GB2102122B - Detecting defects in a pattern - Google Patents
Detecting defects in a patternInfo
- Publication number
- GB2102122B GB2102122B GB08219801A GB8219801A GB2102122B GB 2102122 B GB2102122 B GB 2102122B GB 08219801 A GB08219801 A GB 08219801A GB 8219801 A GB8219801 A GB 8219801A GB 2102122 B GB2102122 B GB 2102122B
- Authority
- GB
- United Kingdom
- Prior art keywords
- pattern
- detecting defects
- defects
- detecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/024—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of diode-array scanning
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/0006—Industrial image inspection using a design-rule based approach
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V10/00—Arrangements for image or video recognition or understanding
- G06V10/40—Extraction of image or video features
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V10/00—Arrangements for image or video recognition or understanding
- G06V10/40—Extraction of image or video features
- G06V10/46—Descriptors for shape, contour or point-related descriptors, e.g. scale invariant feature transform [SIFT] or bags of words [BoW]; Salient regional features
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30141—Printed circuit board [PCB]
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB08219801A GB2102122B (en) | 1981-07-22 | 1982-07-08 | Detecting defects in a pattern |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB8122618 | 1981-07-22 | ||
GB08219801A GB2102122B (en) | 1981-07-22 | 1982-07-08 | Detecting defects in a pattern |
Publications (2)
Publication Number | Publication Date |
---|---|
GB2102122A GB2102122A (en) | 1983-01-26 |
GB2102122B true GB2102122B (en) | 1985-05-15 |
Family
ID=26280212
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB08219801A Expired GB2102122B (en) | 1981-07-22 | 1982-07-08 | Detecting defects in a pattern |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB2102122B (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4625237A (en) * | 1984-10-22 | 1986-11-25 | Rca Corporation | Method for detecting blemishes contiguous to the perimeter of a CCD image |
US4605960A (en) * | 1984-10-22 | 1986-08-12 | Rca Corporation | Method for avoiding identifying perimeter variations as blemishes in a CCD image |
GB8429250D0 (en) * | 1984-11-20 | 1984-12-27 | Rosen D | Measurement method |
WO1987007808A1 (en) * | 1986-06-02 | 1987-12-17 | Iosif Baumberg | Method and system of representing information data |
US4748502A (en) * | 1986-08-18 | 1988-05-31 | Sentient Systems Technology, Inc. | Computer vision system based upon solid state image sensor |
GB8800570D0 (en) * | 1988-01-12 | 1988-02-10 | Leicester Polytechnic | Measuring method |
US5172421A (en) * | 1991-03-27 | 1992-12-15 | Hughes Aircraft Company | Automated method of classifying optical fiber flaws |
JPH0763691A (en) * | 1993-08-24 | 1995-03-10 | Toshiba Corp | Method and apparatus for inspection of pattern defect |
-
1982
- 1982-07-08 GB GB08219801A patent/GB2102122B/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
GB2102122A (en) | 1983-01-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE3477693D1 (en) | Pattern detecting apparatus | |
DE3565732D1 (en) | A coordinate detecting apparatus | |
DE3071422D1 (en) | Apparatus for detecting defects in a periodic pattern | |
GB2099606B (en) | A dimensional measurement system | |
GB2159280B (en) | Position sensing apparatus | |
DE3475841D1 (en) | Position detecting apparatus | |
GB8509182D0 (en) | Object detecting apparatus | |
DE3566932D1 (en) | Position detecting apparatus | |
DE3466066D1 (en) | Position detecting apparatus | |
GB2202326B (en) | Pattern defect detecting system | |
GB2101301B (en) | Detecting a particle agglutination pattern | |
GB2108656B (en) | Detecting substrate defects | |
DE3464803D1 (en) | Position detecting apparatus | |
GB2141538B (en) | Detecting position/alignment | |
GB2109927B (en) | Checking for surface flaws | |
EP0372788A3 (en) | Automated gauging apparatus | |
DE3278736D1 (en) | Improvements in measuring apparatus | |
GB2102122B (en) | Detecting defects in a pattern | |
GB2117897B (en) | Detecting surface defects | |
GB2095398B (en) | Detecting surface defects in workpieces | |
GB2161934B (en) | Position detecting apparatus | |
GB2092097B (en) | Inspection machine | |
EP0147205A3 (en) | Pattern inspection | |
DE3475433D1 (en) | Position sensing apparatus | |
YU185885A (en) | Device for detecting nonsealed burning elements in a set |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |