GB201918479D0 - Method and apparatus for use in generating plasma - Google Patents
Method and apparatus for use in generating plasmaInfo
- Publication number
- GB201918479D0 GB201918479D0 GBGB1918479.5A GB201918479A GB201918479D0 GB 201918479 D0 GB201918479 D0 GB 201918479D0 GB 201918479 A GB201918479 A GB 201918479A GB 201918479 D0 GB201918479 D0 GB 201918479D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- generating plasma
- plasma
- generating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1918479.5A GB2590612A (en) | 2019-12-16 | 2019-12-16 | Method and apparatus for use in generating plasma |
PCT/GB2020/053114 WO2021123729A1 (en) | 2019-12-16 | 2020-12-04 | Method and apparatus for use in generating plasma |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1918479.5A GB2590612A (en) | 2019-12-16 | 2019-12-16 | Method and apparatus for use in generating plasma |
Publications (2)
Publication Number | Publication Date |
---|---|
GB201918479D0 true GB201918479D0 (en) | 2020-01-29 |
GB2590612A GB2590612A (en) | 2021-07-07 |
Family
ID=69186528
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1918479.5A Pending GB2590612A (en) | 2019-12-16 | 2019-12-16 | Method and apparatus for use in generating plasma |
Country Status (2)
Country | Link |
---|---|
GB (1) | GB2590612A (en) |
WO (1) | WO2021123729A1 (en) |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6158384A (en) * | 1997-06-05 | 2000-12-12 | Applied Materials, Inc. | Plasma reactor with multiple small internal inductive antennas |
JPH11317299A (en) | 1998-02-17 | 1999-11-16 | Toshiba Corp | High frequency discharge method, its device, and high frequency processing device |
KR20030041217A (en) * | 2001-11-19 | 2003-05-27 | 주성엔지니어링(주) | Antenna electrode used in inductively coupled plasma generation apparatus |
KR20090079696A (en) * | 2008-01-18 | 2009-07-22 | 삼성전자주식회사 | Plasma treatment apparatus having linear antenna |
CN101971715B (en) * | 2008-03-05 | 2016-09-28 | Emd株式会社 | High frequency antenna unit and plasma treatment appts |
GB201006567D0 (en) * | 2010-04-20 | 2010-06-02 | Plasma Quest Ltd | High density plasma source |
JP6870408B2 (en) * | 2017-03-21 | 2021-05-12 | 日新電機株式会社 | Plasma processing equipment |
US11222769B2 (en) * | 2017-05-26 | 2022-01-11 | Applied Materials, Inc. | Monopole antenna array source with gas supply or grid filter for semiconductor process equipment |
-
2019
- 2019-12-16 GB GB1918479.5A patent/GB2590612A/en active Pending
-
2020
- 2020-12-04 WO PCT/GB2020/053114 patent/WO2021123729A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
GB2590612A (en) | 2021-07-07 |
WO2021123729A1 (en) | 2021-06-24 |
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