CN100487154C - Metal vaporizing heating element and metal vaporizing method - Google Patents
Metal vaporizing heating element and metal vaporizing method Download PDFInfo
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- CN100487154C CN100487154C CNB2004800262969A CN200480026296A CN100487154C CN 100487154 C CN100487154 C CN 100487154C CN B2004800262969 A CNB2004800262969 A CN B2004800262969A CN 200480026296 A CN200480026296 A CN 200480026296A CN 100487154 C CN100487154 C CN 100487154C
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Abstract
A metal vaporizing boat capable of improving wettability to molten metal to attain a long service life, and a metal vaporizing method using it. A metal vaporizing heating element characterized by comprising one or two or more grooves formed, in a direction not parallel to a conduction direction, in the upper surface of a ceramic sintered body containing titanium diboride (TiB2) and/or zirconium diboride (ZrB2) and boron nitride (BN). It is preferable, in this case, that a direction not parallel to a conduction direction crosses a conduction direction at 20-160 DEG , the ceramic sintered body has a cavity in the bottom surface of which grooves are formed, and desired patterns are drawn on the upper surface of the ceramic sintered body and/or the upper surface of the cavity by a plurality of grooves. In addition, a metal vaporizing method characterized by heating this metal vaporizing heating element in vacuum with part or all of its grooves kept in contact with metal.
Description
Technical field
The present invention relates to metal evaporation heating element and evaporation of metals method.
Background technology
In the past, evaporation of metal heating element (following also claim " boat ") was known for example with boron nitride (BN), aluminium nitride (AlN) and TiB2 (TiB
2) be the heating element (the special public clear 53-20256 communique of Japanese Patent) that the upper surface of the electroconductibility ceramic sintered bodies of main component forms recess.Its example of product sold on market has Denki Kagaku Kogyo kabushiki's system trade(brand)name " BN コ Application Port ジ Star ト EC ".
The using method of boat is as follows: with the two ends of boat junctor connection electrode, impressed voltage makes its heating, makes metal melting, the evaporations such as Al wire rod of putting into recess, obtains the vapor-deposited film postcooling.Such operation is carried out repeatedly, is subjected to the erosion of cold cycling and molten metal therebetween and reaches the life-span.
The life-span of boat and molten metal have much relations to the wettability of boat, if wettability is poor, molten metal localization and can't reach the original evaporation efficient of boat not only then, and quicken molten metal the corrosive of boat is carried out speed, the lost of life of boat.Therefore,, thought various ways, as carried out laser radiation (the Japanese Patent spy opens the 2000-93788 communique) etc., but do not realized sufficient long lifetime in order to ensure the wettability of boat.In addition, laser radiation needs a lot of devices, equipment.
The announcement of invention
The problem that invention will solve
The object of the present invention is to provide wettability, the evaporation of metal heating element (boat) of realizing long lifetime that can improve and use its evaporation of metals method molten metal.
(1) the evaporation of metal heating element is characterized in that, is containing TiB2 (TiB
2) and/or zirconium diboride (ZrB
2) and boron nitride (BN) and the upper surface of the ceramic sintered bodies that constitutes has the ditch more than 1 or 2 on not parallel with energising direction direction, and the width of ditch is 0.1～1.5mm, and the degree of depth is 0.03～1mm, and length is more than 1mm.
(2) above-mentioned (1) described evaporation of metal heating element, its feature also be, has ditch more than 2 with the interval below the 2mm.
(3) the described evaporation of metal heating element in above-mentioned (1) or (2), its feature is that also the quantity of ditch is more than 10.
(4) each described evaporation of metal heating element in above-mentioned (1)～(3), its feature are that also not parallel with energising direction direction is 20～160 degree with respect to the energising direction.
(5) above-mentioned (4) described evaporation of metal heating element, its feature also is, makes between the ditch and intersects, and makes it have point of crossing, a place at least.
(6) each described evaporation of metal heating element in above-mentioned (1)～(5), its feature is that also ceramic sintered bodies has recess, has ditch in the bottom surface of recess and/or the upper surface of ceramic sintered bodies.
(7) each described evaporation of metal heating element in above-mentioned (1)～(6), its feature also is, constitutes pattern in the bottom surface of recess and/or the upper surface of ceramic sintered bodies by many ditches.
(8) above-mentioned (7) described evaporation of metal heating element, its feature also is, the area ratio/occupancy ratio of pattern have under the situation of recess with respect to the floorage of recess, under the situation that does not have recess with respect to the upper surface area of ceramic sintered bodies respectively more than 30%.
(9) above-mentioned (8) described evaporation of metal heating element, its feature is that also the area ratio/occupancy ratio of pattern is more than 50%.
(10) above-mentioned (8) described evaporation of metal heating element, its feature is that also the area ratio/occupancy ratio of pattern is more than 80%.
(11) each described evaporation of metal heating element in above-mentioned (1)～(10), its feature also be, on the degree of depth at ditch significant difference being set between a ditch or the different ditch.
(12) above-mentioned (11) described evaporation of metal heating element, its feature is that also the significant difference of the degree of depth of ditch is more than 10%.
(13) the described evaporation of metal heating element in above-mentioned (11) or (12), its feature also be, the long axis direction that will have the relative ceramic sintered bodies of ditch in deep in Duo Tiaogou is arranged near central part or its.
(14) each described evaporation of metal heating element in above-mentioned (11)～(13), its feature are that also the long axis direction that will have the relative ceramic sintered bodies of ditch of superficial part in Duo Tiaogou is arranged on one or both ends.
(15) each described evaporation of metal heating element in above-mentioned (11)～(14), its feature are that also the difference of the degree of depth of the degree of depth in the deep of ditch and the superficial part of ditch is more than 0.005mm.
(16) the evaporation of metals method is characterized in that, uses each the described evaporation of metal heating element in above-mentioned (1)～(10), under the state of part or all and the metallic contact that make its ditch, heats in vacuum.
The simple declaration of accompanying drawing
The schematic perspective view of an example of [Fig. 1] boat of the present invention.
The schematic perspective view of an example of [Fig. 2] boat of the present invention.
The schematic perspective view of an example of [Fig. 3] boat of the present invention.
The schematic perspective view of an example of [Fig. 4] boat of the present invention.
The schematic perspective view of an example of [Fig. 5] boat of the present invention.
The schematic perspective view of an example of [Fig. 6] boat of the present invention.
The schematic perspective view of an example of [Fig. 7] boat of the present invention.
The schematic perspective view of an example of [Fig. 8] boat of the present invention.
The schematic perspective view of an example of [Fig. 9] boat of the present invention.
The schematic perspective view of an example of [Figure 10] boat of the present invention.
The best mode that carries out an invention
The composition of ceramic sintered bodies used in the present invention contains conducting material TiB2 and/or zirconium diboride and megohmite boron nitride at least as neccessary composition.Can suitably make it contain megohmites such as conducting material such as titanium nitride, silicon carbide, chromium carbide and aluminium nitride, silicon nitride, aluminum oxide, silicon-dioxide, titanium oxide.Wherein, better be with TiB2 and/or zirconium diboride and boron nitride as main component, perhaps with TiB2 and/or zirconium diboride and boron nitride and aluminium nitride as main component.Good especially be contain 30～60% TiB2s and/or zirconium diboride (below, if do not specify that then % is meant quality %.) and 70～40% boron nitride, perhaps contain 35～55% TiB2s and/or zirconium diboride and 25～40% boron nitride and 5～40% aluminium nitride.If such composition, then the trade union that adds of ceramic sintered bodies is very easy to.
In addition, the relative density of ceramic sintered bodies better is more than 90%, and good especially is more than 93%.If relative density is less than 90%, then molten metal attack is to the pore of ceramic sintered bodies, thus accelerated erosion.Just can easily realize relative density more than 90% as long as in being no more than 10% scope of above-mentioned composition, add sintering aid described later.The rectangular parallelepiped of the relative density of ceramic sintered bodies by sintered compact being processed into specified dimension, will try to achieve divided by theoretical density by the actual density that its apparent size and quality are tried to achieve.
Ceramic sintered bodies used in the present invention can be made by sintering behind the mixing raw material powder forming that will contain conducting material TiB2 and/or zirconium diboride and megohmite boron nitride.
As the titanium diboride powder of raw material can by with the direct reaction of metal titanium and use oxide compounds such as titanium dioxide reduction reaction method etc. arbitrarily manufacture method obtain.Median size is preferably 5～25 μ m.
Boron nitride powder better is hexagonal boron or amorphous boron nitride or their mixture.This can make by following method: with the mixture of borax and urea under the ammonia atmosphere in the method that heats more than 800 ℃, the mixture and the nitrogenous compounds such as ammonium, Dyhard RU 100 of boric acid or boron oxide and calcium phosphate are heated to method more than 1300 ℃ etc.In addition, can via nitride boron powder heat in nitrogen atmosphere, improve crystallinity.The median size of boron nitride powder better is below 10 μ m, and good especially is below 5 μ m.
Aluminium nitride powder can pass through manufacturings such as direct nitridation method, aluminum oxide reduction method, and median size better is below 10 μ m, and good especially is below 7 μ m.
Sintering aid can use one or more the powder that is selected from alkaline earth metal oxide, rare earth oxide and the compound by adding these oxide compounds of thermosetting.Specifically can exemplify CaO, MgO, SrO, BaO, Y
2O
3, La
2O
3, Ce
2O
3, Pr
2O
3, Nd
2O
3, Pm
2O
3, Sm
2O
3, Eu
2O
3, Gd
2O
3, Tb
2O
3, Dy
2O
3, Ho
2O
3, Er
2O
3, Tm
2O
3, Yb
2O
3, Lu
2O
3Deng, and Ca (OH)
2Deng oxyhydroxide and MgCO
3Deng compound by adding these oxide compounds of thermosetting such as carbonate etc.The median size of sintering aid better is below 5 μ m, and good especially is below 1 μ m.
The mixing raw material powder that contains mentioned component better is a granulation postforming sintering.If will exemplify an example of shapings, agglomerating condition, then can be after carrying out the single shaft pressurization or isostatic cool pressing pressurization of 0.5～200MPa, carry out the normal pressure-sintered or low pressure sintering below the 1MPa under 1800～2200 ℃ the temperature.The example of better condition has 1800～2200 ℃, the hot pressing of 1～100MPa or hot isostatic pressing pressurization.
Sintering better is to be accommodated in graphite container made, boron nitride container made or with carrying out in container of boron nitride liner etc.In the pressure sintering, better be to use graphite or boron nitride container made, carry out sintering with sleeve of boron nitride liner etc.
When making boat, can be undertaken by for example being processed into suitable shape by mechanical workout etc. by ceramic sintered bodies.In addition, boat of the present invention can be provided with recess at the nearly central part of the upper surface of ceramic sintered bodies.If will exemplify the example of boat shape, then can be that overall dimensions is the tabular of vertical 100～200mm, wide (horizontal stroke) 25～35mm, thick 8～12mm.Be provided with under the situation of recess, recess is for example for indulging the rectangular shape of 90～120mm, wide (horizontal stroke) 20～32mm, thick 0.5～2mm.
Boat of the present invention is at the upper surface of ceramic sintered bodies or have under the situation of recess in the bottom surface of recess and/or the upper surface of ceramic sintered bodies, not with energising direction (being the direction of connection electrode and electrode) parallel direction, promptly as shown in Figure 1, be the angle [alpha] of regulation, has the ditch more than 1 or 2 with respect to energising direction as the long axis direction of ceramic sintered bodies.Thus, further the wetting diffustivity of inhibition and energising direction parallel direction promotes and the wetting diffustivity of the direction vertical direction of switching on that wettability further improves.
As Fig. 1～shown in Figure 10, the suitable angle [alpha] of not parallel with energising direction direction better is 20～160 degree with respect to the energising direction, and good especially is 60～120 degree.Ditch better be width be 0.1～1.5mm, the degree of depth be 0.03～1mm, length more than 1mm, good especially is that width is that 0.3～1mm, the degree of depth are that 0.05～0.2mm, the length cross section more than 10mm is an orthogonal wire shape.Even the wettability that also can improve molten metal of the quantity of ditch better is more than 2, good especially is more than 10, is more preferably more than 30.For the boat with the ditch more than 2, the interval of ditch better is below 2mm, and good especially is 0.5～1.5mm.
Wherein, better be to make between the ditch to intersect, form at least one place, better be point of crossing more than or equal to the quantity of ditch, perhaps on the bottom surface of the upper surface of ceramic sintered bodies and/or recess by the ditch configuration example as circle, ellipse, rhombus, rectangle, month shape, grid, various patterns (plane pattern) such as radial.The area ratio/occupancy ratio of pattern better is respectively more than 30% having under the situation of recess with respect to the floorage of recess, upper surface area with respect to ceramic sintered bodies under the situation that does not have recess, good especially is more than 50%, is more preferably more than 80%.In this specification sheets, the area ratio/occupancy ratio of pattern is defined as the per-cent of the value that the area that forms by the outermost ditch of being positioned at of interconnection formation pattern obtains divided by the floorage of the upper surface area of ceramic sintered bodies or recess.If replace the area ratio/occupancy ratio of pattern to represent that with the area ratio/occupancy ratio of ditch then the area ratio/occupancy ratio of the ditch of the floorage of the upper surface area of unit ceramic sintered bodies or recess better is more than 10%, good especially is more than 30%, is more preferably more than 50%.
In addition, better be on the degree of depth at ditch significant difference being set between a ditch or the different ditch at the ditch that is provided with on the ceramic sintered bodies among the present invention.Thus, can further promote the wettability of molten metal.Among the present invention, the significant difference of the degree of depth of ditch (%) is represented with following formula.The ditch that is used to measure the ditch of the degree of depth in deep of ditch and the degree of depth of the superficial part that is used to measure ditch in the following formula can be identical, also can be different.
(degree of depth of the superficial part of the degree of depth-ditch in the deep of ditch) * 100/ (degree of depth in the deep of ditch)
Among the present invention, the significant difference of the ditch that is obtained by following formula better is more than 10%, is more preferably more than 20%, and good especially is more than 30%.In addition, irrelevant with following formula or related with following formula, for the degree of depth of ditch, the difference of the degree of depth of the superficial part of the degree of depth in the deep of ditch and ditch better is more than 0.005mm, and good especially is more than the 0.1mm.
Among the present invention, the method that significant difference is set for the degree of depth of ditch has: (1) is provided with significant difference at least one ditch wherein on the degree of depth of ditch in Duo Tiaogou; (2) between the ditch more than two, on the degree of depth of ditch, significant difference is set; Perhaps (3) are undertaken by both combinations.
Under the situation of the method for above-mentioned (1), article one, the deep of ditch better be arranged on the long axis direction of ditch better be length 10～80% middle body, good especially be 40～60% middle body of length, superficial part is arranged at the remaining end sections of long axis direction.
The ditch that under the situation of the method for above-mentioned (2), reaches " ditch deep " can be identical with the ditch that reaches " ditch superficial part ", also can be different.In addition, can be the different Duo Tiaogou of the degree of depth with homogeneous degree of depth, also can be at least one ditch of many ditches is the uneven ditch of the degree of depth as (1).In addition, the situation of above-mentioned (3) has the ditch of the homogeneous degree of depth and has the mode of the ditch of the heterogeneity degree of depth for combination.
In addition, under the situation of above-mentioned (2) or (3), the ditch that the ditch that the degree of depth is big (comprising the ditch with deep) and the degree of depth are little (comprising the ditch with superficial part) can for example alternately be provided with, two above compartment of terrains are provided with, are provided with randomly etc., is freely fully.But the ditch that the degree of depth is big better is arranged on (comprising the ditch with deep) near the central part of long axis direction of ceramic sintered bodies or its.Here, the central part of the long axis direction of ceramic sintered bodies or what better be meant the ceramic sintered bodies total length near it better is 20～80% middle section, be more preferably 30～70% middle section, good especially be 40～60% middle section.And, better be to be provided with than dark ditch (comprising ditch) the more shallow ditch of the degree of depth with deep at the end regions except that these middle sections.Especially, in the zone, one or both ends of the long axis direction of ceramic sintered bodies, the ditch of least significant end better is superficial part.
Among the present invention, good especially be by wide 0.1～1.5mm, more than the long 1mm, many ditches of dark 0.03～1.0mm constitute, the significant difference of the degree of depth of ditch is more than 10%, and the difference of the degree of depth of the superficial part of the degree of depth in the deep of ditch and ditch is more than 0.005mm.
The processing of the ditch in the ceramic sintered bodies of the present invention can be undertaken by for example methods such as mechanical workout, sandblast, water spray.
Ditch suppresses boat of the present invention and the wettability of the molten metal of energising direction parallel direction by forming.Thus, compare with the boat that does not have ditch in the past and can significantly reduce the molten metal that reaches electrode, can make evaporation of metal stabilization, high efficiency.
In order to prevent that molten metals such as aluminium from dripping from the side, boat in the past is formed with recess, but among the present invention, recess is meant the part that is formed with ditch that its size is different with function.Therefore, center dant of the present invention is not necessary, for the boat with it, better is to form the pattern that ditch or ditch constitute at least in the recess bottom surface.The schematic perspective view of the example of boat of the present invention such as Fig. 1～shown in Figure 10.
The example of Fig. 1, Fig. 2, Fig. 3, Fig. 4 is made according to embodiment 1, embodiment 3, embodiment 4, embodiment 5 respectively.All constitute pattern by ditch, and the area ratio/occupancy ratio of pattern, Fig. 1, Fig. 2 are respectively 64%, 76% with respect to the recess floorage, and Fig. 3, Fig. 4 are respectively 39%, 55% with respect to the upper surface area of ceramic sintered bodies.
In the example of Fig. 5, on the recess bottom surface, be 90 degree,, be the ditch that oval logo forms 50 the longest 24mm, wide 1mm, dark 0.15mm by mechanical workout with the interval width of different lengths, 1mm with the energising direction.The area ratio/occupancy ratio of pattern is 50% with respect to the recess floorage.
In the example of Fig. 6, on the recess bottom surface, to be 45 degree or 135 " く " word shapes of spending with the energising direction, with the interval width of 1mm, mechanical workout obtains the ditch of 44 wide 1mm, dark 0.15mm.The area ratio/occupancy ratio of pattern is 66% with respect to the recess floorage.
In the example of Fig. 7, on the recess bottom surface, to be 90 degree or 180 reticulations of spending with the energising direction, with the interval width of 1mm, mechanical workout obtains the ditch of 50 wide 1mm, dark 0.15mm.The area ratio/occupancy ratio of pattern is 60% with respect to the recess floorage.
In the example of Fig. 8, on the bottom surface of recess, be radial to the boat end, form the ditch of 20 wide 1mm, dark 0.15mm by mechanical workout from the central part of boat.The area ratio/occupancy ratio of pattern is 61% with respect to the recess floorage.
In the example of Fig. 9, on the boat upper surface beyond recess bottom surface and the recess, be 90 degree,, form the ditch of 60 long 20mm, wide 1mm, dark 0.15mm by mechanical workout with the interval width of 1.5mm with the energising direction.The area ratio/occupancy ratio of pattern is 77% with respect to the recess floorage, is 67% with respect to the upper surface area of ceramic sintered bodies.
In the example of Figure 10, on the upper surface area of ceramic sintered bodies, be 90 degree with the energising direction, interval width with 1.5mm, form the ditch (length: both ends 27mm, pars intermedia 23mm, central part 19mm) of 60 wide 1mm, dark 0.15mm, and with the parallel direction of energising direction on, form the ditch of 1 wide 1mm, dark 0.15mm, long 130mm respectively in two edge portions, form wide 1mm, the ditch of 0.15mm, long 65mm deeply on its inboard central part.The area ratio/occupancy ratio of pattern is 89% with respect to the upper surface area of ceramic sintered bodies.
Evaporation of metals method of the present invention is, supply with metals such as Al wire rod, make part or all (be under 1 the situation at ditch, comprise the part of this ditch) of its ditch portion that contacts boat of the present invention, heat, molten metal with continue heating when ditch contacts.Thus, on the object material, form the metal evaporation film.If will exemplify the example of vacuum heating conditions, then vacuum tightness better is 1 * 10
-1～1 * 10
-3Pa, temperature better is 1400～1600 ℃.
Embodiment
Embodiment 1
The mixing raw material powder of 45 quality % titanium diboride powders (median size 12 μ m), 30 quality % boron nitride powders (median size 0.7 μ m) and 25 quality % aluminium nitride powders (median size 10 μ m) is filled in the mould of graphite system, under 1750 ℃ temperature, carry out hot pressing, make ceramic sintered bodies (relative density 94.5%, diameter 200mm * high 20mm).Cut the rectangular parallelepiped of long 150mm * wide 30mm * thick 10mm from this ceramic sintered bodies, surperficial thereon central part is provided with the recess of wide 26mm * dark 1mm * long 120mm by mechanical workout.On this recess bottom surface, be 90 degree with the energising direction, with the 1mm interval width, mechanical workout forms the ditch of 50 wide 1mm, dark 0.15mm, long 20mm, makes boat.Its schematic perspective view roughly as shown in Figure 1.
Embodiment 2
Except the size with ditch is decided to be wide 0.5mm, dark 0.1mm, long 20mm, make boat similarly to Example 1.
Embodiment 3
Make boat similarly to Example 1, except following: in the recess bottom surface of boat, be 45 degree with the energising direction, form the ditch of 35 wide 1mm, dark 0.15mm, long 28mm with the interval mechanical workout of 1mm, in addition mechanical workout form 35 with these ditches vertical have be the 135 identical shaped ditches of spending inclination angles with the direction of switching on and intersect with it.Its schematic perspective view roughly as shown in Figure 2.
Embodiment 4
Make boat similarly to Example 1, except following: the upper face center portion at rectangular parallelepiped does not form recess, directly by the successive linearity ditch of 1 wide 1.5mm, dark 0.2mm, long 645mm, processing obtains having the striated pattern at the inclination angle that relative energising direction 90 spends.Its schematic perspective view roughly as shown in Figure 3.
Embodiment 5
Make boat similarly to Example 1, except following: the upper face center portion at rectangular parallelepiped does not form recess, is 90 degree with the energising direction, with the interval of 1mm, directly forms the ditch of 50 wide 1.0mm, dark 0.15mm, long 25mm by mechanical workout.Its schematic perspective view roughly as shown in Figure 4.
Embodiment 6
Except carrying out with sandblast the processing of ditch, make boat similarly to Example 1.
Embodiment 7
Except the processing of carrying out ditch with water spray, with the dry boat of Vacuumdrier, make boat similarly to Example 1.
Comparative example 1
Except not forming the ditch on the rectangular parallelepiped, make boat similarly to Example 1.
Comparative example 2
Except the size with ditch changes wide 2.0mm into, make boat similarly to Example 1.
Comparative example 3
Except the size with ditch changes dark 2.0mm into, make boat similarly to Example 1.
Comparative example 4
Except the interval with ditch changes into the 3.0mm, make boat similarly to Example 1.
For the boat of estimating the above embodiments and comparative example wettability,, set impressed voltage and make the temperature of boat central part reach 1550 ℃ boat end junctor connection electrode to molten metal.Then, to the heating of boat impressed voltage, in vacuum tightness 2 * 10
-2Under the vacuum of Pa, supply with aluminum steel 5 minutes to ditch portion, continue heating with the speed of 6.5 gram/minute.Aluminium is supplied with the boat upper surface of beginning after 5 minutes photograph, try to achieve wetting areas by the contrast of red heat portion and molten metal portion.Then, with this wetting areas for boat with recess divided by the floorage of recess, for the upper surface area of the boat that does not have recess divided by ceramic sintered bodies, calculate wetting areas than (%).Its result is as shown in table 1.
In addition, estimate the life-span of boat.That is, make the temperature of boat central part reach 1500 ℃, in vacuum tightness 2 * 10
-2Under the vacuum of Pa, supply with aluminum steel with the speed of 6.5 gram/minute, simultaneously with 40 minutes as unit circulation carry out evaporation test, repeat this operation.And the multiplicity when the depth of erosion maximum on the aluminum evaporation face of boat is reached 3mm is as the life-span of boat.Its result is as shown in table 1.
[table 1]
| Wetting areas (%) | Cycle index during depth of erosion 3mm | |
| Embodiment 1 | 41 | 12 |
| Embodiment 2 | 43 | 11 |
| Embodiment 3 | 41 | 12 |
| Embodiment 4 | 45 | 12 |
| Embodiment 5 | 47 | 13 |
| Embodiment 6 | 43 | 12 |
| Embodiment 7 | 39 | 11 |
| Comparative example 1 | 24 | 9 |
| Comparative example 2 | 29 | 8 |
| Comparative example 3 | 27 | 9 |
| Comparative example 4 | 26 | 9 |
Embodiment 8～10
Make boat similarly to Example 1, except following: the ditch (50 of sums) that replaces homogeneous among the embodiment 1,50 ditches are set as shown in table 2ly, make a end from the long axis direction of boat to the other end, the bar number of regulation has the different degree of depth respectively, and the ditch of middle section is the darkest.
Embodiment 11～13
Except not forming the recess, similarly make boat with embodiment 8,9 or 10 respectively at boat surface.
Embodiment 14
Make boat similarly to Example 1, except following: in embodiment 1,, the degree of depth of the ditch of the degree of depth of the ditch of central authorities' 1/3 position part of the long axis direction of ditch and its two side ends is made as 0.15mm and 0.10mm respectively for all 50 ditches.
For embodiment 8～14, the multiplicity when similarly the depth of erosion maximum on the aluminum evaporation face of boat being reached 3mm with embodiment 1～7 is as life-span of boat and measure.In addition, the wetting diffusion of following mensuration molten metal.Its result is as shown in table 2.
The wetting diffusion test of molten metal
With boat end junctor connection electrode, set impressed voltage and make the temperature of boat central part reach 1600 ℃.Then, to the heating of boat impressed voltage, in vacuum tightness 2 * 10
-2Under the vacuum of Pa, supply with aluminum steel 5 minutes to ditch portion, continue heating with the speed of 6.5 gram/minute.Aluminium is supplied with the boat upper surface of beginning after 5 minutes photograph,, measure the width (mm) and the maximum length (mm) of central part for the diffusion of molten metal portion.Its result is as shown in table 2.
[table 2]
The possibility of utilizing on the industry
The method of evaporating of boat of the present invention and metal can be used for various metal evaporations such as film etc.
Claims (15)
1. evaporation of metal heating element, it is characterized in that, at least containing conducting material TiB2 and/or zirconium diboride and megohmite boron nitride upper surface as the ceramic sintered bodies of neccessary composition, on not parallel direction, has the ditch more than 1 or 2 with the energising direction, and the width of ditch is 0.1～1.5mm, the degree of depth is 0.03～1mm, and length is more than 1mm.
2. evaporation of metal heating element as claimed in claim 1, its feature also be, has ditch more than 2 with the interval below the 2mm.
3. evaporation of metal heating element as claimed in claim 1 or 2, its feature are that also the quantity of ditch is more than 10.
4. evaporation of metal heating element as claimed in claim 1, its feature are that also not parallel with energising direction direction is 20～160 degree with respect to the energising direction.
5. evaporation of metal heating element as claimed in claim 4, its feature also are, make between the ditch and intersect, and make it have point of crossing, a place at least.
6. evaporation of metal heating element as claimed in claim 1, its feature is that also ceramic sintered bodies has recess, has ditch in the bottom surface of recess and/or the upper surface of ceramic sintered bodies.
7. evaporation of metal heating element as claimed in claim 6, its feature also are, constitute pattern in the bottom surface of recess and/or the upper surface of ceramic sintered bodies by many ditches.
8. evaporation of metal heating element as claimed in claim 7, its feature also is, the area ratio/occupancy ratio of pattern have under the situation of recess with respect to the floorage of recess, under the situation that does not have recess with respect to the upper surface area of ceramic sintered bodies respectively more than 30%.
9. evaporation of metal heating element as claimed in claim 8, its feature are that also the area ratio/occupancy ratio of pattern is more than 50%.
10. evaporation of metal heating element as claimed in claim 8, its feature are that also the area ratio/occupancy ratio of pattern is more than 80%.
11. evaporation of metal heating element as claimed in claim 1, its feature also be, the difference more than 10% is set on the degree of depth at ditch between a ditch or the different ditch.
12. evaporation of metal heating element as claimed in claim 11, its feature also be, the long axis direction that will have the relative ceramic sintered bodies of ditch in deep in Duo Tiaogou is arranged near central part or its.
13. evaporation of metal heating element as claimed in claim 11, its feature are that also the long axis direction that will have the relative ceramic sintered bodies of ditch of superficial part in Duo Tiaogou is arranged on one or both ends.
14. evaporation of metal heating element as claimed in claim 11, its feature are that also the difference of the degree of depth of the degree of depth in the deep of ditch and the superficial part of ditch is more than 0.005mm.
15. the evaporation of metals method is characterized in that, uses each the described evaporation of metal heating element in the claim 1～14, under the state of part or all and the metallic contact that make its ditch, heats in vacuum.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003390344 | 2003-11-20 | ||
| JP390344/2003 | 2003-11-20 | ||
| JP008217/2004 | 2004-01-15 | ||
| JPPCT/JP2004/010568 | 2004-07-16 |
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| Publication Number | Publication Date |
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| CN1849407A CN1849407A (en) | 2006-10-18 |
| CN100487154C true CN100487154C (en) | 2009-05-13 |
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| CNB2004800262969A Expired - Fee Related CN100487154C (en) | 2003-11-20 | 2004-11-16 | Metal vaporizing heating element and metal vaporizing method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| DE102018113528B4 (en) * | 2018-06-06 | 2022-07-28 | Cvt Gmbh & Co. Kg | evaporator body |
| CN113474313A (en) * | 2018-12-27 | 2021-10-01 | 迈图高新材料石英股份有限公司 | Ceramic composite heater including boron nitride and titanium diboride |
| CN110747434B (en) * | 2019-12-05 | 2021-10-08 | 山东国晶新材料有限公司 | Split type conductive ceramic boat |
| CN115110036A (en) * | 2022-06-09 | 2022-09-27 | 南通新江海动力电子有限公司 | Processing mold and processing method for evaporation boat and liquid guide structure |
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