GB2083698B - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
GB2083698B
GB2083698B GB8123805A GB8123805A GB2083698B GB 2083698 B GB2083698 B GB 2083698B GB 8123805 A GB8123805 A GB 8123805A GB 8123805 A GB8123805 A GB 8123805A GB 2083698 B GB2083698 B GB 2083698B
Authority
GB
United Kingdom
Prior art keywords
semiconductor device
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8123805A
Other languages
English (en)
Other versions
GB2083698A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suwa Seikosha KK
Original Assignee
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suwa Seikosha KK filed Critical Suwa Seikosha KK
Publication of GB2083698A publication Critical patent/GB2083698A/en
Application granted granted Critical
Publication of GB2083698B publication Critical patent/GB2083698B/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00Interconnections in chips, wafers or substrates
    • H10W20/01Manufacture or treatment
    • H10W20/021Manufacture or treatment of interconnections within wafers or substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/20Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311Gate electrodes for field-effect devices
    • H10D64/411Gate electrodes for field-effect devices for FETs
    • H10D64/511Gate electrodes for field-effect devices for FETs for IGFETs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P32/00Diffusion of dopants within, into or out of wafers, substrates or parts of devices
    • H10P32/30Diffusion for doping of conductive or resistive layers
    • H10P32/302Doping polycrystalline silicon or amorphous silicon layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00Interconnections in chips, wafers or substrates
    • H10W20/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00Interconnections in chips, wafers or substrates
    • H10W20/40Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
GB8123805A 1980-09-08 1981-08-04 Semiconductor device Expired GB2083698B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55124264A JPS5748270A (en) 1980-09-08 1980-09-08 Semiconductor device

Publications (2)

Publication Number Publication Date
GB2083698A GB2083698A (en) 1982-03-24
GB2083698B true GB2083698B (en) 1984-10-31

Family

ID=14881022

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8123805A Expired GB2083698B (en) 1980-09-08 1981-08-04 Semiconductor device

Country Status (5)

Country Link
JP (1) JPS5748270A (enExample)
DE (1) DE3135103A1 (enExample)
FR (1) FR2490011B1 (enExample)
GB (1) GB2083698B (enExample)
NL (1) NL188606C (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04194693A (ja) * 1990-11-28 1992-07-14 Mitsui Eng & Shipbuild Co Ltd 道路空洞探査レーダシステム

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS583380B2 (ja) * 1977-03-04 1983-01-21 株式会社日立製作所 半導体装置とその製造方法

Also Published As

Publication number Publication date
FR2490011B1 (fr) 1985-09-27
FR2490011A1 (fr) 1982-03-12
NL188606B (nl) 1992-03-02
NL188606C (nl) 1992-08-03
JPS5748270A (en) 1982-03-19
JPH0216019B2 (enExample) 1990-04-13
GB2083698A (en) 1982-03-24
NL8103565A (nl) 1982-04-01
DE3135103A1 (de) 1982-05-06
DE3135103C2 (enExample) 1988-07-14

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19920804