GB202402969D0 - Annular coupling system suitable for mems modal localization sensor - Google Patents

Annular coupling system suitable for mems modal localization sensor

Info

Publication number
GB202402969D0
GB202402969D0 GBGB2402969.6A GB202402969A GB202402969D0 GB 202402969 D0 GB202402969 D0 GB 202402969D0 GB 202402969 A GB202402969 A GB 202402969A GB 202402969 D0 GB202402969 D0 GB 202402969D0
Authority
GB
United Kingdom
Prior art keywords
mems
system suitable
coupling system
annular coupling
localization sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB2402969.6A
Other versions
GB2625464A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northwestern Polytechnical University
Original Assignee
Northwestern Polytechnical University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northwestern Polytechnical University filed Critical Northwestern Polytechnical University
Publication of GB202402969D0 publication Critical patent/GB202402969D0/en
Publication of GB2625464A publication Critical patent/GB2625464A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
GB2402969.6A 2021-06-21 2022-08-30 Annular coupling system suitable for MEMS modal localization sensor Pending GB2625464A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN202110686469 2021-06-21
CN202111236440.3A CN114217093B (en) 2021-06-21 2021-10-23 Annular coupling system suitable for MEMS modal localization sensor
PCT/CN2022/115835 WO2023065834A1 (en) 2021-06-21 2022-08-30 Annular coupling system suitable for mems modal localization sensor

Publications (2)

Publication Number Publication Date
GB202402969D0 true GB202402969D0 (en) 2024-04-17
GB2625464A GB2625464A (en) 2024-06-19

Family

ID=80696075

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2402969.6A Pending GB2625464A (en) 2021-06-21 2022-08-30 Annular coupling system suitable for MEMS modal localization sensor

Country Status (3)

Country Link
CN (1) CN114217093B (en)
GB (1) GB2625464A (en)
WO (1) WO2023065834A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2595292A (en) * 2020-05-21 2021-11-24 Cambridge Entpr Ltd Mode localised accelerometer
CN114217093B (en) * 2021-06-21 2024-04-26 西北工业大学 Annular coupling system suitable for MEMS modal localization sensor

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6985051B2 (en) * 2002-12-17 2006-01-10 The Regents Of The University Of Michigan Micromechanical resonator device and method of making a micromechanical device
JP2008259100A (en) * 2007-04-09 2008-10-23 Sanyo Electric Co Ltd Micromechanical resonator
US7990232B1 (en) * 2007-06-06 2011-08-02 Rf Micro Devices, Inc. Anchor/support design for MEMS resonators
US8680951B2 (en) * 2008-05-19 2014-03-25 Nxp, B.V. MEMS resonator
CN103697875B (en) * 2013-12-13 2016-11-16 上海交通大学 Pin piezoelectric solid fluctuation mode vectors correlation gyro
US9866200B2 (en) * 2014-10-22 2018-01-09 Microchip Technology Incorporated Multiple coil spring MEMS resonator
CN104931032B (en) * 2015-06-26 2018-04-10 清华大学 A kind of mass MEMS resonant formula gyroscope of single anchor point four
CN106629571B (en) * 2016-09-20 2019-04-09 西北工业大学 A kind of weak coupling MEMS resonant formula accelerometer based on mode localization effect
CN106289214B (en) * 2016-10-21 2019-03-05 中北大学 A kind of anti-HI high impact S-shaped spring beam MEMS annular vibration gyro resonance minor structure
CN106643685A (en) * 2016-11-07 2017-05-10 中北大学 Brand new U-shaped foldable beam silicon micro-annular vibration gyroscope
CN107425276B (en) * 2017-07-21 2020-03-31 西安交通大学 Circularly polarized slot antenna with filtering characteristic
CN107643423B (en) * 2017-10-26 2020-05-12 西北工业大学 Three-degree-of-freedom weak coupling resonant accelerometer based on modal localization effect
CN109110724B (en) * 2018-09-30 2024-08-02 南京理工大学 Be applied to MEMS force sensitive device's second grade stress isolation structure
CN209024198U (en) * 2018-09-30 2019-06-25 南京理工大学 A kind of second level stress isolation structure applied to MEMS force sensitive device
WO2020258176A1 (en) * 2019-06-27 2020-12-30 瑞声声学科技(深圳)有限公司 Differential resonator and mems sensor
CN111192812B (en) * 2020-01-07 2022-11-25 北京北方华创微电子装备有限公司 Inductive coupling device and semiconductor processing equipment
CN112953433B (en) * 2021-04-21 2024-06-11 中国科学院半导体研究所 Multi-beam coupled micro-electromechanical resonator
CN114217093B (en) * 2021-06-21 2024-04-26 西北工业大学 Annular coupling system suitable for MEMS modal localization sensor

Also Published As

Publication number Publication date
GB2625464A (en) 2024-06-19
WO2023065834A1 (en) 2023-04-27
CN114217093A (en) 2022-03-22
CN114217093B (en) 2024-04-26

Similar Documents

Publication Publication Date Title
GB202402969D0 (en) Annular coupling system suitable for mems modal localization sensor
GB2603683B (en) Control methods for a force sensor system
EP3577451A4 (en) Control system for a sensor assembly
EP3317792A4 (en) Robot navigational sensor system
EP3296700B8 (en) Method for determining the position of a position sensor of a position measurement system
EP3692501A4 (en) Calibrating a sensor system including multiple movable sensors
EP3983817A4 (en) A system for continuous calibration of hall sensors
EP4021331A4 (en) Systems and methods for weight-based registration of location sensors
EP3674263A4 (en) Method for preparing hydrophobic silica aerogel granules
WO2013192353A8 (en) Autonomous and controllable systems of sensors and methods of using such systems
EP3376988A4 (en) Optical force sensor for robotic surgical system
EP3471929A4 (en) Localization of a mobile system
GB202115445D0 (en) Force sensing system
EP3652866A4 (en) System and method for transmitting a signal
EP3544930A4 (en) Sensor system for a system allowing for purification and recycling of water or separation of water
EP3898293A4 (en) Tire deflection sensing system
EP3446091A4 (en) Sensing system for monitoring the integrity of a structure
EP3948345A4 (en) Visual indicators for presence sensing systems
EP3662177B8 (en) Preform for making a component of a braking system
EP3653004A4 (en) System and method for transmitting a signal
EP4310538A4 (en) Sensor system
EP4172551A4 (en) Antenna-grating sensing system
EP4006481A4 (en) Position sensor system
GB2587195B (en) A sensor system
TWI858140B (en) Visual inspection system for annular product