GB2070234B - X-y addressable workpiece positioner - Google Patents
X-y addressable workpiece positionerInfo
- Publication number
- GB2070234B GB2070234B GB8005833A GB8005833A GB2070234B GB 2070234 B GB2070234 B GB 2070234B GB 8005833 A GB8005833 A GB 8005833A GB 8005833 A GB8005833 A GB 8005833A GB 2070234 B GB2070234 B GB 2070234B
- Authority
- GB
- United Kingdom
- Prior art keywords
- workpiece positioner
- addressable workpiece
- addressable
- positioner
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB8005833A GB2070234B (en) | 1980-02-21 | 1980-02-21 | X-y addressable workpiece positioner |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB8005833A GB2070234B (en) | 1980-02-21 | 1980-02-21 | X-y addressable workpiece positioner |
Publications (2)
Publication Number | Publication Date |
---|---|
GB2070234A GB2070234A (en) | 1981-09-03 |
GB2070234B true GB2070234B (en) | 1984-07-11 |
Family
ID=10511544
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB8005833A Expired GB2070234B (en) | 1980-02-21 | 1980-02-21 | X-y addressable workpiece positioner |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB2070234B (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61110499A (en) * | 1984-11-05 | 1986-05-28 | 株式会社日立製作所 | Position correction system for automatic electronic conponent inserter |
DE4206544A1 (en) * | 1992-03-02 | 1993-09-09 | Lpkf Cad Cam Systeme In Thueri | Two-coordinate distance measurement system - has photoelectric incremental sensor arrangement with opaque scanning plates and window pair groups with line rasters |
-
1980
- 1980-02-21 GB GB8005833A patent/GB2070234B/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
GB2070234A (en) | 1981-09-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
732 | Registration of transactions, instruments or events in the register (sect. 32/1977) | ||
PCNP | Patent ceased through non-payment of renewal fee |