GB2071853B - Pressure sensor - Google Patents

Pressure sensor

Info

Publication number
GB2071853B
GB2071853B GB8106878A GB8106878A GB2071853B GB 2071853 B GB2071853 B GB 2071853B GB 8106878 A GB8106878 A GB 8106878A GB 8106878 A GB8106878 A GB 8106878A GB 2071853 B GB2071853 B GB 2071853B
Authority
GB
United Kingdom
Prior art keywords
pressure sensor
sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8106878A
Other languages
English (en)
Other versions
GB2071853A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19803008572 external-priority patent/DE3008572C2/de
Priority claimed from DE19803009811 external-priority patent/DE3009811A1/de
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of GB2071853A publication Critical patent/GB2071853A/en
Application granted granted Critical
Publication of GB2071853B publication Critical patent/GB2071853B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0044—Constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
GB8106878A 1980-03-06 1981-03-05 Pressure sensor Expired GB2071853B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19803008572 DE3008572C2 (de) 1980-03-06 1980-03-06 Druckmeßdose
DE19803009811 DE3009811A1 (de) 1980-03-14 1980-03-14 Druckmessdose

Publications (2)

Publication Number Publication Date
GB2071853A GB2071853A (en) 1981-09-23
GB2071853B true GB2071853B (en) 1984-05-10

Family

ID=25784117

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8106878A Expired GB2071853B (en) 1980-03-06 1981-03-05 Pressure sensor

Country Status (4)

Country Link
US (1) US4382247A (OSRAM)
FR (1) FR2477709A1 (OSRAM)
GB (1) GB2071853B (OSRAM)
IT (1) IT1135557B (OSRAM)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6079276A (en) 1995-02-28 2000-06-27 Rosemount Inc. Sintered pressure sensor for a pressure transmitter
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
US6508129B1 (en) 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
US6516671B2 (en) 2000-01-06 2003-02-11 Rosemount Inc. Grain growth of electrical interconnection for microelectromechanical systems (MEMS)
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS597234A (ja) * 1982-07-05 1984-01-14 Aisin Seiki Co Ltd 圧力センサ
USRE33518E (en) * 1983-04-29 1991-01-15 Baxter International, Inc. Pressure transducer assembly
NO157119C (no) * 1985-07-12 1988-01-20 Warren M Brodey HŸndbetjent organ tilknyttet et kybernetisk system, samt anvendelse av organet.
DE8525588U1 (de) * 1985-09-07 1987-01-08 Robert Bosch Gmbh, 7000 Stuttgart Drucksensor
IT1187900B (it) * 1986-02-10 1987-12-23 Marelli Autronica Dispositivo sensore di pressione
US4984467A (en) * 1988-03-15 1991-01-15 Pfister Gmbh Transducer for pressures and/or vibrations and method for manufacturing thereof
DE3829195A1 (de) * 1988-08-29 1990-03-08 Bosch Gmbh Robert Temperaturfuehler
DE3829194A1 (de) * 1988-08-29 1990-03-08 Bosch Gmbh Robert Einrichtung zur messung einer stroemenden luftmenge
US5099738A (en) * 1989-01-03 1992-03-31 Hotz Instruments Technology, Inc. MIDI musical translator
DE3912217A1 (de) * 1989-04-13 1990-10-18 Endress Hauser Gmbh Co Drucksensor
US5279040A (en) * 1990-05-18 1994-01-18 Robert Bosch Gmbh Fluid-based acceleration and tilt sensor
US5189916A (en) * 1990-08-24 1993-03-02 Ngk Spark Plug Co., Ltd. Pressure sensor
DE4121390C2 (de) * 1991-06-28 1994-10-20 Bosch Gmbh Robert Verfahren zum Herstellen einer freitragenden Dickschichtstruktur
GB2308447A (en) * 1995-12-22 1997-06-25 Ultra Hydraulics Ltd Pressure sensing device
US5945605A (en) * 1997-11-19 1999-08-31 Sensym, Inc. Sensor assembly with sensor boss mounted on substrate
JP4334139B2 (ja) * 1997-12-23 2009-09-30 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング 容量式の真空測定セルのためのダイヤフラム
WO1999034184A1 (de) 1997-12-23 1999-07-08 Unaxis Trading Ag Kapazitive vakuummesszelle
US6536258B1 (en) * 1998-11-04 2003-03-25 The University Of Toledo Blast load simulation system
GB2344179A (en) * 1998-11-28 2000-05-31 Ford Global Tech Inc Spark plug with combustion pressure sensor
DE10203024B4 (de) * 2002-01-26 2009-11-26 Robert Bosch Gmbh Verfahren zur Herstellung eines Keramiksubstrats
US6848316B2 (en) 2002-05-08 2005-02-01 Rosemount Inc. Pressure sensor assembly
DE502004001604D1 (de) * 2004-05-05 2006-11-09 Schreiner Group Gmbh & Co Kg Verfahren zum Abdecken und Belüften eines Funktionsbereichs und Folienanordnung zur Durchführung des Verfahrens
US7615834B2 (en) * 2006-02-28 2009-11-10 The Board Of Trustees Of The Leland Stanford Junior University Capacitive micromachined ultrasonic transducer(CMUT) with varying thickness membrane
US8042401B2 (en) * 2008-06-12 2011-10-25 Rosemount, Inc. Isolation system for process pressure measurement

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3455165A (en) * 1965-12-22 1969-07-15 Pierre Huet Pressure sensitive devices
DE2021479A1 (de) * 1970-05-02 1971-11-11 Kleinwaechter Hans Druckmessgeraet zur Messung von Drucken in Gasen und Fluessigkeiten
US3715638A (en) * 1971-05-10 1973-02-06 Bendix Corp Temperature compensator for capacitive pressure transducers
US3993939A (en) * 1975-01-07 1976-11-23 The Bendix Corporation Pressure variable capacitor
US4040172A (en) * 1975-05-01 1977-08-09 Kulite Semiconductor Products, Inc. Method of manufacturing integral transducer assemblies employing built-in pressure limiting
US4079508A (en) * 1975-08-13 1978-03-21 The Board Of Trustees Of The Leland Stanford Junior University Miniature absolute pressure transducer assembly and method
GB1563894A (en) * 1976-03-12 1980-04-02 Kavlico Corp Capacitive pressure transducer and method for making same
US4127840A (en) * 1977-02-22 1978-11-28 Conrac Corporation Solid state force transducer

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6079276A (en) 1995-02-28 2000-06-27 Rosemount Inc. Sintered pressure sensor for a pressure transmitter
US6082199A (en) 1995-02-28 2000-07-04 Rosemount Inc. Pressure sensor cavity etched with hot POCL3 gas
US6089097A (en) 1995-02-28 2000-07-18 Rosemount Inc. Elongated pressure sensor for a pressure transmitter
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
US6508129B1 (en) 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
US6516671B2 (en) 2000-01-06 2003-02-11 Rosemount Inc. Grain growth of electrical interconnection for microelectromechanical systems (MEMS)
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier

Also Published As

Publication number Publication date
FR2477709A1 (fr) 1981-09-11
GB2071853A (en) 1981-09-23
IT8119877A0 (it) 1981-02-20
IT1135557B (it) 1986-08-27
US4382247A (en) 1983-05-03
FR2477709B1 (OSRAM) 1984-05-25

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20000305