GB2615365B - Bearing assembly and vacuum pump - Google Patents

Bearing assembly and vacuum pump Download PDF

Info

Publication number
GB2615365B
GB2615365B GB2201596.0A GB202201596A GB2615365B GB 2615365 B GB2615365 B GB 2615365B GB 202201596 A GB202201596 A GB 202201596A GB 2615365 B GB2615365 B GB 2615365B
Authority
GB
United Kingdom
Prior art keywords
vacuum pump
bearing assembly
bearing
assembly
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB2201596.0A
Other versions
GB2615365A (en
Inventor
Cobbett Andrew
Glyn Horler Richard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GB2201596.0A priority Critical patent/GB2615365B/en
Priority to TW112103833A priority patent/TW202415861A/en
Priority to PCT/GB2023/050262 priority patent/WO2023152476A1/en
Publication of GB2615365A publication Critical patent/GB2615365A/en
Application granted granted Critical
Publication of GB2615365B publication Critical patent/GB2615365B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/0408—Passive magnetic bearings
    • F16C32/0423—Passive magnetic bearings with permanent magnets on both parts repelling each other
    • F16C32/0425—Passive magnetic bearings with permanent magnets on both parts repelling each other for radial load mainly
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
GB2201596.0A 2022-02-08 2022-02-08 Bearing assembly and vacuum pump Active GB2615365B (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB2201596.0A GB2615365B (en) 2022-02-08 2022-02-08 Bearing assembly and vacuum pump
TW112103833A TW202415861A (en) 2022-02-08 2023-02-03 Bearing assembly and vacuum pump
PCT/GB2023/050262 WO2023152476A1 (en) 2022-02-08 2023-02-07 Bearing assembly and vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2201596.0A GB2615365B (en) 2022-02-08 2022-02-08 Bearing assembly and vacuum pump

Publications (2)

Publication Number Publication Date
GB2615365A GB2615365A (en) 2023-08-09
GB2615365B true GB2615365B (en) 2024-04-24

Family

ID=85283601

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2201596.0A Active GB2615365B (en) 2022-02-08 2022-02-08 Bearing assembly and vacuum pump

Country Status (3)

Country Link
GB (1) GB2615365B (en)
TW (1) TW202415861A (en)
WO (1) WO2023152476A1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5209631A (en) * 1990-07-16 1993-05-11 Arthur Pfeiffer Vakummtechnik Wetzlar Gmbh Arrangement for flooding high speed vacuum pumps
US20110123358A1 (en) * 2008-07-31 2011-05-26 Oerlikon Leybold Vacuum Gmbh Vacuum pump
EP2708753A2 (en) * 2012-09-14 2014-03-19 Pfeiffer Vacuum Gmbh Method for centring a vacuum pump and/or reducing a magnetic leakage field of a vacuum pump or a rotary unit for a vacuum pump

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2804476B1 (en) * 2000-01-31 2002-04-12 Cit Alcatel DAMPING SYSTEM AND BEARING CENTER FOR VACUUM PUMP ON MAGNETIC BEARING
DE102014116241B4 (en) * 2014-11-07 2020-05-28 Pfeiffer Vacuum Gmbh Vacuum pump

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5209631A (en) * 1990-07-16 1993-05-11 Arthur Pfeiffer Vakummtechnik Wetzlar Gmbh Arrangement for flooding high speed vacuum pumps
US20110123358A1 (en) * 2008-07-31 2011-05-26 Oerlikon Leybold Vacuum Gmbh Vacuum pump
EP2708753A2 (en) * 2012-09-14 2014-03-19 Pfeiffer Vacuum Gmbh Method for centring a vacuum pump and/or reducing a magnetic leakage field of a vacuum pump or a rotary unit for a vacuum pump

Also Published As

Publication number Publication date
GB2615365A (en) 2023-08-09
TW202415861A (en) 2024-04-16
WO2023152476A1 (en) 2023-08-17

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