GB201918479D0 - Method and apparatus for use in generating plasma - Google Patents

Method and apparatus for use in generating plasma

Info

Publication number
GB201918479D0
GB201918479D0 GBGB1918479.5A GB201918479A GB201918479D0 GB 201918479 D0 GB201918479 D0 GB 201918479D0 GB 201918479 A GB201918479 A GB 201918479A GB 201918479 D0 GB201918479 D0 GB 201918479D0
Authority
GB
United Kingdom
Prior art keywords
generating plasma
plasma
generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB1918479.5A
Other versions
GB2590612A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dyson Technology Ltd
Original Assignee
Dyson Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dyson Technology Ltd filed Critical Dyson Technology Ltd
Priority to GB1918479.5A priority Critical patent/GB2590612A/en
Publication of GB201918479D0 publication Critical patent/GB201918479D0/en
Priority to PCT/GB2020/053114 priority patent/WO2021123729A1/en
Publication of GB2590612A publication Critical patent/GB2590612A/en
Pending legal-status Critical Current

Links

GB1918479.5A 2019-12-16 2019-12-16 Method and apparatus for use in generating plasma Pending GB2590612A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB1918479.5A GB2590612A (en) 2019-12-16 2019-12-16 Method and apparatus for use in generating plasma
PCT/GB2020/053114 WO2021123729A1 (en) 2019-12-16 2020-12-04 Method and apparatus for use in generating plasma

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1918479.5A GB2590612A (en) 2019-12-16 2019-12-16 Method and apparatus for use in generating plasma

Publications (2)

Publication Number Publication Date
GB201918479D0 true GB201918479D0 (en) 2020-01-29
GB2590612A GB2590612A (en) 2021-07-07

Family

ID=69186528

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1918479.5A Pending GB2590612A (en) 2019-12-16 2019-12-16 Method and apparatus for use in generating plasma

Country Status (2)

Country Link
GB (1) GB2590612A (en)
WO (1) WO2021123729A1 (en)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6158384A (en) * 1997-06-05 2000-12-12 Applied Materials, Inc. Plasma reactor with multiple small internal inductive antennas
JPH11317299A (en) 1998-02-17 1999-11-16 Toshiba Corp High frequency discharge method, its device, and high frequency processing device
KR20030041217A (en) * 2001-11-19 2003-05-27 주성엔지니어링(주) Antenna electrode used in inductively coupled plasma generation apparatus
KR20090079696A (en) * 2008-01-18 2009-07-22 삼성전자주식회사 Plasma treatment apparatus having linear antenna
CN101971715B (en) * 2008-03-05 2016-09-28 Emd株式会社 High frequency antenna unit and plasma treatment appts
GB201006567D0 (en) * 2010-04-20 2010-06-02 Plasma Quest Ltd High density plasma source
JP6870408B2 (en) * 2017-03-21 2021-05-12 日新電機株式会社 Plasma processing equipment
US11222769B2 (en) * 2017-05-26 2022-01-11 Applied Materials, Inc. Monopole antenna array source with gas supply or grid filter for semiconductor process equipment

Also Published As

Publication number Publication date
GB2590612A (en) 2021-07-07
WO2021123729A1 (en) 2021-06-24

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