GB2044925B - Detecting defects in patterns - Google Patents

Detecting defects in patterns

Info

Publication number
GB2044925B
GB2044925B GB8008672A GB8008672A GB2044925B GB 2044925 B GB2044925 B GB 2044925B GB 8008672 A GB8008672 A GB 8008672A GB 8008672 A GB8008672 A GB 8008672A GB 2044925 B GB2044925 B GB 2044925B
Authority
GB
United Kingdom
Prior art keywords
patterns
detecting defects
defects
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8008672A
Other versions
GB2044925A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RCA Corp
Original Assignee
RCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/021,822 external-priority patent/US4292672A/en
Application filed by RCA Corp filed Critical RCA Corp
Publication of GB2044925A publication Critical patent/GB2044925A/en
Application granted granted Critical
Publication of GB2044925B publication Critical patent/GB2044925B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
GB8008672A 1979-03-19 1980-03-14 Detecting defects in patterns Expired GB2044925B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US2182679A 1979-03-19 1979-03-19
US06/021,822 US4292672A (en) 1979-03-19 1979-03-19 Inspection system for detecting defects in regular patterns

Publications (2)

Publication Number Publication Date
GB2044925A GB2044925A (en) 1980-10-22
GB2044925B true GB2044925B (en) 1983-02-09

Family

ID=26695138

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8008672A Expired GB2044925B (en) 1979-03-19 1980-03-14 Detecting defects in patterns

Country Status (9)

Country Link
KR (1) KR830001829B1 (en)
CA (1) CA1140251A (en)
DD (1) DD149585A5 (en)
DE (1) DE3010559C2 (en)
FI (1) FI800767A (en)
FR (1) FR2452101A1 (en)
GB (1) GB2044925B (en)
IT (1) IT1130315B (en)
PL (1) PL137040B1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1196085A (en) * 1980-11-07 1985-10-29 John W.V. Miller Method and apparatus for detecting defects in glass bottles using event proximity
EP0194331B1 (en) * 1985-03-14 1990-07-18 Toppan Printing Co., Ltd. Inspecting device for print
DE3522179A1 (en) * 1985-06-21 1987-01-02 Forschungsgemeinschaft Aut Sic Device for carrying out optical measurements on installed windscreens
DE3737869A1 (en) * 1987-11-09 1989-05-24 Wagner Hans Juergen Dipl Ing Method and device for the optical testing of objects

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1234941A (en) * 1967-08-16 1971-06-09 Emi Ltd Improvements in or relating to pattern recognition devices
US3620630A (en) * 1969-05-28 1971-11-16 Raytheon Co Radiation-sensitive mesh defect inspection system

Also Published As

Publication number Publication date
PL137040B1 (en) 1986-04-30
DD149585A5 (en) 1981-07-15
IT1130315B (en) 1986-06-11
DE3010559A1 (en) 1980-10-23
FI800767A (en) 1980-09-20
KR830001829B1 (en) 1983-09-12
FR2452101A1 (en) 1980-10-17
DE3010559C2 (en) 1984-07-12
PL222821A1 (en) 1981-01-30
GB2044925A (en) 1980-10-22
FR2452101B1 (en) 1984-07-20
IT8020392A0 (en) 1980-03-06
CA1140251A (en) 1983-01-25

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee