GB2070234B - X-y addressable workpiece positioner - Google Patents

X-y addressable workpiece positioner

Info

Publication number
GB2070234B
GB2070234B GB8005833A GB8005833A GB2070234B GB 2070234 B GB2070234 B GB 2070234B GB 8005833 A GB8005833 A GB 8005833A GB 8005833 A GB8005833 A GB 8005833A GB 2070234 B GB2070234 B GB 2070234B
Authority
GB
United Kingdom
Prior art keywords
workpiece positioner
addressable workpiece
addressable
positioner
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8005833A
Other versions
GB2070234A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Optimetrix Corp
Original Assignee
Optimetrix Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optimetrix Corp filed Critical Optimetrix Corp
Priority to GB8005833A priority Critical patent/GB2070234B/en
Publication of GB2070234A publication Critical patent/GB2070234A/en
Application granted granted Critical
Publication of GB2070234B publication Critical patent/GB2070234B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
GB8005833A 1980-02-21 1980-02-21 X-y addressable workpiece positioner Expired GB2070234B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB8005833A GB2070234B (en) 1980-02-21 1980-02-21 X-y addressable workpiece positioner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8005833A GB2070234B (en) 1980-02-21 1980-02-21 X-y addressable workpiece positioner

Publications (2)

Publication Number Publication Date
GB2070234A GB2070234A (en) 1981-09-03
GB2070234B true GB2070234B (en) 1984-07-11

Family

ID=10511544

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8005833A Expired GB2070234B (en) 1980-02-21 1980-02-21 X-y addressable workpiece positioner

Country Status (1)

Country Link
GB (1) GB2070234B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61110499A (en) * 1984-11-05 1986-05-28 株式会社日立製作所 Position correction system for automatic electronic conponent inserter
DE4206544A1 (en) * 1992-03-02 1993-09-09 Lpkf Cad Cam Systeme In Thueri Two-coordinate distance measurement system - has photoelectric incremental sensor arrangement with opaque scanning plates and window pair groups with line rasters

Also Published As

Publication number Publication date
GB2070234A (en) 1981-09-03

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Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee