GB202211563D0 - Magnetic bearing and vacuum pump - Google Patents

Magnetic bearing and vacuum pump

Info

Publication number
GB202211563D0
GB202211563D0 GBGB2211563.8A GB202211563A GB202211563D0 GB 202211563 D0 GB202211563 D0 GB 202211563D0 GB 202211563 A GB202211563 A GB 202211563A GB 202211563 D0 GB202211563 D0 GB 202211563D0
Authority
GB
United Kingdom
Prior art keywords
vacuum pump
magnetic bearing
magnetic
bearing
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB2211563.8A
Other versions
GB2621344A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold GmbH filed Critical Leybold GmbH
Priority to GB2211563.8A priority Critical patent/GB2621344A/en
Publication of GB202211563D0 publication Critical patent/GB202211563D0/en
Priority to PCT/EP2023/071847 priority patent/WO2024033319A1/en
Publication of GB2621344A publication Critical patent/GB2621344A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/051—Axial thrust balancing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/0408—Passive magnetic bearings
    • F16C32/0423—Passive magnetic bearings with permanent magnets on both parts repelling each other
    • F16C32/0429—Passive magnetic bearings with permanent magnets on both parts repelling each other for both radial and axial load, e.g. conical magnets
    • F16C32/0431—Passive magnetic bearings with permanent magnets on both parts repelling each other for both radial and axial load, e.g. conical magnets with bearings for axial load combined with bearings for radial load
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0474—Active magnetic bearings for rotary movement
    • F16C32/0476—Active magnetic bearings for rotary movement with active support of one degree of freedom, e.g. axial magnetic bearings
    • F16C32/0478—Active magnetic bearings for rotary movement with active support of one degree of freedom, e.g. axial magnetic bearings with permanent magnets to support radial load
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
GB2211563.8A 2022-08-09 2022-08-09 Magnetic bearing and vacuum pump Pending GB2621344A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB2211563.8A GB2621344A (en) 2022-08-09 2022-08-09 Magnetic bearing and vacuum pump
PCT/EP2023/071847 WO2024033319A1 (en) 2022-08-09 2023-08-07 Magnetic bearing and vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2211563.8A GB2621344A (en) 2022-08-09 2022-08-09 Magnetic bearing and vacuum pump

Publications (2)

Publication Number Publication Date
GB202211563D0 true GB202211563D0 (en) 2022-09-21
GB2621344A GB2621344A (en) 2024-02-14

Family

ID=84546179

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2211563.8A Pending GB2621344A (en) 2022-08-09 2022-08-09 Magnetic bearing and vacuum pump

Country Status (2)

Country Link
GB (1) GB2621344A (en)
WO (1) WO2024033319A1 (en)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0646036B2 (en) * 1982-11-19 1994-06-15 セイコー電子工業株式会社 Axial flow molecular pump
JP2688624B2 (en) * 1988-07-29 1997-12-10 株式会社フェローテック Operation control method of turbo molecular pump
JP2805317B2 (en) * 1988-12-15 1998-09-30 セイコー精機株式会社 Turbo molecular pump
JPH04119222A (en) * 1990-09-07 1992-04-20 Nippon Ferrofluidics Kk Magnetic bearing device
JPH0712091A (en) * 1993-09-24 1995-01-17 Ebara Corp Magnetic bearing device
US6201329B1 (en) * 1997-10-27 2001-03-13 Mohawk Innovative Technology, Inc. Pump having magnetic bearing for pumping blood and the like
DE10022061A1 (en) * 2000-05-06 2001-11-08 Leybold Vakuum Gmbh Magnetic bearing arrangement with damping device especially for turbo-compressor, has two bearings each including stator annular magnet stack and rotor annular magnet stack
DE10043235A1 (en) * 2000-09-02 2002-03-14 Leybold Vakuum Gmbh vacuum pump

Also Published As

Publication number Publication date
GB2621344A (en) 2024-02-14
WO2024033319A1 (en) 2024-02-15

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