GB202019836D0 - Evaporator body - Google Patents
Evaporator bodyInfo
- Publication number
- GB202019836D0 GB202019836D0 GBGB2019836.2A GB202019836A GB202019836D0 GB 202019836 D0 GB202019836 D0 GB 202019836D0 GB 202019836 A GB202019836 A GB 202019836A GB 202019836 D0 GB202019836 D0 GB 202019836D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- evaporator body
- evaporator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102018113528.9A DE102018113528B4 (en) | 2018-06-06 | 2018-06-06 | evaporator body |
PCT/EP2019/063317 WO2019233775A1 (en) | 2018-06-06 | 2019-05-23 | Evaporator body |
Publications (3)
Publication Number | Publication Date |
---|---|
GB202019836D0 true GB202019836D0 (en) | 2021-01-27 |
GB2589481A GB2589481A (en) | 2021-06-02 |
GB2589481B GB2589481B (en) | 2022-11-23 |
Family
ID=66857858
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB2019836.2A Active GB2589481B (en) | 2018-06-06 | 2019-05-23 | Evaporator body |
Country Status (4)
Country | Link |
---|---|
CN (1) | CN112218974B (en) |
DE (1) | DE102018113528B4 (en) |
GB (1) | GB2589481B (en) |
WO (1) | WO2019233775A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP4200458A1 (en) * | 2020-08-19 | 2023-06-28 | 3M Innovative Properties Company | Evaporation boat for evaporation of metals |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4704605B2 (en) * | 2001-05-23 | 2011-06-15 | 淳二 城戸 | Continuous vapor deposition apparatus, vapor deposition apparatus and vapor deposition method |
JP2006118017A (en) * | 2004-10-25 | 2006-05-11 | Denki Kagaku Kogyo Kk | Metal-evaporating heater |
JP4425860B2 (en) * | 2003-11-20 | 2010-03-03 | 電気化学工業株式会社 | Metal evaporation heating element and metal evaporation method |
CN100487154C (en) * | 2003-11-20 | 2009-05-13 | 电气化学工业株式会社 | Metal vaporizing heating element and metal vaporizing method |
US7494616B2 (en) * | 2005-11-04 | 2009-02-24 | Momentive Performance Materials Inc. | Container for evaporation of metal and method to manufacture thereof |
JP4772705B2 (en) | 2007-01-15 | 2011-09-14 | 電気化学工業株式会社 | Metal evaporation heating element |
DE102013211034B4 (en) | 2013-06-13 | 2024-03-28 | Kennametal Inc. | Evaporator body and method for vaporizing an object using such an evaporator body |
DE102015211746B4 (en) * | 2015-06-24 | 2023-08-24 | Kennametal Inc. | Evaporator body and operation of such an evaporator body |
-
2018
- 2018-06-06 DE DE102018113528.9A patent/DE102018113528B4/en active Active
-
2019
- 2019-05-23 GB GB2019836.2A patent/GB2589481B/en active Active
- 2019-05-23 CN CN201980037537.6A patent/CN112218974B/en active Active
- 2019-05-23 WO PCT/EP2019/063317 patent/WO2019233775A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
GB2589481A (en) | 2021-06-02 |
DE102018113528A1 (en) | 2019-12-12 |
GB2589481B (en) | 2022-11-23 |
CN112218974B (en) | 2023-02-17 |
DE102018113528B4 (en) | 2022-07-28 |
WO2019233775A1 (en) | 2019-12-12 |
CN112218974A (en) | 2021-01-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
789A | Request for publication of translation (sect. 89(a)/1977) |
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