GB2019172A - Control circuit for a hot-cathode electron source device - Google Patents

Control circuit for a hot-cathode electron source device

Info

Publication number
GB2019172A
GB2019172A GB7910461A GB7910461A GB2019172A GB 2019172 A GB2019172 A GB 2019172A GB 7910461 A GB7910461 A GB 7910461A GB 7910461 A GB7910461 A GB 7910461A GB 2019172 A GB2019172 A GB 2019172A
Authority
GB
United Kingdom
Prior art keywords
hot
control circuit
cathode
electron source
source device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB7910461A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of GB2019172A publication Critical patent/GB2019172A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/242—Filament heating power supply or regulation circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Microwave Tubes (AREA)

Abstract

A control circuit for a LaB6 hot- cathode electron source has a D.C. supply 15 applied to a resistor and zener diode 16 in series. The zener 16 voltage is divided by series resistors r1, r2, r3, change-over switch 17 selecting a suitable voltage to be applied to the base of transistor 19; alternatively a potentiometer may be used. Hence the input of D.C. to D.C. converter 20 is varied, controlling correspondingly the heating current through thermionic cathode 1. So by varying the current in correspondence with the focussed diameter of the beam, he the emission of the cathode may be adapted to suit any selected magnification of a scanning electron microscope. <IMAGE>
GB7910461A 1978-03-25 1979-03-26 Control circuit for a hot-cathode electron source device Withdrawn GB2019172A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3446678A JPS6016700B2 (en) 1978-03-25 1978-03-25 Hot cathode electron source device

Publications (1)

Publication Number Publication Date
GB2019172A true GB2019172A (en) 1979-10-24

Family

ID=12415018

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7910461A Withdrawn GB2019172A (en) 1978-03-25 1979-03-26 Control circuit for a hot-cathode electron source device

Country Status (4)

Country Link
JP (1) JPS6016700B2 (en)
DE (1) DE2911741A1 (en)
GB (1) GB2019172A (en)
NL (1) NL7902266A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0031579A2 (en) * 1979-12-26 1981-07-08 Kabushiki Kaisha Toshiba Method for determining the optimum operative conditions of the electron gun of an electron beam apparatus
WO2002011167A1 (en) * 2000-07-31 2002-02-07 Communication And Power Industries, Inc. Adaptive heater voltage control and monitoring systems and method for setting and maintening the heater voltage of a vacuum electron device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0031579A2 (en) * 1979-12-26 1981-07-08 Kabushiki Kaisha Toshiba Method for determining the optimum operative conditions of the electron gun of an electron beam apparatus
EP0031579A3 (en) * 1979-12-26 1982-05-12 Tokyo Shibaura Denki Kabushiki Kaisha Electron beam apparatus
WO2002011167A1 (en) * 2000-07-31 2002-02-07 Communication And Power Industries, Inc. Adaptive heater voltage control and monitoring systems and method for setting and maintening the heater voltage of a vacuum electron device
US6456009B1 (en) 2000-07-31 2002-09-24 Communication And Power Industries Adaptive heater voltage algorithm and control system for setting and maintenance of the heater voltage of a vacuum electron device

Also Published As

Publication number Publication date
JPS6016700B2 (en) 1985-04-26
JPS54127272A (en) 1979-10-03
NL7902266A (en) 1979-09-27
DE2911741A1 (en) 1979-10-11

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)