GB202002861D0 - High Density vacuum plasma source - Google Patents

High Density vacuum plasma source

Info

Publication number
GB202002861D0
GB202002861D0 GBGB2002861.9A GB202002861A GB202002861D0 GB 202002861 D0 GB202002861 D0 GB 202002861D0 GB 202002861 A GB202002861 A GB 202002861A GB 202002861 D0 GB202002861 D0 GB 202002861D0
Authority
GB
United Kingdom
Prior art keywords
high density
plasma source
vacuum plasma
density vacuum
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GBGB2002861.9A
Other versions
GB2593863B (en
GB2593863A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plasma Quest Ltd
Original Assignee
Plasma Quest Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plasma Quest Ltd filed Critical Plasma Quest Ltd
Priority to GB2002861.9A priority Critical patent/GB2593863B/en
Publication of GB202002861D0 publication Critical patent/GB202002861D0/en
Publication of GB2593863A publication Critical patent/GB2593863A/en
Application granted granted Critical
Publication of GB2593863B publication Critical patent/GB2593863B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

GB2002861.9A 2020-02-28 2020-02-28 High Density Vacuum Plasma Source Active GB2593863B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB2002861.9A GB2593863B (en) 2020-02-28 2020-02-28 High Density Vacuum Plasma Source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2002861.9A GB2593863B (en) 2020-02-28 2020-02-28 High Density Vacuum Plasma Source

Publications (3)

Publication Number Publication Date
GB202002861D0 true GB202002861D0 (en) 2020-04-15
GB2593863A GB2593863A (en) 2021-10-13
GB2593863B GB2593863B (en) 2022-08-03

Family

ID=70278666

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2002861.9A Active GB2593863B (en) 2020-02-28 2020-02-28 High Density Vacuum Plasma Source

Country Status (1)

Country Link
GB (1) GB2593863B (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5429070A (en) * 1989-06-13 1995-07-04 Plasma & Materials Technologies, Inc. High density plasma deposition and etching apparatus
US6463873B1 (en) * 2000-04-04 2002-10-15 Plasma Quest Limited High density plasmas
WO2011119611A2 (en) * 2010-03-22 2011-09-29 Applied Materials, Inc. Dielectric deposition using a remote plasma source
GB2576547A (en) * 2018-08-23 2020-02-26 Dyson Technology Ltd A method

Also Published As

Publication number Publication date
GB2593863B (en) 2022-08-03
GB2593863A (en) 2021-10-13

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