NL7902266A - ELECTRON SOURCE UNIT WITH HOT CATHOD. - Google Patents

ELECTRON SOURCE UNIT WITH HOT CATHOD.

Info

Publication number
NL7902266A
NL7902266A NL7902266A NL7902266A NL7902266A NL 7902266 A NL7902266 A NL 7902266A NL 7902266 A NL7902266 A NL 7902266A NL 7902266 A NL7902266 A NL 7902266A NL 7902266 A NL7902266 A NL 7902266A
Authority
NL
Netherlands
Prior art keywords
cathod
hot
source unit
electron source
electron
Prior art date
Application number
NL7902266A
Other languages
Dutch (nl)
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of NL7902266A publication Critical patent/NL7902266A/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/24Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/242Filament heating power supply or regulation circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Microwave Tubes (AREA)
NL7902266A 1978-03-25 1979-03-22 ELECTRON SOURCE UNIT WITH HOT CATHOD. NL7902266A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3446678A JPS6016700B2 (en) 1978-03-25 1978-03-25 Hot cathode electron source device

Publications (1)

Publication Number Publication Date
NL7902266A true NL7902266A (en) 1979-09-27

Family

ID=12415018

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7902266A NL7902266A (en) 1978-03-25 1979-03-22 ELECTRON SOURCE UNIT WITH HOT CATHOD.

Country Status (4)

Country Link
JP (1) JPS6016700B2 (en)
DE (1) DE2911741A1 (en)
GB (1) GB2019172A (en)
NL (1) NL7902266A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4424448A (en) * 1979-12-26 1984-01-03 Tokyo Shibaura Denki Kabushiki Kaisha Electron beam apparatus
US6456009B1 (en) 2000-07-31 2002-09-24 Communication And Power Industries Adaptive heater voltage algorithm and control system for setting and maintenance of the heater voltage of a vacuum electron device

Also Published As

Publication number Publication date
GB2019172A (en) 1979-10-24
DE2911741A1 (en) 1979-10-11
JPS54127272A (en) 1979-10-03
JPS6016700B2 (en) 1985-04-26

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Legal Events

Date Code Title Description
A1A A request for search or an international-type search has been filed
BV The patent application has lapsed