D A reactor vessel as described above contains a solution of Col2 (0.05 molar) and naphthalene (0.1 molar) in acetonitrile, in which a substrate of copper (Example 3A) nickel (Example 3B), aluminium (Example 3C) or aluminium base alloy (Example 3D) is immersed. After lithium is added to the solution and stirring it, a layer of cobalt is deposited on the substrate. This particular exemplified method is not always advantageous because the reduced metal can also deposit on the solid reducing metal. Other, similar substrates could be used and another reducing metal, apart from lithium, could be used.
EXAMPLES 4A 4F The procedure of each of Examples 1, 2 and 3A to 3D was followed except that in the place of the compounds in the above mentioned Examples MoCls and SiC14 (both 0.1 molar) are used. The deposit on the substrates consists then of MoSi2.
Examples 4A and 4B correspond to Examples 1 and 2 and Examples 4C to 4F correspond to Examples 3A to 3D.
EXAMPLE 5 The reaction vessel consists of a flat bottomed, rectangular channel, having the substrates on opposite sides. Through this channel flows a solution of SiHCI3 (0.1 molar) and naphthalene (0.1 molar), which latter has been in contact with solid sodium before entering the channel.
The flow of the solution through the channel is such that the concentrations of SiHCI3 and the naphthalene radical anion at the end of the channel are not less than 70% to 80% of the concentrations at their entry of the channel. The deposit on the substrate consisted then of silicon of regular quality.
EXAMPLES 6A-6M The procedure of each of Examples 1 , 2, 3A to 3D, 4A to 4F and 5 is followed, except that the substrates are made from glass. Examples 6A and 6B correspond to Examples 1 and 2, Examples 6C to 6F correspond to Examples 3A to 3D, Examples 6G to 6L correspond to Examples 4A to 4F and Example 6M corresponds to Example 5.
EXAMPLES 7A-7M The procedure of each of Examples 1, 2, 3A to 3D, 4A to 4F and 5 is followed, except that the substrates are made from aluminium oxide. Other ceramics can be used. Examples 7A and 7B correspond to Examples 1 and 2, Examples 7C to 7F correspond to Examples 3A to 3D, Examples 7G to 7L correspond to Examples 4A to 4F and Example 7M corresponds to Example 5.
EXAMPLES 8A-8M The procedure of each of Examples 1, 2, 3A to 3D, 4A to 4F and 5 is followed, except that the substrates are made from polypropylene. Other polymers can be used. Examples 8A and 8B correspond to Examples 1 and 2, Examples 8C to 8F correspond to Examples 3A to 3D, Examples 8G to 8L correspond to Examples 4A to 4F and Example 8M corresponds to Example 5.
EXAMPLES 91--9Lll The procedure of each of Examples 1,2, 3A to 3D, 4A to 4F 5, 6A to 6M, 7A to 7M and 8A to 8M is followed except that one adds tetrabutylammonium iodide (0.1 molar) to the solution which contains the hydrocarbon, and that this solution is eiectrolysed between two platinum electrodes before being added to the solution of the metal compound. A diaphragm is placed between the anode and cathode in a conventional way to prevent elemental iodine penetrating into the reducing solution.Example 91 corresponds to Example 1, Example 911 corresponds to Example 2, Examples 911 to 9VI correspond to Examples 3A to 3D, Examples 9VII to 9Xll correspond to Examples 4A to 4F, Example 9Xlll corresponds to Example 5, Examples 9XIV to 9XXVI correspond to Examples 6A to 6M, Examples 9XXVII to 9XXXIX corresponds to Examples 7A to 7M and Examples 9XL to LII corresponds to Examples 8A to 8M.
It is to be understood that these examples are not limiting. It is an advantage of the present invention that various parameters of the method can be adapted for the desired purpose. This concerns especially the nature and the concentration of the hydrocarbon which forms the reducing radical anion, the nature of the solvent, the nature and concentration of the metal compound, or the mixture of metal compounds in order to deposit different metals simultaneously or their alloys or intermetallic phases.

Claims (34)

1. The use of a radical anion as a reducing agent in an electroless deposition process.
2. An electroless deposition process in which the reducing agent is a radical anion.
3. A process for the electroless deposition of a depositable material, the method comprising contacting a reducible precursor of the material with a radical anion.
4. A process as claimed in Claim 3, wherein the depositable material is an element and the reducible precursor is a compound of the element.
5. A process as claimed in Claim 4, wherein the element is a metal.
6. A process as claimed in Claim 4, wherein the element is a semiconductor.
7. A process as claimed in Claim 3, wherein the depositable material is an intermetallic compound and the reducible precursor comprises a compound or compounds of the elements of the intermetallic compound.
8. A process as claimed in any one of Claims 3 to 7, wherein the reducible precursor and the radical anion are dissolved in the same solvent.
9. A process as claimed in any one of Claims 1 to 8, wherein the radical anion is a radical anion of a hydrocarbon.
10. A process as claimed in Claim 9, wherein the hydrocarbon is aromatic.
1 A process as claimed in Claim 10, wherein the aromatic hydrocarbon is polycyclic.
12. A process as claimed in Claim 11, wherein the polycyclic hydrocarbon is naphthalene, biphenyl or phenanthrene.
13. A process as claimed in any one of Claims 9 to 12, wherein the radical anion is formed by reduction of the hydrocarbon by a reducing metal
14. A process as claimed in Claim 13, wherein the reducing metal is an alkali metal.
1 5. A process as claimed in any one of Claims 9 to 12, wherein the radical anion is formed by electro-chemical reduction of the hydrocarbon.
16. A process as claimed in Claim 13 or 15, wherein in the formation of the radical anion, the hydrocarbon is dissolved in a non-aqueous solvent.
1 7. An electroless deposition composition comprising a reducible precursor of a depositable material and a radical anion.
18. A composition as claimed in Claim 17, wherein the depositable material is an element and the reducible precursor is a compound of the element.
19. A composition as claimed in Claim 18, wherein the element is a metal.
20. A composition as claimed in Claim 18, wherein the element is a semiconductor.
21. A composition as claimed in Claim 17, wherein the depositable material is an intermetallic compound and the reducible precursor comprises a compound or compounds of the elements of the intermetallic compound.
22. A composition as claimed in any one of Claims 1 7 to 21, wherein the reducible precursor and the radical anion are dissolved in the same solvent.
23. A composition as claimed in any one of Claims 1 7 to 22, wherein the radical anion is a radical anion of a hydrocarbon.
24. A composition as claimed in Claim 23, wherein the hydrocarbon is aromatic.
25. A composition as claimed in Claim 24, wherein the aromatic hydrocarbon is polycyclic.
26. A composition as claimed in Claim 25, wherein the polycyclic hydrocarbon is naphthalene, biphenyl or phenanthrene.
27. A composition as claimed in any one of Claims 23 to 26, wherein the radical anion is formed by reduction of the hydrocarbon by a reducing metal.
28. A composition as claimed in Claim 27, wherein the reducing metal is an alkali metal.
29. A composition as claimed in any one of Claims 23 to 26, wherein the radical anion is formed by electrochemical reduction of the hydrocarbon.
30. A composition as claimed in Claim 27 or 29, wherein in the formation of the radical anion, the hydrocarbon is dissolved in a non-aqueous solvent.
31. An electroless deposition process substantially as herein described with reference to any one of the Examples.
32. An electroless deposition composition substantially as described with reference to any one of the Examples.
33. Material whenever deposited by a process as claimed in any one of Claims 2 to 16 and 31 and/or by means of a composition as claimed in any one of Claims 17 to 30 and 32.
34. A substrate having a deposit of material as claimed in Claim 33.
GB08418549A 1983-07-21 1984-07-20 Deposition Withdrawn GB2143853A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH3992/83A CH656401A5 (en) 1983-07-21 1983-07-21 METHOD FOR ELECTRICALLY DEPOSITING METALS.

Publications (2)

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GB8418549D0 GB8418549D0 (en) 1984-08-22
GB2143853A true GB2143853A (en) 1985-02-20

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JP (1) JPS6026668A (en)
AT (1) ATA179684A (en)
CH (1) CH656401A5 (en)
DE (1) DE3422731A1 (en)
FR (1) FR2549497A1 (en)
GB (1) GB2143853A (en)
IT (1) IT1177814B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5242713A (en) * 1988-12-23 1993-09-07 International Business Machines Corporation Method for conditioning an organic polymeric material
US5318803A (en) * 1990-11-13 1994-06-07 International Business Machines Corporation Conditioning of a substrate for electroless plating thereon
WO2005038891A1 (en) * 2003-10-16 2005-04-28 Jsr Corporation Composition for forming silicon-cobalt film, silicon-cobalt film and method for forming same
JP4636236B2 (en) * 2003-10-16 2011-02-23 Jsr株式会社 Composition for forming silicon / cobalt film and method for forming silicon / cobalt film
AT500782B8 (en) * 2004-11-19 2007-02-15 Plansee Se METHOD FOR SEPARATING LAYERS FROM IONIC LIQUIDS

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1445772A (en) * 1973-08-01 1976-08-11 Rhone Poulenc Textile Process for silvering polyamides
GB1448831A (en) * 1972-10-31 1976-09-08 Siemens Ag Currentless plating of solid bodies with nickel
GB1461036A (en) * 1974-02-22 1977-01-13 Kollmorgen Corp Process and liquid for the catalytic sensitization of non- metallic surfaces for subsequent electroless metallization
GB1468973A (en) * 1975-07-18 1977-03-30 Atomic Energy Authority Uk Microcircuit packages
GB1473223A (en) * 1975-09-04 1977-05-11 Welwyn Electric Ltd Circuit board blanks
GB1482708A (en) * 1973-12-07 1977-08-10 Surface Tech Inc Catalytic treatment of non-conductors for chemical platin
GB1496009A (en) * 1972-04-24 1977-12-21 Rhone Poulenc Textile Process for increasing the electrical conductivity of synthetic polymer articles
GB1528015A (en) * 1974-10-04 1978-10-11 Surface Tech Inc Electroless plating
GB2037327A (en) * 1978-11-27 1980-07-09 Macdermid Inc Electroless copper deposition
GB2095292A (en) * 1981-03-23 1982-09-29 Hooker Chemicals Plastics Corp Electroless gold plating

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3635761A (en) * 1970-05-05 1972-01-18 Mobil Oil Corp Electroless deposition of metals
FR2196394A1 (en) * 1972-08-19 1974-03-15 Metallgesellschaft Ag Plating inner walls of chemical appts - by chemical reduction or organo-metal cpds dissolved in hydrocarbons

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1496009A (en) * 1972-04-24 1977-12-21 Rhone Poulenc Textile Process for increasing the electrical conductivity of synthetic polymer articles
GB1448831A (en) * 1972-10-31 1976-09-08 Siemens Ag Currentless plating of solid bodies with nickel
GB1445772A (en) * 1973-08-01 1976-08-11 Rhone Poulenc Textile Process for silvering polyamides
GB1482708A (en) * 1973-12-07 1977-08-10 Surface Tech Inc Catalytic treatment of non-conductors for chemical platin
GB1461036A (en) * 1974-02-22 1977-01-13 Kollmorgen Corp Process and liquid for the catalytic sensitization of non- metallic surfaces for subsequent electroless metallization
GB1528015A (en) * 1974-10-04 1978-10-11 Surface Tech Inc Electroless plating
GB1468973A (en) * 1975-07-18 1977-03-30 Atomic Energy Authority Uk Microcircuit packages
GB1473223A (en) * 1975-09-04 1977-05-11 Welwyn Electric Ltd Circuit board blanks
GB2037327A (en) * 1978-11-27 1980-07-09 Macdermid Inc Electroless copper deposition
GB2095292A (en) * 1981-03-23 1982-09-29 Hooker Chemicals Plastics Corp Electroless gold plating

Also Published As

Publication number Publication date
IT8448429A0 (en) 1984-06-20
CH656401A5 (en) 1986-06-30
IT1177814B (en) 1987-08-26
ATA179684A (en) 1986-12-15
DE3422731A1 (en) 1985-01-31
FR2549497A1 (en) 1985-01-25
JPS6026668A (en) 1985-02-09
GB8418549D0 (en) 1984-08-22

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