SG10202005037PA - Gas dissolution supply apparatus and gas dissolution supply method - Google Patents

Gas dissolution supply apparatus and gas dissolution supply method

Info

Publication number
SG10202005037PA
SG10202005037PA SG10202005037PA SG10202005037PA SG10202005037PA SG 10202005037P A SG10202005037P A SG 10202005037PA SG 10202005037P A SG10202005037P A SG 10202005037PA SG 10202005037P A SG10202005037P A SG 10202005037PA SG 10202005037P A SG10202005037P A SG 10202005037PA
Authority
SG
Singapore
Prior art keywords
gas dissolution
dissolution supply
supply apparatus
supply method
gas
Prior art date
Application number
SG10202005037PA
Inventor
Suguru Ozawa
Yuji Araki
Toshifumi Watanabe
Yoichi Nakagawa
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of SG10202005037PA publication Critical patent/SG10202005037PA/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20Mixing gases with liquids
    • B01F23/23Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/72Treatment of water, waste water, or sewage by oxidation
    • C02F1/78Treatment of water, waste water, or sewage by oxidation with ozone
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20Mixing gases with liquids
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20Mixing gases with liquids
    • B01F23/23Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/231Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids by bubbling
    • B01F23/23105Arrangement or manipulation of the gas bubbling devices
    • B01F23/2311Mounting the bubbling devices or the diffusers
    • B01F23/23114Mounting the bubbling devices or the diffusers characterised by the way in which the different elements of the bubbling installation are mounted
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20Mixing gases with liquids
    • B01F23/23Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/2366Parts; Accessories
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20Mixing gases with liquids
    • B01F23/23Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/2366Parts; Accessories
    • B01F23/2368Mixing receptacles, e.g. tanks, vessels or reactors, being completely closed, e.g. hermetically closed
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20Mixing gases with liquids
    • B01F23/23Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/237Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media
    • B01F23/2376Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media characterised by the gas being introduced
    • B01F23/23761Aerating, i.e. introducing oxygen containing gas in liquids
    • B01F23/237613Ozone
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20Mixing gases with liquids
    • B01F23/29Mixing systems, i.e. flow charts or diagrams
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20Measuring; Control or regulation
    • B01F35/21Measuring
    • B01F35/211Measuring of the operational parameters
    • B01F35/2111Flow rate
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20Measuring; Control or regulation
    • B01F35/21Measuring
    • B01F35/211Measuring of the operational parameters
    • B01F35/2115Temperature
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/008Control or steering systems not provided for elsewhere in subclass C02F
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • H01L21/67028Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F2101/00Mixing characterised by the nature of the mixed materials or by the application field
    • B01F2101/48Mixing water in water-taps with other ingredients, e.g. air, detergents or disinfectants
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F2101/00Mixing characterised by the nature of the mixed materials or by the application field
    • B01F2101/58Mixing semiconducting materials, e.g. during semiconductor or wafer manufacturing processes
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2103/00Nature of the water, waste water, sewage or sludge to be treated
    • C02F2103/02Non-contaminated water, e.g. for industrial water supply
    • C02F2103/04Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2201/00Apparatus for treatment of water, waste water or sewage
    • C02F2201/78Details relating to ozone treatment devices
    • C02F2201/784Diffusers or nozzles for ozonation
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2209/00Controlling or monitoring parameters in water treatment
    • C02F2209/02Temperature
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2209/00Controlling or monitoring parameters in water treatment
    • C02F2209/03Pressure
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2209/00Controlling or monitoring parameters in water treatment
    • C02F2209/40Liquid flow rate
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/08Air or gas separators in combination with liquid meters; Liquid separators in combination with gas-meters

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Water Supply & Treatment (AREA)
  • Organic Chemistry (AREA)
  • Hydrology & Water Resources (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Accessories For Mixers (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
SG10202005037PA 2019-06-04 2020-05-28 Gas dissolution supply apparatus and gas dissolution supply method SG10202005037PA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019104150A JP7240260B2 (en) 2019-06-04 2019-06-04 GAS SOLUTION SUPPLY DEVICE AND GAS SOLUTION SUPPLY METHOD

Publications (1)

Publication Number Publication Date
SG10202005037PA true SG10202005037PA (en) 2021-01-28

Family

ID=70977356

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10202005037PA SG10202005037PA (en) 2019-06-04 2020-05-28 Gas dissolution supply apparatus and gas dissolution supply method

Country Status (7)

Country Link
US (1) US11352274B2 (en)
EP (1) EP3747535B1 (en)
JP (1) JP7240260B2 (en)
KR (1) KR102639443B1 (en)
CN (1) CN112023736A (en)
SG (1) SG10202005037PA (en)
TW (1) TWI815010B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7412200B2 (en) * 2020-02-06 2024-01-12 株式会社荏原製作所 Gas solution manufacturing equipment
KR102564803B1 (en) * 2021-05-20 2023-08-07 홍승훈 System for dissolving gas
CN114057273B (en) * 2021-11-22 2022-08-19 三峡大学 High-solution gas water preparation device, high-solution gas water preparation method and application

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2749495B2 (en) * 1993-03-15 1998-05-13 長廣 仁蔵 High concentration ozone water production method and high concentration ozone water production device
JPH11244873A (en) 1998-03-05 1999-09-14 Meidensha Corp Photocatalyst reactor
US6561382B2 (en) * 2001-06-15 2003-05-13 S.I.P. Technologies, L.L.C. Method and apparatus for disinfecting a water cooler reservoir and its dispensing spigot(s)
JP2001137862A (en) 1999-11-11 2001-05-22 Teeiku Wan Sogo Jimusho:Kk Ozonized water generator
US6805791B2 (en) 2000-09-01 2004-10-19 Applied Science And Technology, Inc. Ozonated water flow and concentration control apparatus
JP2002316027A (en) 2001-04-19 2002-10-29 Ebara Corp Device and method for manufacturing gas-dissolved water, device and method for ultrasonic cleaning
JP2003117364A (en) 2001-10-19 2003-04-22 Mitsubishi Heavy Ind Ltd Apparatus and method of dissolving gas in liquid and method of manufacturing gas-dissolved liquid
KR200294901Y1 (en) * 2002-07-18 2002-11-13 동우기연 주식회사 The System for Generating Ozonied-Water
JP2005161284A (en) * 2003-11-28 2005-06-23 Nittetu Chemical Engineering Ltd Method for supplying ozonized water of constant concentration
CN104722239A (en) 2008-05-19 2015-06-24 恩特格里公司 Gasification method and device for making bubble free solutions of gas in liquid
JP5635800B2 (en) 2010-04-23 2014-12-03 パナソニック株式会社 Oxygen water generator
JP2014117628A (en) 2012-12-13 2014-06-30 Ebara Corp Circulation type method and apparatus for supplying ozone water
JP6734621B2 (en) * 2014-02-20 2020-08-05 オルガノ株式会社 Ozone water supply method and ozone water supply device
JP6210917B2 (en) * 2014-03-26 2017-10-11 トスレック株式会社 Nano bubble production equipment
JP6826437B2 (en) * 2016-01-15 2021-02-03 株式会社荏原製作所 Supply liquid manufacturing equipment and supply liquid manufacturing method
JP7051410B2 (en) 2017-12-11 2022-04-11 富士通コンポーネント株式会社 Printing equipment
CN208642344U (en) * 2018-07-19 2019-03-26 苏州方舟环保科技有限公司 A kind of high-concentration ozone water manufacturing equipment for sterilizing

Also Published As

Publication number Publication date
US11352274B2 (en) 2022-06-07
KR102639443B1 (en) 2024-02-23
JP2020195967A (en) 2020-12-10
TW202100234A (en) 2021-01-01
EP3747535B1 (en) 2022-05-18
CN112023736A (en) 2020-12-04
TWI815010B (en) 2023-09-11
JP7240260B2 (en) 2023-03-15
KR20200139630A (en) 2020-12-14
EP3747535A1 (en) 2020-12-09
US20200385295A1 (en) 2020-12-10

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